Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Weight (g) d L4 Model L3 D1 T H D2 D3 L1 L2 Max. Min.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

H (Hexagon width across flats) (Hexagon width across flats) D3 D3 L5 A1 A2 A1 D1 L5 D1 A2 T T Inch Size Weight (g) L4 (1) L5 (1) A1 (2) A2 (2) M1 d T H D1 D2 D3 L1 L2 L3 Model Max.

IP8101 Series

Power supply Load voltage + + + + Power supply Load voltage Power supply voltage Load Fig. 11 Table 7 A F H Terminal no.

XLF Series

H H H B B B B A A A A A A A A Unit: mm Model A B C D E Fn Fd G H XLF-16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196 100 3 11 87 95 70 69 XLF-80 90 235 117 3 11 114 110 83 96 XLF-100 108 300 154 3 11 134 130 102 131 XLF-160 138 315 200 3 11 190 180 153 112 9 XL*-OMJ0003-D 5.

Plug-in/Plug Lead: Single Unit

2 position double: VQ5250 1-G H 3 position closed center: VQ5350 1-G H 3 position exhaust center: VQ5450 1-G H 3 position pressure center: VQ5550 1-G H 194.5(200) 121.3 53 73.2(78.7) Indicator light 213 121.3 91.5 13.5 2(B) port 59.5 53 4 (A) port17.5 13.5 2(B) port 59.5 4(A) port 17.5 Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1

VDW

Material and insulation type Symbol Nil A G H L Body material Coil insulation type Seal material NBR FKM NBR FKM FKM C.O.

VDW Series

Type 30 Passage pipe assembly VVCW20 2 C 1 01 Types 10, 20 VVDW 2 0 6A Material Brass Stainless steel C S Thread type Materials Series Symbol Nil A G H Rc G NPT Nil F N Pipe material 1 2 10 20 Seal material NBR FKM NBR FKM Stations Brass For 2 stations For 3 stations OUT port size 1 2 Stainless steel Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Type 30 VVCW20 6A Materials Symbol Nil A G H Seal

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

ZP

ZP C ZCU Dimensions H B AMJ Ball joint type: 10 to 32 Misc.

IDX-OM-W053

CM PE FM1 PRS P FM2 PE CM FM 12 OLR PTC PTC ILS PRS TB PE GFCI EDV 6 3 6 6 4 2 6 4 7 A A 7 1 7 2 A m 3/h(ANR) 1) (50/60Hz) 0.32/0.375 10 1ANR 65% 2 7 3 7 1 8 C 8 C 8-1 8-2 1) 2) 8-3 8 1 9 G G 9-1 9 1 10 H 10 H 10-1 ( ) 10-2 () AD48-2-A 10 IDFA6E-20-H N.O. () 0.151.0MPa 10 1 10 H IDF-S1941 () 1 AD48-2-A 1 1) 2019 3 2019 2 SERIAL No.XP IDF-S1940

Air preparation filter

H) Mount the removed drain port spacer. I) Rotate the new drain cock assembly in the direction shown by the arrow below by hand, and tighten it lightly. J) Rotate the lock nut by using a spanner or monkey wrench while lightly holding the internal assembly (chamber head). Tightening torque of the lock nut is 2Nm. H) I) J) Tightening torque 2Nm Tighten lightly.

ITV_D-E

O R LESS H YSTERESI S 0. 5% F. S. O R LESS PREPEATABI LI TY 0. 5% F. S. O R LESS SEN SI TI VI TY 0. 2% F. S.

PSxx-OMH0002CN

ISE70/ISE75(H) ISE70/ISE75(H) ISE70/ISE75(H) () 1 ON ON OFF Yes No 2 OFF ON 1 OFF 3 4 5 -26No.PS-OMH0002CN-D 6 Yes No 7 7 8 9 10 11 12 13 14 15 -27No.PS-OMH0002CN-D No.

Series H, DL, L, LL Self-align Fittings

Solid piece moves fittings up from workpiece. 103 Series H, DL, L, LL Self-align Fittings Male connector: H Applicable tube O.D. (mm) M Effective orifice (mm2) Thread R(PT) Part No. H1 (Hex.) H2 (Hex.)

S Couplers

T T 26 13 H L1 L1 H L3 (mm) (mm) H Width across flats 18 28 38 73 18 28 38 73 H Width across flats 90 92 91 117 90 92 91 117 When connected T Connection male thread T Connection male thread Min. hole size Min. hole size Weight g Model Weight g Model L1 L2 L1 Full length L3 KK130S(L)-01F -02F -03F -04F KK130P-01F -02F -03F -04F 53.0 62.5 66.5 76.0 53.0 62.5 66.5 76.0 Rc1/8 Rc1/4 Rc3/8 Rc1/

KS/KX

T VMG Applicable tubing Connection thread (With seal) Male Elbow: KXL (High speed) H (width across flats) Applicable tubing O.D.

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

JXCx-OMT0005CN

No.1 , Byte0bit0IN0 =ON Byte0bit15 IN15=OFF 3Byte2bit47Byte3 bit07 No. bit ON bit OFF / 24V 0V ON 2 IN05 OFF SVON DRIVE DRIVE OFF 1 5 Min 15ms 3 4 ON BUSY OFF SVRE [] Byte2, bit6=ON Byte2,bit45=OFF Byte3,bit07=OFF (4)Byte5,bit01 Byte635 []50.00[mm] 5000[0.01mm]=(01388)h Byte8(LL)= (88) h Byte9(LH)= (13) h Byte10(HL)= (00) h Byte11(HH)= (00) h 5 bit Byte4 bit0 =ON ON 6Byte1bit0BUSY

LEC-OM038xx

When 00 01 11 70 h is input to the register, please do as following.

Electric Actuator / Low profile slider type

Fixing bolt (2pcs) Stroke adjusting unit LEMB LEMH/C LEMHT Recommended Model Bolt tightening torque [Nm] LEMB M4 1.5 LEMC/H/HT25 M3 0.63 LEMC/H/HT32 M4 1.5 -40- 6.4 Precaution on maintenance Warning 1. Turn off the power supply before maintenance and replacement of the product. [Maintenance frequency] Perform maintenance according to the table below.