(oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG50HACompressed air0.3 to 1.0 5 to 50 5 to 50 15550500500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.81

(oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60SACompressed air0.3 to 1.0 5 to 50 5 to 50 607550250.72525251 L/min [ANR] {In case of Inlet

(C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/21.50(1.65

(C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG75Compressed air0.3 to 1.0 5 to 50 5 to 50 209007501500.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/21.50(1.65

air pressure (MPa)Inlet air temperature (oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60LACompressed air0.3 to 1.0 5 to 50 5 to 50 40224170540.72525251

, 100, 150200, 250, 30015.44.44.04 to 7.8718 to 5003000--50 or less ?

, 100, 150200, 250, 30015.44.44.04 to 7.8718 to 5003000--50 or less ?

, 100, 150200, 250, 30015.44.44.04 to 7.8718 to 5003000--50 or less ?

temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG30ACompressed air0.3 to 1.0 5 to 50 5 to 50 20360300600.72525251 L/min [ANR] {In case of Inlet air pressure 0.7 MPa}

1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60LACompressed air0.3 to 1.0 5 to 50 5 to 50 40224170540.72525251 L/min [ANR] {In case of Inlet air pressure

(oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG100LACompressed air0.3 to 1.0 5 to 50 5 to 50 404003001000.72525251 L/min [ANR] {In case of Inlet

(oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG100LACompressed air0.3 to 1.0 5 to 50 5 to 50 404003001000.72525251 L/min [ANR] {In case of Inlet

(oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60LACompressed air0.3 to 1.0 5 to 50 5 to 50 40224170540.72525251 L/min [ANR] {In case of Inlet

, 100, 150200, 250, 30015.44.44.04 to 7.8718 to 5003000--50 or less ?

(oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG100HCompressed air0.3 to 1.0 5 to 50 5 to 50 15111010001100.72525251 L/min [ANR] {In case of Inlet

(oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG50LACompressed air0.3 to 1.0 5 to 50 5 to 50 40135110250.72525251 L/min [ANR] {In case of Inlet

, 100, 150200, 250, 30015.44.44.04 to 7.8718 to 5003000--50 or less ?

, 100, 150200, 250, 30015.44.44.04 to 7.8718 to 5003000--50 or less ?

air pressure (MPa)Inlet air temperature (oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60LACompressed air0.3 to 1.0 5 to 50 5 to 50 40224170540.72525251

air pressure (MPa)Inlet air temperature (oC) Note 1)Ambient temperature (oC) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60LACompressed air0.3 to 1.0 5 to 50 5 to 50 40224170540.72525251