SMC Corporation of America
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Speed Speed Acceleration Deceleration Position In pos ON INP output ON OFF 25 - Step No. 1: Positioning operation a b c d e f g h i j k Step data No.

ON(SVON ON) (1-193) E ON(SVON ON) (1-194) E (1-195) E E EEPROM (1-197) E (EEPROM 10 ) CPU (CPU ) CPU (1-198) CPU E 64 - Revision history No.JXC-OMT0028CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part

FGD-KT002 FGDE Nut kit FGD-KT003 FGDT FGD-KT004 FGDF FGD-CV005-03 FGDT,F-03 FGD-CV005-04 FGDT,F-04 FGD-CV005-06 FGDT,F-06 Replacement cover (5) FGD-CV006-03 FGDC,E-03 FGD-CV006-04 FGDC,E-04 FGD-CV006-06 FGDC,E-06 Joint FGD-OP001 FGDB (10) KT-FGDC FGDC Each of (2)(4)(6)(13) and (16) are provided as a kit.

E Error log A chronological list of previous errors occurred. A maximum of 30 errors can be recorded. Enforced output function A function to drive an output signal forcibly, ignoring control data from the PLC. A function to specify an input signal forcibly, ignoring signal from the connected sensor.

Power supply N AC100 to 240V AC200 to 240V Facility water temp. 20deg.C Facility water temp. 20deg.C Cooling capacity W 1500 1500 connector L AC100 to 240V AC200 to 240V (IEC60320,C14) 1000 1000 E This symbol warns you of potential burns. E PE Item Spec. 500 500 Facility water temp. 35deg.C RS-232C RS-485 Model No.

,e) (A set of b,c,d,e) Switch bracket Transparent (Nylon) Note 1) a a () e (PBT) 1) White (PBT) e Auto switch b b Switch holder (With switch installed) ( Auto switch d mounting screw d c Auto switch mounting band c *Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).

5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.

Description Material q w e r No. Description Material Note o !0 !1 !2 NBR Brass Brass Steel O-ring Body Needle Lock nut Nipple Zinc alloy Stainless steel Brass Stainless steel Needle guide Electroless nickel plated Electroless nickel plated Black oxidized coated Handle E type snap ring Electroless nickel plated Replacement Parts No.

2 r w e i !0 !5 t u y Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MDHR2 !4 q !3 @0 o !2 !1 !9 w !8 i !6 !7 i e r !5 !0 y u t Component Parts Note Description Material Note Description Material No. q w e r t y No. !1 !

2 r w e i !0 !5 t u y MDHR2 q !4 !3 o @0 !2 !1 !9 w !8 i !6 i !7 e r !5 !0 t y u Component Parts Component Parts Description Material Description Material Note No. q w e r t y No. !1 !2 !3 !4 !5 !6 !7 !8 !

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

port R port P , E port R port Electrical entry Note) VZ52R is for manifold only.

E Symbol Type Stations A and B port sizes are same as port sizes in standard body size.

Determination of loads kinetic energy (E) E Es Bore size determination (W + WB) V 2 E = x ( ) 2 x 2.2 39.4 E Es Note 2) Determination of pressure (P) when making intermediate stop P Ps Review of order made products based on operating conditions (Refer to page 4 for intermediate stops.)

SS070M013A Replacement Parts No. e r Part no. Description Material Number SS070M-80A-1 Gasket FKM 10 SS070M-80A-2 Clip Stainless steel 10 4-11-16 Series S070 Specific Product Precautions 1 Be sure to read before handling. Valve Mounting/Removal Screwing in M5/M3 Thread Caution Caution 1.

E: Contents are added. F: Contents revised in several places. G: Contents are added. H: Contents are added. I: Contents revised in several places. J: Contents are added. K: Contents are added. L: Contents revised in several places. M: Contents revised in several places.[March 2017] N: Contents revised in several places.

VMG Material Brass Brass Brass No. 1 2 3 4 Description Sleeve Stud Barb elbow Gasket Note Electroless nickel plated Electroless nickel plated Electroless nickel plated J D NBR, Stainless steel I G F E C Thread B A Barb one-touch: M-32F-2, M-04F-2 Applicable tubing (mm) a (O.D. x I.D.) b (O.D.) 3.2 4 2 x 1 .2 Weight g A B C D E M Model M-32F-2 M-04F-2 17.7 18 1 3.7 14 7.5 8.5 2.4 2.9 4 0.9