Size: 25, Motor Mounting: D (In-line Type), Motor Type: A (Servo Motor, 24 VDC), Lead: B (LEY25, 6; LEY32/40, 8), Stroke: 400mm, Motor: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: F (Rod Flange), Actuator Cable Length: 5m, Controller Type (LEC, JXC): 6P (LECA6, Step Data Input Type, PNP), I/O Cable Length for LEC: 1 (1.5m), Controller Mounting: D (
Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: A (LEY25, 12; LEY32/40, 16), Stroke: 150mm, Motor: B (w/Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 1.5m, Controller Type (LEC, JXC): 1P (LECP1, Programless Type, PNP), I/O Cable Length for LEC: 1 (1.5m), Controller
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: F (2 pcs D-A93 w/D-sub Connector)
Series: 5 (10-SY5000), Actuation: 1 (2 Position, Single), Coil Specification: None, Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal, w/Connector), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: D (Push-turn Locking, Slotted Type), A, B Port Size: 01 (1/8), Thread: N (NPT), Bracket: F2 (w/Side Bracket)
: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D
: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D
: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D
: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D
: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D
: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D
: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D
: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D
Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D
Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D
Units: Z [Product: psi, °C; Pressure Gauge: psi (and MPa)], D: D