® Fieldbus System Series EX600

D-sub connector (25 pins) Note1) 2) Spring type terminal block (32 pins) Note1) 2) DM EX600 Digital Input/Output Unit Input/Output type Number of inputs/outputs and connector Description PNP NPN Number of inputs 8 inputs 8 inputs Number of outputs 8 outputs 8 outputs Symbol Connector Symbol P N E F D-sub connector (25 pins) Note1) 2) Spring type terminal block (32 pins) Note1) 2) Note 1)

21- AF-A 10- Series Air Filter

Note 8) Note 8) Note 8) Note 8) Note 1) Drain guide is NPT1/8 (applicable to size 20), and NPT1/4 (applicable to size 30 to 60).

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

How to Order Valves How to Order Manifold Assemblies Example 4 0 5 SY 3 1 FU Single solenoid 2 position single Supply/Exhaust block (U side mounting) SY3140-5FU (3 sets) Double solenoid 5 FU Double/3 position 5 SY 3 2 4 SY3245-5FU (1 set) Series 3 SY3000 5 SY5000 Type of actuation 2 2 position double 3 3 position closed center 24VDC +COM + 1 2 3 Stations D side U side 4 3 position exhaust

VBA-OM-S001

VBAT05A1-U-X104 O-ring For VBA1 mounting 1 pc. Accessory set VBAT5A-Y-3 Hex. socket head plug For Drain port 1 pc. AIR TANK Safety valve Pressure gauge Piping components for tank connection 1 pc. 1 pc. 1 pc.

Mini Free Mount Cylinder ø4, ø6, ø8, ø10 Series CUJ

Mini Free Mount Cylinder 4, 6, 8, 10 Series CUJ How to Order Bore size 4 6 8 10 4 mm 6 mm 8 mm 10 mm Made to Order Refer to pages 2 and 24 for details. 6 D 10 CUJ B D 10 F8N With auto switch CDUJ B 6 With auto switch (Built-in magnet) Number of auto switches 2 pcs. 1 pc. Nil S Mounting B Basic (Through-hole) M9: with 1 pc.

M-E06-4-LQ3

) 03 (3, 1/8"), 04 (4), 06 (6), 07 (1/4") only Table 1 Tubing Size Symbol Metric size Inch size Tubing O.D. 3 03 4 04 6 06 8 08 10 10 12 12 19 19 25 25 1/8" 03 1/4" 07 3/8" 11 1/2" 13 3/4" 19 1" 25 Symbol Note 1) GPS GB GB GPS Fitting type Note 1) Sizes with the same symbol number and 06 and 07 are common sizes. 6 c Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN

Series 10-MGF ø40, ø63, ø100 Guide Table

4 1/4 1/8 40 P 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C M6 M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

Series IRV10/20 Vacuum Regulator

IRV10A P P P P IRV20A P P P P P P Accessory q Note 1) C06 C08 C10 N07 N09 N11 6 8 10 1/4" 5/16" 3/8" Metric None With bracket With bottom bracket Nil B L Inch Note 1) Accessories are shipped together. Bottom bracket 1

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8

VXH

assembly Seal 6 Stainless steel, NBR 7 Stainless steel 8 Stainless steel 9 Stainless steel 10 SPC Option 11 Stainless steel 12 AL 13 NBR 14 15 CR 16 DIN terminal Cable 6 to 12 Hexagon width across flats 22 DIN terminal Conduit terminal 2 x Rc , , 4 1 8 3 2 1 (For only VXH2230-04, Rc ) 2 x M5 x 0.8 x 8 2 1 For Rc 1/4, 3/8 334

EX600-SDNA_eng

(Default setting) 8 7 Configuration Mode Address X1 9 6 x10 x1 2 1 0 0 5 Mark C on the unit Mark B at cable end Mark A at cable end 4 Address 1 9 4 3 1 0 : : (1) 2 3 Input data + System diagnosis + Unit diagnosis (Up to 10 units) Input data + System diagnosis Input data only (Default setting) 8 7 9 6 6 Content 3 4 1 2 0 5 Content 5 0 (Default setting) 4 1 2 3 Node Address Data Rate 8 7 PGM

Regulator AR30 to 60

R Z Standard specifications AR40 AR40-06 AR50 AR60 1 AR30 Model Port size Fluid Proof pressure Maximum operating pressure Regulating pressure range Gauge port size Relief pressure Ambient and fluid temperature Construction Weight (kg) 1 2 1 4 3 8 , 1 4 3 8 , , 4 3 3 4 1 , Air 1.5MPa 1.0MPa 0.05 to 0.85MPa 1 4 1 4 1 8 1 4 1 4 Note 1) Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

0.5 M3 x 0.5 25 25 Finger closing port M3 x 0.5 M3 x 0.5 (A, B common view) Finger opening port M3 x 0.5 thread depth 4 4 x M3 x 0.5 thread depth 6 (A, B common view) Vacuum suction port 31 Auto switch mounting groove 2 x 4.2 0 9h9-0.036 4.7 1 9.6 2-3 4.7 3 10 19 (35) 32 8 15.5 2 2 8-0.05 0 3-0.02 0 3-0.02 0 13.4 Open: 16, Closed: 10 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Valve stations are numbered from station 1 on the D side. Indicate the valves to be mounted below the manifold part number, in order starting from station 1 as shown in the drawing.

Compact Rotary Actuator Rack & Pinion Style Series CRQ2 How to Order CRQ2B S 20 90 Without auto switch CDRQ2B S 20 90 M9BW With auto switch Built-in magnet Number of Shaft type auto switches S Single shaft 2 pcs. Nil W Double shaft S 1 pc. ∗ Refer to p

8, G 1/8, NPT 1/8, NPTF 1/8 Port size Output (Nm) 0.3 0.75 1.8 3.1 5.3 MSU Output under the operating pressure at 0.5 MPa.

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 KE N AS-FG AS-FG AS-FP Note) For applicable tubing O.D. selection, refer to the Model on page 680. Use 1/8" tube.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

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6 TUZ0805 8 TUZ1065 10 TUZ1208 Tubing O.D.