SMC Corporation of America
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Avoid connecting ground lines to piping, as this may cause electric corrosion of the system. 33 Series VXF2/VXFA2 Specific Product Precautions 3 Be sure to read before handling. Refer to back cover for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) and the Operation Manual for 2 Port Solenoid Valves for Fluid Control.

Please turn off the EMG terminal when energizing to the BK RLS terminal at motor drive power is OFF. 33 - 7. CN5: Communication Plug Connector 7.1 Wiring The communication plug connector specification of the optional product is shown below.

(A) 4 (B) 2 Response Time 5 (EA) 1 (P) 3 (EB) Response time (ms) (at the pressure of 0.5 MPa) 3 position pressure center Type of actuation SV1000 SV2000 SV3000 SV4000 (A) 4 (B) 2 11 or less 25 or less 28 or less 40 or less 2 position single 10 or less 17 or less 26 or less 40 or less 2 position double 5 (EA) 1 (P) 3 (EB) 18 or less 29 or less 32 or less 82 or less 3 position 15 or less 33

Stopper ring Carbon steel Zinc chromated 28 5 Piston rod Carbon steel Hard chromium electroplated Cushion valve seal NBR 29 6 Bushing Lead-bronze casted Rod end nut Rolled steel Nickel plated 30 7 Cushion ring A Rolled steel Electroless nickel plated Rod seal NBR 31 8 Tie-rod Carbon steel Zinc chromated Piston seal NBR 32 9 Tie-rod nut Rolled steel Nickel plated Cylinder tube gasket NBR 33

Refer to page 26 through to 33 for PCW type with power supply terminal. 10 Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type How to Order Solenoid Valves SJ 3 1 U 60 C6 5 C Standard SJ 3 1 C Z J 60 C6 5 With switch Individual wiring SJ 3 1 Z 60 C6 5 M Note 1) [For plug-in mixed mounting] Single solenoid wiring spec.

Reed switch Zener diode 20 0.5 Lead wire length (m) Switch main circuit 3 76 5 LED OUT () Blue Unit: mm Dimensions Indicator light / Display method 33 6.5 13 Operating range Display Red Green Red 14.3 15 12 Optimum operating position Indicator light 6.5 4.5 4 9.5 12.6 Most sensitive position 65 Safety Instructions These safety instructions are intended to prevent hazardous situations and

L dimension 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 Direct Mounting Style (-E) Manifold is mounted by using mounting holes of both sides of the manifold. DIN rail is not sticking out of the edge of end plate. (Except SQ2000 T kit type. Refer to pages 37 and 38.)

Initial value: Set to [0.50] or higher. 33 Slider Type/EQFSH Series Integrated Controller Electric Actuator Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the insulation material, whichever is larger. Replace the damaged lead wire with a new one. Wire correctly. Incorrect wiring can break the product. Do not perform wiring while the power is on.

Mb. steel Brake arm Carbon steel 8 32 Hex'9)1 met ~ cap 3:l"el'l Nitrided Nickel plated Stainless Arm holder 9 Carbon steel Steel wire Spring washer 33 Nitrided Black zinc chromate 10 Brake shoe holder Carbon steel Spring washer 1 34 Steel wire Black zinc chromate Brake shoe 11 Special brake malenal Spring washer Nitrided 1 35 Steel wire Black zinc chromate 12 Roller Cr.

Vespel is a registered trademark of DuPont. 33 Single Stage Regulator for Ultra High Purity Low flow (Tied-diaphragm) Series AZ1500 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Body material: 316L SS Hastelloy internals available for corrosion resistance Tied-diaphragm design How to Order Port Number q w e r AZ15 S FV4 FV4 02 2PW Delivery pressure Bonnet option

Grommet Conduit DIN terminal Conduit terminal L VXK21l0 VXK22l0 VXK23l0 I J 40 43 46 I J 58.5 61.5 64 I 44 53 59.5 J 46.5 49.5 52 K (92) (95) (98) I 44.5 53.5 60 J K L 30 33 36 I J 48.5 51.5 54 I J 65.5 68.5 71 I 44 53 59.5 J 53.5 56.5 59 K I 43 52 58.5 J K VXK21l2 VXK22l2 VXK23l2 2, 3, 4.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 52 61 67.5 43 52 58.5 19.5 22.5 25.5 44.5 53.5 60 (61) (129) 48 57 63.5

Series RQ Mounting Bracket Dimensions Foot type Foot type/RQL, RDQL mm B + Stroke L Bore size (mm) Stroke range (mm) A B LS L L1 LD 20 to 100 32 37 6.6 61.2 21 17 38.5 20 to 100 40 44 6.6 68.2 28 17 38.5 Special cap bolt LH LY 30 to 100 50 49.5 9 75.7 26.5 18 43.5 mm LX X X LG Y Y Bore size (mm) 3.2 4-LD LS + Stroke A + Stroke LG LH LX LY LZ X Y LZ 32 4 57 57 11.2 30 71 5.8 40 4 64 64 11.2 33

www.stevenengineering.com 2-M5 x 0.8 thread depth 4.5 (Piping port) IN 2-M3 x 0.5 (Through-hole) 2-M3 x 0.5 CX (Through-hole) D2-M5 x 0.8 thread depth 4.5 2-M3 x 0.5 thread depth 4.5 (Opposite side: Same) S (13 + ST) 10 (Piping port) (Opposite side: Same) -X 3 208 6 Data 22.5 11 Z (10 + 1/2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model CXS6-10 CXS6-20 CXS6-30 CXS6-40 CXS6-50 68.5 10 15 23 55 78.5 20 20 33

Limitations of Use 33 13. Troubleshooting 34 -1No. ZKJ-OM00201-D Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

filter FLUID OUT AIR SUP FLUID IN Air supply AIR EXH Strainer Silencer Throttle Transfer fluid 14 Series PAX1000 Dimensions 4-M8 (M6 hexagon socket head screw can be inserted) 10.5 105 7.5 Mounting hole detail 69 Reset button 100 125 23 RESET (175) AIR SUP (pilot air supply port) Rc 1/4 FLUID IN Rc 1/4, 3/8 FLUID OUT Rc 1/4, 3/8 PROCESS PUMP AIR SUP 110 45 29 FLUID IN FLUID OUT AIR EXH 33

Refer to the dimensions on page 5 for the mounting dimensions. (35) (25) 5.5 8 (1.5) L Dimensions (mm) No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L dimension 110.5 135.5 160.5 185.5 210.5 235.5 260.5 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 40 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 L dimension 285.5 310.5 335.5 360.5 385.5 410.5 435.5 460.5 485.5

If the temperature fuse operates, it will fail to control temperature, but the product operation will not stop. 33 IDH Series 3.4 Shutdown IDX-OM-W037 Thermo-dryer 3. Operation/ Shutdown Caution The protection devices are automatic return type. Please wait at least 3 minutes after operation stops.

Indication and How to Order 8 Summary of Product parts 8 Mounting and Installation 9 Installation 9 Wiring 10 Setting 15 Setting of baud rate (Communication speed) 17 Overview object dictionary for communication object area 18 Overview object dictionary for manufacturer specific area 26 Overview object dictionary for device profile specific area 27 Error control services 32 Emergency object 33

system (PROFIBUS DP compliant) MODEL / Series / Product Number EX510-GPR1 Series Table of Contents Safety Instructions 3 Model Indication and How to Order 8 Summary of Product Parts 9 Definition and terminology 10 Common Specifications 12 EX510 GW Unit Summary of Product Parts 13 Mounting and Installation 14 Installation 14 Wiring 15 Setting 20 Specifications 32 Specifications 32 Dimensions 33