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Initial value: Set to [0.50] or higher. 33 Slider Type/EQFSH Series Integrated Controller Electric Actuator Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

The recommended bend radius of the lead wire is 6 times the outside diameter of the sheath, or 33 times the outside diameter of the insulation material, whichever is larger. Replace the damaged lead wire with a new one. Wire correctly. Incorrect wiring can break the product. Do not perform wiring while the power is on.

Mb. steel Brake arm Carbon steel 8 32 Hex'9)1 met ~ cap 3:l"el'l Nitrided Nickel plated Stainless Arm holder 9 Carbon steel Steel wire Spring washer 33 Nitrided Black zinc chromate 10 Brake shoe holder Carbon steel Spring washer 1 34 Steel wire Black zinc chromate Brake shoe 11 Special brake malenal Spring washer Nitrided 1 35 Steel wire Black zinc chromate 12 Roller Cr.

Vespel is a registered trademark of DuPont. 33 Single Stage Regulator for Ultra High Purity Low flow (Tied-diaphragm) Series AZ1500 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Body material: 316L SS Hastelloy internals available for corrosion resistance Tied-diaphragm design How to Order Port Number q w e r AZ15 S FV4 FV4 02 2PW Delivery pressure Bonnet option

Grommet Conduit DIN terminal Conduit terminal L VXK21l0 VXK22l0 VXK23l0 I J 40 43 46 I J 58.5 61.5 64 I 44 53 59.5 J 46.5 49.5 52 K (92) (95) (98) I 44.5 53.5 60 J K L 30 33 36 I J 48.5 51.5 54 I J 65.5 68.5 71 I 44 53 59.5 J 53.5 56.5 59 K I 43 52 58.5 J K VXK21l2 VXK22l2 VXK23l2 2, 3, 4.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 52 61 67.5 43 52 58.5 19.5 22.5 25.5 44.5 53.5 60 (61) (129) 48 57 63.5

Series RQ Mounting Bracket Dimensions Foot type Foot type/RQL, RDQL mm B + Stroke L Bore size (mm) Stroke range (mm) A B LS L L1 LD 20 to 100 32 37 6.6 61.2 21 17 38.5 20 to 100 40 44 6.6 68.2 28 17 38.5 Special cap bolt LH LY 30 to 100 50 49.5 9 75.7 26.5 18 43.5 mm LX X X LG Y Y Bore size (mm) 3.2 4-LD LS + Stroke A + Stroke LG LH LX LY LZ X Y LZ 32 4 57 57 11.2 30 71 5.8 40 4 64 64 11.2 33

www.stevenengineering.com 2-M5 x 0.8 thread depth 4.5 (Piping port) IN 2-M3 x 0.5 (Through-hole) 2-M3 x 0.5 CX (Through-hole) D2-M5 x 0.8 thread depth 4.5 2-M3 x 0.5 thread depth 4.5 (Opposite side: Same) S (13 + ST) 10 (Piping port) (Opposite side: Same) -X 3 208 6 Data 22.5 11 Z (10 + 1/2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model CXS6-10 CXS6-20 CXS6-30 CXS6-40 CXS6-50 68.5 10 15 23 55 78.5 20 20 33

Limitations of Use 33 13. Troubleshooting 34 -1No. ZKJ-OM00201-D Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

filter FLUID OUT AIR SUP FLUID IN Air supply AIR EXH Strainer Silencer Throttle Transfer fluid 14 Series PAX1000 Dimensions 4-M8 (M6 hexagon socket head screw can be inserted) 10.5 105 7.5 Mounting hole detail 69 Reset button 100 125 23 RESET (175) AIR SUP (pilot air supply port) Rc 1/4 FLUID IN Rc 1/4, 3/8 FLUID OUT Rc 1/4, 3/8 PROCESS PUMP AIR SUP 110 45 29 FLUID IN FLUID OUT AIR EXH 33

Refer to the dimensions on page 5 for the mounting dimensions. (35) (25) 5.5 8 (1.5) L Dimensions (mm) No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L dimension 110.5 135.5 160.5 185.5 210.5 235.5 260.5 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 40 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 L dimension 285.5 310.5 335.5 360.5 385.5 410.5 435.5 460.5 485.5

If the temperature fuse operates, it will fail to control temperature, but the product operation will not stop. 33 IDH Series 3.4 Shutdown IDX-OM-W037 Thermo-dryer 3. Operation/ Shutdown Caution The protection devices are automatic return type. Please wait at least 3 minutes after operation stops.

Indication and How to Order 8 Summary of Product parts 8 Mounting and Installation 9 Installation 9 Wiring 10 Setting 15 Setting of baud rate (Communication speed) 17 Overview object dictionary for communication object area 18 Overview object dictionary for manufacturer specific area 26 Overview object dictionary for device profile specific area 27 Error control services 32 Emergency object 33

system (PROFIBUS DP compliant) MODEL / Series / Product Number EX510-GPR1 Series Table of Contents Safety Instructions 3 Model Indication and How to Order 8 Summary of Product Parts 9 Definition and terminology 10 Common Specifications 12 EX510 GW Unit Summary of Product Parts 13 Mounting and Installation 14 Installation 14 Wiring 15 Setting 20 Specifications 32 Specifications 32 Dimensions 33

Dimensions inside are for sub-plate aperture Rc 3/4. 3-10-33 Series VQ7-8 Manifold Option Parts Individual EXH spacer VV72-R-03/04 Individual SUP spacer VV72-P-03/04 R1/R2 individual EXH spacer VV72-R2-04 Reverse pressure spacer AXT512-19A-1 2 Silencer box AXT512-26A SMC SMC 223.5 211.5 183.5 171.5 120.5 140 PA B PE PE PA B PE PE PE P 80.5 P R1 R2 78 R2 R1 EA EB A EA EB 2-3/8, 1/2 Individual

radius 10 Auto switch D-A7, A8 K M E S J L B + Stroke A + Stroke Rod end male thread H1 Auto switch D-A9, F9 Rod end nut C1 X L1 Rod end male thread (mm) Bore size (mm) C1 X H1 L1 20.5 23.5 28.5 M14 x 1.5 32 20.5 23.5 28.5 M14 x 1.5 40 26 28.5 33.5 M18 x 1.5 50 (mm) Without auto switch With auto switch A B A B U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33

33 SY3000/5000/7000 Series Made to Order Please contact SMC for detailed dimensions, specifications, and lead times.

detecting position Auto switch mounting Auto switch adjustment D53 CRB2 Series Volume [cm3] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Volume 1 (0.6) 1.2 1.5 1.5 (1.0) 2.9 3.7 4.8 (3.6) 6.1 7.9 11.3 (8.5) 15 20.2 25 (18.7) 31.5 41 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33

Mounting ... 13 Dimensions . 14-40 Double Acting/Double Rod . 14-16 Non-Rotating Rod . 17-19 Stainless Steel Rod (XC6) Low Speed (XB9) . 20 High Temp (XB6)/Low Temp (XB7) . 21 Special Trunnion Location (X46US) . 22-23 Oversized Rod w/ Special Trunnion Location (XB5 X46US) . 24 Stainless Steel Tie Rods/Tie Rod Nuts (X130US) .. 25-31 Rod Boot . 32 Oversized Rod / Non-Rotating (XB5 / X119US) 33

Cover Cushion Location E, F , G or H G B (Cushion Location Standard) C HEAD END CHART 1 Spare Parts and Repair Kit Item Quantity Description 11 1 Head 12 1 Cap 13 1 Barrel 14* 2 Barrel Seal 15 4 Tie Rods 16 4 Tie Rod Nuts 21 1 Piston (See Note1) 22 1 Piston Rod (See Note1) 24* 2 Piston Packings 26A 1 Piston Rod Assembly (See Note1) 28 1 Wear Band 31 1 Gland Bushing 32* 1 Gland Packing 33

Clean Room Specication Dimensions: Ball Screw Drive 11-LEFS16 (72) ( ) +0.025 0 3H9 depth 3 40 Body mounting Note 1) reference plane 4 x M4 x 0.7 thread depth 6.4 24 28 3.5 39.4 ( ) +0.025 0 3H9 depth 3 L Cable length 250 (37) A (Table traveling distance) Note 2) (110) 37 40 (41) [39] 39 [(41)] Stroke (2.4) 7 65 [Origin] Note 4) Origin Note 3) 27 4 [2] 2 [4] 9.2 Motor cable (2 x 5) 46 6 20 33