MNB

Standard Stroke DMaximum manufacturable stroke Bore size (mm) -X Standard stroke (mm) 20700 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 800 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 1000 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

HAA

VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source IDG 90 130 0.4 0.45 1.44 1.4 50 60 0.4 0.35 55 65 0.8 0.9 38 46 132 x 2 170 x 2 0.23 0.26 50 Hz 60 Hz 50 Hz 60 Hz AMG Power consumption (W) Compact size and lightweight Uses minimal floor space Built-in

Air Cooled Aftercooler Series HAA 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 to 50 Indoor Three phases 200 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source 90 130 0.4 0.45 1.44 1.4 50 60

Series IDK Moisture Control Tube

D X IDK02-100 IDK02-200 IDK04-100 IDK04-200 IDK06-100 IDK06-200 100 200 100 200 100 200 120 220 140 240 140 240 2 x 1.2 D 4 x 2.5 Inner sleeve 6 x 4 Note) Dimensions at 40% relative humidity. Dimensions may change if the relative humidity changes. Made to Order If you require the moisture control tube with an effective length not listed in the above table, please contact SMC. 1

Air Cylinder: Standard Type Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube: ø180, ø200, ø250, ø300 Air-hydro: ø125, ø140, ø160

Nil N H Port thread type Bore size Nil TN TF Rc NPT G Air-hydro Lube, Non-lube 125 140 160 180 200 250 300 125 140 160 125 mm 140 mm 160 mm 180 mm 200 mm 250 mm 300 mm 125 mm 140 mm 160 mm Mounting Bracket Part No. Bore size (mm) 125 140 160 180 200 250 300 For How to Order with auto switch, refer to page 417.

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

V 12 V 200 V or less 24 V 2-wire Terminal conduit PLC Yes 100 V, 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

Cylinder with Lock Double Acting, Single Rod ø40, ø50, ø63, ø80, ø100 Series CNA2

V Yes No 12 V 200 V or less 2-wire 24 V PLC Terminal conduit Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.

Air Cylinder/Double Rod Type Series CS1W Lube, Non-lube Type: Air-hydro Type:

Air Cylinder/Double Rod Type Series CS1W Lube, Non-lube Type: 125, 140, 160, 180 200, 250, 300 Air-hydro Type: 125, 140, 160 Replacement Procedure is P.287 Construction @8 @0 @4 @2 @3@5@1 @6 @7 Lube, non-lube with auto switch Non-lube type With auto switch @2 @3 @3 @3 #1 180, 200 Steel tube 125 to 160 Aluminum tube Air-hydro @8 @0 @4 @2 @3@5 @6 @7 @3 @3 Aluminum tube Auto switch The numbers

08-cs1w-e

Air Cylinder/Double Rod Type Series CS1W Lube, Non-lube Type: 125, 140, 160, 180 200, 250, 300 Air-hydro Type: 125, 140, 160 Replacement Procedure is P.287 Construction @8 @0 @4 @2 @3@5@1 @6 @7 Lube, non-lube with auto switch Non-lube type With auto switch @2 @3 @3 @3 #1 180, 200 Steel tube 125 to 160 Aluminum tube Air-hydro @8 @0 @4 @2 @3@5 @6 @7 @3 @3 Aluminum tube Auto switch The numbers

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Type: 4A (For DC), Lead Wire Length: 30 (3000mm)

Type: 3A (Other Voltages VAC), Lead Wire Length: 30 (3000mm)

Type: 1A (For 100 VAC), Lead Wire Length: 30 (3000mm)

Type: For 200 VAC, Lead Wire Length: 3000mm

Type: For DC, Lead Wire Length: 3000mm

Type: Other Voltages VAC, Lead Wire Length: 3000mm

Type: For 100 VAC, Lead Wire Length: 3000mm

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 2000 2000 2000 2000 2000 2000 32 40 50 63 80 100 125 Minimum Stroke for Auto Switch Mounting 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400