Rated Flow Range: 11 (10 to 100 L/min), Port Size, Pipe O.D.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: F (OUT1: PNP; OUT2: Analog 4 to 20mA), Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket), Calibration Certificate: A (Calibration Certificate)

Accuracy: Basic, Motor Mounting Position: L (Left Side Parallel), Motor Type: T8 [AC Servo Motor, (Absolute Encoder), 400W], Lead: L (2.86mm), Stroke: 400mm, Dust/Drip Proof: IP5x (Dust Proof Specification), Motor Option: B (w/Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: L (Foot), Cable Type: S (Standard Cable), Cable Length: 5m, Driver Type: 92 [LECSN2

Accuracy: Basic Type, Size: 63, Motor Mounting Position: L (Left Side Parallel), Motor Type: NT (Mounting Type T), Lead Screw: L (LEY63, 2.86], Stroke: 400mm, Dust/Drip Proof: P (IP65, Dust/Drip Proof Specification w/Vent Hole Tap), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: L (Foot)

Accuracy: Basic Type, Size: 63, Motor Mounting Position: L (Left Side Parallel), Motor Type: NZ (Mounting Type Z), Lead Screw: L (LEY63, 2.86], Stroke: 400mm, Dust/Drip Proof: P (IP65, Dust/Drip Proof Specification w/Vent Hole Tap), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: L (Foot)

VBA-OM-S001

No gap Booster regulator Air tank Booster regulator A B C D E F G H I J K L M Grooves There should be no damage or dust O-rings VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc 3/8 257 60 Rc 1/4 20 Air tank There is a slight play on the diagonal parts.

VBA-OM-S002

OPERATION MANUAL VBAT-M36A AIR TANK Pressure gauge and safety valve set Safety valve port Spare port Applicable standards TSG R0003-2007 Supervision Regulation on Safety Technology for Simple Pressure Vessels OUT port Table 1 Specifications Model VBAT20A1-T-X104 VBAT38A1-T-X104 Hex. socket head plug Drain valve Tank mass 15 kg 26 kg Tank capacity 22 L 38 L OUT 1/2 3/4 Port size Drain 1/4

VBA-OM-S008

VBA11A 150 337 370 307 163 160 100 200 Rc 3/8 257 60 278 130 regulator A B C D E F G H I J K L M URL http://www.smcworld.com Rc 1/4 20 Rc 1/2 39 IN port Rc3/8 Rc 3/8 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 170 180 120 312 2008 SMC Corporation All Rights Reserved Assembly dimensions OUT port (J) Maintenance 411 IN port (I) Akihabara

VBA-OM-S009

OPERATION MANUAL VBAT-M47A AIR TANK Safety valve port Pressure gauge and safety valve set Applicable standards TSG R0003-2007 Supervision Regulation on Safety Technology for Simple Pressure Vessels OUT port Table 1 Specifications Model VBAT20S1-T-X104 VBAT38S1-T-X104 Hex. socket head plug Drain valve Tank mass 13kg 19kg Tank capacity 20 L 38 L Chinese Pressure Vessel Code Compliant Product

ZISE80.eng

Danger: Switch ON At normal output Switch OFF Maintenance Time [s] M3 x 5 L M3 x 5 L Operator How to reset the product after a power cut or forcible de-energizing The setting of the product will be retained as it was before a power cut or de-energizing.

min5 l/minReal-time flow rateAccumulated flow0.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

Rated Flow Range: 11 (10 to 100 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 10 (1), Output Specification: G (OUT1: NPN; OUT2: External Input), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: Rc, Port Size: 04 (1/2), Output Specification/Temperature Sensor: KT (OUT1: Analogue 4 to 20 mA - OUT2: Analogue 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C), Bracket

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification: D (OUT1: NPN; OUT2: Analog 4 to 20mA), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: R (Bracket)

Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 04 [Vacuum: 2 x Rc1/2 (Branch Spec.); Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: K1 [Supply Valve (N.C.), Release Valve (N.C.)], Rated Voltage: 5 (24 VDC), Electrical Entry: L (L Plug Vertical Connector w/Lead Wire 300mm

Rated Flow Range: 11 (10 to 100 L/min), Port Size, Pipe O.D.: 25 (Port Size: 25A, Pipe O.D.: 32mm), Output Specification: E (OUT1: PNP; OUT2: Analog 1 to 5V), Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C)

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: Rc, Port Size: 06 (3/4), Output Specification/Temperature Sensor: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature