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ZS-26-E-4 R04 4 plug-in reducer Connector for PSE300 1 pc.

Lead wire should be less than 100 meters. 4.

Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/4 40 to 42 Rc 11/2 48 to 50 Rc 2 48 to 50 Reference How to tighten M5 threads on the fittings After tightening by hand, use a tightening tool to add about 1/6 turn more. But when using miniature fittings, after tightening by hand, use a tightening tool to add 1/4 turn more.

KBZ1-06 16 Rc 3 8 Applicable tubing Bulkhead Female Connector: KBE Female Connector Union: KBH T Connection thread Applicable tubing O.D. 4 Model Model KBH1-R1S KBH2-R1S KBH2-R2S KBE1-04 KBE1-06 KBE2-06 R 1 8 Air Supply Port: KBE, KBH, KBB, KBS, KBL (P. 15-3-114, 115) 6 KBH2-R3S KBH3-R2S KBH3-R3S KBH3-R4S KBH4-R3S KBH4-R4S R 1 2 R 3 8 R 1 2 R 3 8 R 1 4 R 3 8 R 1 4 KBE2-08 KBE2-10 KBE3-08

175 D Flanged Models Threaded Models 1/4 N/A 5.5 1-1/4 5.91 18.11 1.65 4.80 476 AFW275-N12D-WS 280 1/4 N/A 5.5 1-1/2 5.91 18.11 1.65 4.80 545 AFW325-N14D-WS 320 1/4 N/A 8.8 1-1/2 7.09 18.98 2.05 5.75 680 AFW400-N14D-WS 400 A 1/4 N/A 8.8 2 7.09 18.98 2.05 5.75 1,189 AFW700-N20D-WS 700 1/4 N/A 18.7 2-1/2 7.87 23.43 2.64 8.27 1,445 AFW850-N25D-WS 850 B 1/4 N/A 18.7 3 7.87 23.43 2.64 8.27 2,550

Construction 1 4 1 4 1 3 1 6 6 2 5 5 7 Connection thread: G Connection thread: R,NPT Male connector Male elbow Swivel elbow No.

Model Orifice size Port size Material Body Seal 4.5 mm 10 mm 6 mm 8 mm 3 mm 2 mm VX21 1/8, 1/4 NBR 1/4, 3/8 Brass Stainless steel VX22 FKM 1/2 EPDM 1/4, 3/8 VX23 PTFE 1/2 Normally Open (N.O.)

Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Note 3) The unit % F.S. is based on the full scale of analog 4 V (1-5 V). Note 4) 0 kPa indicates the atmospheric release.

180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 Pitch of mounting on the wall is CA and CL.

9 to @2 20Solenoid valve with adapter assembly SYJ3 3-M VZ5 4 -M VF3 4 -M VZ3 4 -M A B A B A B A B @3 Data Note 1) Seal kit includes !9 to @2. Order the seal kit, based on each bore size.

Description Wire 2 DC(-) Blue cable 3 CH1_OUT1 Black 1 DC(+) Brown 4 N.C. White 2 N.C. 5 CH2_OUT1 Grey 3 DC(-) Blue 6 CH3_OUT1 Red 4 Sensor input (1 to 5 V) White 7 CH4_OUT1 Green 8 N.C. Yellow with PF3W5 Pin no.

screw 2 22 Seal washer 2 21 Parallel pin 1 20 Hexagon socket head set bolt 4 6pcs. for size 3, 7 19 Round head Philips screw No.0 4 Round head Philips screw High precision type 18 4 Round head Philips screw Size : 7 Round head Philips screw No.0 Size : 1 to 3 17 Special bearing 1 High precision type Deep groove ball bearing Basic type 16 Deep groove ball bearing 1 15 Piston seal 4 14 Wearing

11 Z A-4 10 3 10.5 14.2 2 1 5.6 23.7 A1 2 (7.0) 1 3 3 4 B1 12.7 2 1 18 A4 B4 (6.7) 15 16 11 30.7 44 - 11.2 () L 1 1.5m U 1 1 3 3m V 2 2 W 3 3 5 5m Shield 8 8m Vcc B-1 12 A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 4 B-1 5 A-1 1 B-3 2 A-3 5.6 23.7 10.5 A1 2 (7.0) 14.2 1 3 2 1 B1 12.7 3 4 A4 B4 B1 (6.7) A1 10.2 2 1 18

Output supply current EX126D-SMJ1 16 outputs 1.4 A EX250-SDN1, -SMJ2, -SPR1, -SCA1A, -SEN1 32 inputs / 32 outputs 2 A EX250-SAS3 8 inputs / 8 outputs 2 power supply systems 0.5 A EX250-SAS5 4 inputs / 4 outputs 2 power supply systems 0.25 A EX250-SAS7 8 inputs / 8 outputs 1 power supply system 0.24 A (Total of inputs / outputs) EX250-SAS9 4 inputs / 4 outputs 1 power supply system 0.12 A