Valve Single Unit

5/16" 1 8 1 4 SX5000 VVQ1000-50A-N7 VVQ1000-50A-N9 One-touch fitting for 3/8" One-touch fitting for 5/16" VVQ2000-51A-N9 One-touch fitting (Metric size) VVQ2000-51A-N11 SX7000 Symbol Applicable series Port size One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 C4 C6 C4 C6

VS7-6

-8 With Sub-plate/Dimensions VS7-8-FG-S--Q VS7-8-FG-D--Q SV SY SYJ SX VK VZ VF VFR VP7 VS7-8-FHG--Q VS7-8-FJG--Q VS7-8-FPG--Q VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 ( ): In case of direct manual override style. 1.19-17 VS7-8 Without Sub-plate/Dimensions VS7-8-FG-SPort size of sub-plate -Q VS7-8-FG-DPort size of sub-plate -Q VS7-8-FPGPort size of sub-plate -Q VS7-8-FHGPort size of sub-plate

Modular Type Regulators Series AR

Note 8) Note 8) Note 8) Note 8) Note 8) AG (Select wiring bottom entry when the semi-standard Y is chosen simultaneously.)

ISO Standard Hydraulic Cylinder

8 o e @2 @3 @1 !3 !4 @7 @8 !6 !5 CHN CHM CHS CHS CH2 CHA !0 q w !2 !

KJ

tubing 26.4 R 1 8 7 10 16.1 17.8 3.5 3.5 9 9 26.7 28.7 M5 x 0.8 13.5 29.4 8> 11.6 6 30.5 10 R 1 8 Reference dimensions after R thread installation.

High Vacuum Angle Valve

8-1 8-2 9 10 O-ring Part No.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Parameter Definition Item Content Default Parameter setting setting range 2/2/2/2 byte I/O size of port 1 to 4: 2 byte/2 byte for each 4/4/4/4 byte I/O size of port 1 to 4: 4 byte/4 byte for each Define the process data size of each port of the IO-Link master, which is occupied by the EtherNet/IP communication. 8/8/8/8 byte I/O size of port 1 to 4: 8 byte/8 byte for each 1 Process Data Mapping

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Model AS1ll1FSGl-M5 AS2ll1FSGl-01 AS2ll1FSGl-02 AS3ll1FSGl AS4ll1FSGl Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

CJ5-S

GA GB H H1 I J K KA M MM NA P S ZZ MQQ M 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 1/8 83 118 25 Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 1/8 83 123 RHC 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125

CJ5-S

M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 1/8 83 123 RHC 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 125 40 Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 MK(2) 50 Up to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18

Possible to transfer a workpiece at low-speed.

8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

MNB

8 @0!7 !9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

Rotary Clamp Cylinders

37 71.5 M10 x 1.5 7.5 Rc1/8 0.15 0.15 93.5 9 depth 7 NPT1/8 10 M6 x 10 0.1 0.2 0 0.062 14 30 40 5 6.5 24 69 14 3 7 52 12 16 5.5 G1/8 29.5 65 M10 x 1.5 8 Rc1/8 94.5 9 depth 7 NPT1/8 0.1 0.2 0 0.062 50 17 7 7.5 37 86 19 3.5 30 64 15 20 6.6 8 14 G1/4 34 76.5 10.5 Rc1/4 0.15 0.15 M8 x 1.25 112 M12 x 1.75 11 depth 8 NPT1/4 0.1 0.2 0 0.062 60 7 7.5 17 103 19 3.5 48 77 15 20 9 35 9 18 G1/4 80 35

Speed Controller: Standard Type Series AS In-line Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

/

Q R R 53.5 56.5 56.5 59 59 R 69.5 72.5 72.5 75 75 M 12.8 19 23 19 23 Q 42 52 55 58 61 S Q 41 51 54 57 60 S K 6 8 8 8 8 J M4 M5 M5 M5 M5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 46 56 59 62 65 30 40 45 50 45 50 18 22 30 22 30 68 78 85 85.5 92 9 10.5 14 10.5 14 19.5 27 30 33 33 36 36 48.5 51.5 51.5 54 54 41 51 54 57 60 65.5 68.5 68.5 71

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

Air Combination

126.4 87.6 35.9 41.6 60 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38 1/8, 1/4 1/4, 3/8 AC30-D 1/8 167.4 115.4 38.1 30 55.1 80 26.5 3.5 41 57.2 35 7 14 6 42.5 42.5 AC40-D 1/8 220.4 147.1 44 38.4 72.6 110 35.5 0 50 75.2 40 55 9 18 7 50 65 1/4, 3/8, 1/2 AC40-06-D 1/8 235.4 149.1 44 38.4 77.6 110 35.5 0 50 80.2 40 55 9 18 7 50 65 3/4 AC50-D 1/8 282.4 220.1 48 38.4 93.1 110 45 0 70 96.2 50 70 11 20 8

VQZ1000/2000/3000

Note 2) Except VQZ1000 VQD Cylinder port N1 N3 N7 N9 N11 M5 02 Symbol 1/8" 5/32" 1/4" 5/16" 3/8" 1/4 thread M5 thread Applicable tubing O.D.

VQ5000

Port PE 1/8 External pilot port R2 R1 18.5 P 41 41 41 41 27.5 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 6 Base Mounted Type Series VQ5000 Dimensions (mm) 1in = 25.4mm Plug Lead Type Grommet 0 1 G H 2 position single: VQ515 194.5 121.3 73.2 194.5 121.3 73.2 53 59.5 59.5 27.5 27.5 2