SMC Corporation of America
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Never use in an atmosphere of explosive gases. The structure of auto switches is not intended to prevent explosion. Never use in an atmosphere with an explosive gas since this may cause a serious explosion. 2. Do not use in an area where a magnetic field is generated. Auto switches will malfunction or magnets inside cylinders will become demagnetized.

Do not use the product in an environment where corrosive gases or fluids could be splashed. Otherwise damage to the product and malfunction can result. Do not use in an area where surges are generated.

Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result. This product is not designed to be explosion proof. If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation. Otherwise malfunction can result, causing an accident.

PSE531 PSE541 PSE561 Applicable pressure sensor PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) 5%R.D.

OFF OFF ON OFF OFF OFF OFF 10 11 OFF OFF ON OFF OFF OFF ON : : : : : : : : HOLD/CLR No.1 Function 62 63 ON ON OFF OFF OFF ON OFF CLR OFF Output is cleared when an error occurs. Output is held when an error occurs.

Magnet Magnet 11 Bumper Resin Hexagon thin socket head 10 Structural steel bolt Hexagon socket head cap Structural steel For 10 screw 9 Torx head cap screw Structural steel For 6 8 Plate Aluminum alloy 7 Guide rod Structural steel Stainless steel For 10 6 Seal retainer Aluminum alloy For 6 Stainless steel For 10 5 Magnet retainer Aluminum alloy For 6 4 Piston rod Stainless steel 3 Piston

Furthermore, since valves or cylinders are not guaranteed for zero air leakage, it may not be possible to hold a stopped position for an extended period of time. Please contact SMC if it is necessary to hold a stopped position for an extended period.

Install an earth leakage breaker*1 suitable to each model for the power supply. Maintain a voltage range within 10% of the rated voltage. (Do not use this product with continuous voltage fluctuations.) *1 Select an earth leakage breaker with a leak current sensitivity of 30 mA. Regarding the rated current, refer to the Applicable Earth Leakage Breaker Capacity.

Surge voltage suppressor Caution as -10 . Take appropriate measures to avoid freezing of drainage, moisture etc. in low temperature. 6. Operation for air blowing When using a solenoid valve for air blowing, use an external pilot type.

13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Set pressure value. (16Bit) Value * Data is adjustable up to 120%F.S.

10 10 0 0 0 5 10 15 0 0 10 20 30 40 60 50 0 10 20 30 40 50 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC33/3B 4, 5/32" ZFC53/5B 4, 5/32" ZFC54/5D 6, 1/4" 0.3 MPa 0.3 MPa 0.3 MPa 30 30 30 0.1 MPa Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 0.1 MPa 0.1 MPa 20 20 20 0.5 MPa 0.5 MPa 0.5 MPa 0.7 MPa 0.7 MPa 0.7 MPa 10 10 10 0 20 40 60 80 100 0 0 0

Specification for Option S 10 1 Safety instructions . 10 1 10 2 Specifications . 10 1 Chapter 11 Specification for Option T 11 1 Safety instructions . 11 -1 11 2 Specifications . 11 -1 11 3 Remote operation . 11 -2 11 4 How to connect the power supply and signal cable . 11 -2 11 5 How to re-start the operation . 11 -3 11 6 Electric wiring diagram . 11 -4 Chapter 12 Specification for Option

) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated

Do not use a cable longer than 10 m. Consult with SMC for the use with a cable longer than 10 m.

with an impact tool. adjustment is made between two graduations (for example, 0 10).

Specification for Option L 10 1 Safety instructions . 10 1 10 2 Specification . 10 1 10 3 Maintenance . 10 2 Chapter 11 Specification for Option M 11 1 Safety instructions . 11 1 11 2 Specifications . 11 2 11 3 Cautions for handling the motor type auto drain . 11 2 11 4 Electric circuit . 11 2 Chapter 12 Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12

Do not install in Zone 0 (as defined in IEC 60079-101:2008) or Zone 20 (as defined in IEC 60079-10-2:2009) Zone 0 area classification: An area in which an explosive gas atmosphere is present continuously or for long periods or frequently.

Otherwise, an electrical shock or accident may occur. 4) To maintain the product performance, connect the product to ground with an earth cable or AC adapter ground terminal with a resistance of 100 or less.

Applicable Fluid Examples Applications Chemical Operating temperature range Chemical Operating temperature range Cleaning equipment 50 to 140F (10 to 60C) 50 to 140F (10 to 60C) Deionized water Ammonia hydrogen peroxide solution Plating equipment 50 to 104F (10 to 40C) 50 to 140F (10 to 60C) Hydrofluoric acid Sodium hydroxide 50 to 122F (10 to 50C) 50 to 140F (10 to 60C) Sulfuric acid (except