Electro-Pneumatic Valve NVEP/NVEF Series

Max. 1% 13'18.5 (1A F.S.) lor VoltaEe Fluct. l\,lax. +10% (1A F.S.) Max. + l% against DU22-26V (14 F.S.) Currer Stability forTmp. Fluct. l\,lax. +1% @ 79'F (25'C) {1A F.S.) Max. +2% @ 79'F (25'C) (1A F.S.) vEA 250 vEA 251 vEA 252 Cperating Temp.

Multistage Ejector Series ZL112.212

10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6 ZM Supply pressure (MPa) Supply pressure (MPa) ZMA Flow Characteristics Flow Characteristics Supply pressure: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 ZH 70 70 60 60 ZU 50 50 40 40 30 30 ZL 20 20 10 10 ZY 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260

IDX-OM-W089

Specification for Option_H 10 1 Safety instructions . 10 1 10 2 Specification . 10 1 Chapter 11 Specification for OptionK 11 1 Safety instructions . 11 1 11 2 Specification . 11 1 Chapter 12 Specification for Option_L 12 1 Safety instructions . 12 1 12 2 Specification . 12 1 12 3 Installation . 12 2 12 4 Maintenance . 12 2 Chapter 13 Specification for Option_R 13 1 Safety instructions

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

For equiangular acceleration, the angular velocity, , after t seconds are obtained using the following equations. 1 ( 2 ( C : Integration constant Because the displacement angle in t=0 becomes =0, it becomes C=0.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Replacement part/grease pack part no. : 20, 25, 32 : GR-S-010(10 g) 40, 50 : GR-S-020(20 g) 713 MHW2 Series Dimensions MHW2-20D Flat finger type (Standard) 20 2 x M5 x 0.8 thread depth 7 (Mounting thread) 17 60 4 x M5 x 0.8 thread depth 10 (Mounting thread) Bottom through hole dia. 4.2 (Mounting hole) 45 2 x M5 x 0.8 thread depth 10 (Mounting thread) 35 23 26 27 36 18 23 7 2 21H9 +0.052 depth

Low Profile

Low Profile 2/3-Port Solenoid Valve RoHS Compact Overall length Valve width Actual size Valve height 2-port 3-port 3-port valve 2-port 3-port Overall length 38 mm/54 mm Approx. 10 mm Valve width/ height 2-port 3-port 10 g/20 g Weight 2-port valve Normally closed Large flow rate 2-port/N.C. 3-port 2-port valve Universal C [dm3/(sbar)] 0.25 0.5 Flow rate [L/min (ANR)] 45*1 90*1 *1 At 0.2 MPa

Electric Actuator with Integrated Guide Series LTF

20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal 10 10 P.42 Non-standard motor 6 6 P.50 Vertical 10 10 P.58 Options P.66 Construction P.67 Mounting P.68 Non-standard Motor Mounting P.69 Deflection Data P.71 Part Number Designations

EXxx-OMN0035CN

Bit 12 Bit 14 (EX600-DXE) 1 2 3 4 5 6 7 8 0 2 4 6 8 10 12 14 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 14 15 16 17 18 19 20 21 1 3 5 7 9 11 13 15 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0035CN-A (EX600-DXF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 3 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 EX600-DXB -31No.EX-OMN0035CN-A

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

Series 10-TU Polyurethane Tubing

(mm) Model 10-TU1208 10-TU1065 10-TU0805 10-TU0604 10-TIUB01 10-TU0212 2 10-TU0425 4 Burst pressure 8 10 5 6.5 12 8 2 6 4 3.2 2.5 Burst pressure MPa 3 1.2 I.D.

Activated Carbon Filter

AMX-OMZ0095 PRODUCT NAME Activated Carbon Filter MODEL / Series / Product Number AMK50-(F,N)06 ~ (F,N)10(B)(-R,Z)-D AMK60-(F,N)10(B)(-R,Z)-D Contents Page 1. Safety Instructions 2 to 6 2. Application 7 3. Standard specifications 7 4. How to Order 8 5. Construction / Options / Replacement parts 9 6. Bowl assembly specifications 10 6-1. Bowl assembly for AMK50 10 6-2.

Series 10-TU Polyurethane Tubing

(Series TIUB) 5 4 10-TU1208 10-TU1065 10-TU0805 10-TU0604 10-TIUB01 10-TU0212 2 10-TU0425 4 O.D.

NVEPA|VEFseies

Max. +1% @ 79'F (25'C) (1A F S.) Mat<. +2Vo @ 79'F (25"C) (1A F.S.) )perating Temp.

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Table (10) shows the port size. Table (10) Port size Size Port size 50 to 100 Rc1/4 Perform followings before piping.

α PneuAlpha HARDWARE MANUAL

and Z Noise Immunity 1000Vpp, 1 microsecond, 30 100 Hz, tested by noise simulator Humidity 35 85% Relative Humidity, no condensation Description Specication Conforms to IEC 68-2-6; 10-57 Hz: 0.075 mm Constant Amplitude 57-150 Hz: 9.8 m/s2 Acceleration Sweep Count for X,Y,Z: 10 times (80 minutes in each direction) Conforms to IEC 68-2-6; 10-57 Hz: 0.15 mm Constant Amplitude 57-150 Hz: 19.6

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS ø 12, ø 16, ø 20, ø 25

Body option CUJ Nil C M F Standard With rubber bumper Rod end male thread Boss on head side With rubber bumper Rod end female thread (Standard) C CU Cylinder stroke (mm) With rubber bumper Rod end male thread CM Bore size Standard stroke Long stroke CQS 35, 40, 45, 50, 75, 100, 125, 150, 175, 200 5, 10, 15, 20, 25, 30 12, 16 Combination of body options is available

VCHN

Stainless steel Cover Steel plate Body Aluminum die-casted Hexagon bolt Stainless steel C B D Width across flats PAT. 7 A Freeze reduction type/Option VCHNF Sleeve guide Resin Sleeve Copper tubing -06 to 14 3 4 AN VCHN (mm) AMC Model Port size (R) A B C D Mass (g) VCHN3-06 VCHNF3-06 VCHN3-10 VCHNF3-10 VCHN4-10 VCHNF4-10 VCHN4-12 VCHNF4-12 VCHN4-14 VCHNF4-14 3/4 200 72 74 41 590 AMV 3/4 200