Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 33 25 10 10.5 10.5 12 8.5 13.75 4 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 30 10 18 11.6 19.5 23 20 29 53.2 9.1 14.1 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 34 14 22 15.6 23.1 27

Large blow and

Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5 196.8

Ionizer

Static Neutralization Characteristics 1) Installation distance and discharge time (Discharge time from 1000 V to 100 V) High speed static neutralization cartridge Air purge: Yes Supply pressure: 0.02 MPa (1 L/min (ANR) per nozzle) Air purge: No 30 45 25 40 60 Hz 35 1 Hz Discharge time (s) Discharge time (s) 1 Hz 20 30 15 Hz 5 Hz 25 15 20 Sensing DC 10 15 Sensing DC 1 Hz/60 Hz 60 Hz 30 Hz

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

HRX-OM-R039

Fig. 8.4-1 Cooling capacity(HRSE012-A-10) 8.4.2 HRSE018-A-10-(T) 2000 2000 Ambient Ambient Temperature Temperature 25 25 1500 Cooling capacity[W] 1500 Cooling capacity[W] 35 35 1000 1000 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circurating fluid temperature[] Circurating fluid temperature[] 50Hz 60Hz The cooling capacity will be reduced by 100W when option: T is selected.

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Number of auto switches Bore size 16 20 25 32 40 50 63 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 2 pcs 1 pc n pcs Nil S n Stroke adjustment unit symbol Refer to Stroke adjustment unit on page 1351. Made to Order Specifications For details, refer to page 1351.

Vacuum Ejector Series ZM

Description Material Part no. 6 7 8 9 10 11 12 Release flow rate adjusting needle Brass/Electroless nickel plated ZM-NA (With lock nut: ZM-ND-L) AEP Filter cover assembly Diffuser assembly Suction filter Silencer assembly Pilot valve ZM0-0 ZM-FCB-0 HEP ZM-SF ZM-SA (High noise reduction: ZM-SA-D) VJ114Polyethylene ZMA-PV2-0 Related Equipment Poppet valve assembly ZSE1-00ZSM1-015 ZSM1-021

Sensor Monitor

Current consumption 25 mA or less Protection Polarity protection Accuracy Display accuracy 0.5%F.S. Min. display unit (at ambient temperature 25 oC Constant temperature) Repeatability 0.1%F.S. Min. display unit (at ambient temperature 25 oC Constant temperature) Temperature characteristics 0.5%F.S.

Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series ø 25, ø 32, ø 40

Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series 25, 32, 40 RoHS How to Order M9BW 25 300 MY1H Z Linear guide type Linear guide type Made to Order Refer to page 1209 for details. Bore size 25 32 40 25 mm 32 mm 40 mm Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

0.5

139 155 (10.5) 20 16.6 40 Bracket IZF21-m-mBmm 122 (104) 2 x 25 90 (155) 4 x 4.5 171.5 143 124 107 47 3 x 5.5 2 x 5.5 40 45 30 30 16 IZF21/31 Series Dimensions IZF31-m-m 4 x M4 x 0.7, depth 6 (Female thread mounting) 2 x 3.5, depth 1 144 55 25 12.5 179 195 36.6 (10.5) 20 40 Bracket IZF31-m-mBmm 162 (144) 90 2 x 25 (195) 4 x 4.5 211.5 163 144 47 148 3 x 5.5 40 2 x 5.5 45 45 45 17 Fan Type

Fieldbus system Analog unit

function Short circuit protection Output signal range 12 bit Resolution 2 0 to 10 V, 1 to 5 V , 0 to 5 V 0 to 20 mA, 4 to 20 mA Load impedance 1 k or more 600 or less Linearity (25 oC) 0.05%F.S. or less Repeatability (25 oC) 0.15%F.S. or less Absolute accuracy (25 oC) 0.5%F.S. or less 0.6%F.S. or less Current consumption 100 mA or less Enclosure IP67 (With manifold assembled) 3 Operating

3 Port Air Operated Valve Series SYJA300 1

Applicable manifold base model VP300-25-1A VV3PA3 Blanking plate assembly (With gasket, mounting screw) VP700-25-1A VV3PA7 VP500-25-1A VV3PA5 5-5-21 10 Series VPA300/500/700 Dimensions Common exhaust: VV3PA3-41Station 1-02 69.4 (Mounting hole) 2-6.5 24 NC NO 13.5 (R port) Rc 1/4 PA 26.7 65.6 58.6 3(R) 27 50 65.6 1(P) 26.7 PA (Pitch) (P port) Rc 1/4 Rc 1/8 (PA port) 27.5 28 70.4 L1 L2 7.5

Process Pump

D-DN

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40 CY1S Series

Bumper bolt (resin tipped): Mounted on both sides Nil Bore size 6 10 15 20 25 32 40 Bumper bolt (Same as the opposite side) 6 mm Port thread type Adjustment bolt (Same as the opposite side) 10 mm Bore size (mm) Symbol Type 15 mm Shock absorber/ Adjustment bolt (metal ended): Mounted on both sides 6,10,15 M thread B 20 mm Nil Rc 25 mm TN TF 20, 25, 32, 40 NPT 32 mm Shock absorber (Same as

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

Nil S n Bore size 20 25 32 40 50 63 80 Auto switch 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm Nil Without auto switch (Built-in magnet) Thread type For the applicable auto switch model, refer to the table below. 20 25 32 40 50 63 80 M5 x 0.8 Rc NPT Nil TN Cylinder stroke (mm) Refer to Standard Stroke on page 429.

25

Ionizer IZS40/41/42 Series Potential amplitude: 25 V or less Rapid neutralization of static electricity: Fastest time: 0.1 seconds Note 2) Potential amplitude: 25 V or less RoHS Note 1) Note 1) IZS IZS Rapid neutralization of static electricity: Fastest time: 0.1 seconds Note 2) IZN IZF ZVB IZD IZE IZH Dual AC type IZS42 Series Potential amplitude of the workpiece is reduced with Dual AC

AIR SLIDE TABLE

(A) has magnets on both sides. 10 Rod cover Aluminum alloy Anodized Stainless steel (MXQ6(A,B)) 11 Seal support Brass (MXQ8(A,B,C),12(A,B,C)) Electroless nickel plating (MXQ8(A,B,C),12(A,B,C)) Aluminum alloy (MXQ16(A,B),20(A,B),25(A)) Chromate treatment(MXQ16(A,B),20(A,B),25(A)) 12 Head cap Aluminum alloy Anodized 13 Floating bushing Stainless steel 14 Floating bushing Stainless steel 15

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

Refer to pages 20 and 21 for the D-P3DW type.

Digital pressure switch for energy-saving control ejector

Refer to "List of output modes" on page 25) Normal output NPN (open collector) (output) The switch that uses the NPN transistor for output. O Output configuration The operation principle of the switch output. Refer to "List of output modes" on page 25 for the operation status. Output mode Either hysteresis mode can be selected. -12NO.ZK2-OM00501-B No.

Membrane Air Dryer

50 25 50 Purge air flow rate L/min(ANR) 6 12 3 6 Inlet air pressure MPa Inlet air temperature oC Inlet air saturation temperature oC Ambient temperature oC Dew point indicator purge air flow rate *Note 1 *Note 1 -20 -15 *Note 2 Standard performance conditions 0.7 25 25 25 1L/min (ANR) {In case of inlet air pressure 0.7 MPa} *Note 3 1/8 1/4 Port size Mass kg (With bracket) 0.25 (0.31) Model