Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT1/8), Connector Type: S (M12 Connector Type)
Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Connector Type: S (M12 Connector Type)
Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: A4 [Bracket D for M12 Connector Type (ZS-46-A4)]
Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: A5 [Bracket E for M12 Connector Type (ZS-46-A5)]
Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: N7 (1/4 inch), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: S (Bracket (mounting position: Stream side))
Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: 01 (Rc1/8), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: S (Bracket (mounting position: Stream side))
Rated Control Flow Range: 10 (0.1 to 10 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: S (Bracket (mounting position: Stream side))
s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed
s [3 cP] or less) Note 1)Karman vortex30 to 250 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes
ModelFlow-rate characteristicsMaximum operating pressure differential (MPa)Note)Weight(g) C [dm3/(s?bar)]bCv11/8, 1/42VX2100.630.630.231.0220
ModelFlow-rate characteristicsMaximum operating pressure differential (MPa)Note)Weight(g) C [dm3/(s?bar)]bCv11/8, 1/42VX2100.630.630.231.0220
ModelFlow-rate characteristicsOperating pessure rangeNote)Weight(g) C [dm3/(s?bar)]bCvq Used with vacuum (Pa?abs)w Used with pressure (MPa?G)11/8, 1/42VX2140.630.630.230.1 to atmospheric pressure0 to 1.0300
ModelFlow-rate characteristicsOperating pessure rangeNote)Weight(g) C [dm3/(s?bar)]bCvq Used with vacuum (Pa?abs)w Used with pressure (MPa?G)11/8, 1/42VX2140.630.630.230.1 to atmospheric pressure0 to 1.0300
ModelFlow-rate characteristicsOperating pessure rangeNote)Weight(g) C [dm3/(s?bar)]bCvq Used with vacuum (Pa?abs)w Used with pressure (MPa?G)11/8, 1/42VX2140.630.630.230.1 to atmospheric pressure0 to 1.0300
ModelFlow-rate characteristicsOperating pessure rangeNote)Weight(g) C [dm3/(s?bar)]bCvq Used with vacuum (Pa?abs)w Used with pressure (MPa?G)11/8, 1/42VX2140.630.630.230.1 to atmospheric pressure0 to 1.0300
ModelFlow-rate characteristicsOperating pessure rangeNote)Weight(g) C [dm3/(s?bar)]bCvq Used with vacuum (Pa?abs)w Used with pressure (MPa?G)21/4, 3/84VX2241.900.520.620.1 to atmospheric pressure0 to 1.0460
ModelFlow-rate characteristicsOperating pessure rangeNote)Weight(g) C [dm3/(s?bar)]bCvq Used with vacuum (Pa?abs)w Used with pressure (MPa?G)21/4, 3/84VX2241.900.520.620.1 to atmospheric pressure0 to 1.0460
ModelFlow-rate characteristicsMaximum operating pressure differential (MPa)Note)Weight(g) C [dm3/(s?bar)]bCv31/4, 3/85VX2301.960.550.751.0450
ModelFlow-rate characteristicsMaximum operating pressure differential (MPa)Note)Weight(g) C [dm3/(s?bar)]bCv31/4, 3/85VX2301.960.550.751.0450
ModelFlow-rate characteristicsMaximum operating pressure differential (MPa)Note)Weight(g) C [dm3/(s?bar)]bCv11/8, 1/42VX2400.630.630.230.9240