Piping: Base Mounted, Stations & Port Location: 5 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 1/4" Tube
Piping: Base Mounted, Stations & Port Location: 10 Stations (Type 20, 21, 41, 42), Port Size: NPTF1/8
Piping: Base Mounted, Stations & Port Location: 3 Stations Type 20, 21, 41 and 42, Port Size: NPTF1/8
Piping: Base Mounted, Stations & Port Location: 5 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube
Piping: Body Ported, Stations & Port Location: 6 Stations Type 20, 21, 41 and 42, Port Size: NPTF
Piping: Base Mounted, Stations & Port Location: 6 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 1/4" Tube
Piping: Base Mounted, Stations & Port Location: 7 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube
Piping: Base Mounted, Stations & Port Location: 9 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 5/16" Tube
Piping: Base Mounted, Stations & Port Location: 9 Stations Type 20, 21, 41 and 42, Port Size: NPTF1/8
Piping: Body Ported, Stations & Port Location: 6 Stations Type 20, 21, 41 and 42, Port Size: NPTF
Piping: Body Ported, Stations & Port Location: 5 Stations Type 20, 21, 41 and 42, Port Size: NPTF
Piping: Base Mounted, Stations & Port Location: 7 Stations Type 20, 21, 41 and 42, Port Size: One-touch Fitting for 1/4" Tube
Piping: Base Mounted, Stations & Port Location: 12 Stations (Type 20, 21, 41, 42), Port Size: One-touch Fitting for 1/4" Tube
Piping: Body Ported, Stations & Port Location: 3 Stations Type 20, 21, 41 and 42, Port Size: NPTF
Piping: Base Mounted, Stations & Port Location: 8 Stations Type 20, 21, 41 and 42, Port Size: NPTF1/8
High Vacuum L Type Valve part) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMV0003 5-2.Dimensions Size 16, 25, 40 E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41
If the actuator is within the In position range, INP will be turned ON but if not, it will remain OFF. 41 - [4] HOLD -Timing chart-Procedures(1) HOLD is turned ON during the operation (when HOLD is ON). (2) BUSY is turned OFF (the actuator stops). (3) HOLD is turned OFF. Slow-down starting point (4) BUSY is turned ON (the actuator restarts).
DIMENSIONS (Accessory) (Port size) Maintenance space Drain Dimensions Model Standard specifications 1/81/4 1/43/8 1/43/81/2 , AFD20-A 40 87.6 9.8 20 45 AFD30-A 53 115.1 14 26.7 30 50 AFD40-A 70 147.1 18 35.5 38.4 75 AFD40-06-A 75 149.1 20 35.5 38.4 75 3/4 Model Bracket mount dimensions AFD20-A 30 27 22 5.4 8.4 40 2.3 28 AFD30-A 41 35 23 6.5 13 53 2.3 30 AFD40-A 50 52 26 8.5 12.5 70 2.3
Positioning repeatability: 0.05 mm Possible to set position, speed and force. (64 points) LEF LEJ LEL LEM Rod Type LEPY Series Page 374 Size: 6, 10 LEPY6-25 240 g Weight LEY LES LEPY LEPS LEPY LEPS LER LEH LEY -X5 30 mm 11LEFS 125.6 mm 11LEJS 20.5 mm 25ASlide Table Type LEPS Series Page 383 Size: 6, 10 LEC LEPS6-25 290 g Weight LEC S LEC SS-T LEC Y Linear guide integrated Motorless LAT 41
Flow Meter and CLC Mode ) Settling time as low as 0.5 seconds 150 80 150 80 A2 Port Pilot Port ( Vent ) Tube O.D. 6 Pilot Port Vent Port M3 NPT 1/8 A1 Port 129 80 20.5 45 160 30 30 2000 61 73 120.5 2000 LFU20-Z07-3A-X2 LFU20-Z07-1A-X2 126 (Includes controller & connectors) (Includes controller & connectors) 110 100 29.5 Operating Pressure to 0.5MPa, Operating Temperature to 60C Media 2000 (41