Series PFMC 3-Color Display Digital Flow Switch

3-Color Display Digital Flow Switch RoHS Series PFMC How to Order PFMC 501 04 7 M A Rated flow range Calibration certificate 501 5 to 500 L/min 102 10 to 1000 L/min 202 20 to 2000 L/min Nil None A Note 8) Yes Note 8) Made to Order: Certicate in both English and Japanese Thread type Option 2 Nil Rc N NPT F G Note 1) Nil No bracket With bracket Note 7) Note 1) ISO228 compliant Port size R Symbol

Air Cylinder: Single Rod Series MB ø32, ø40, ø50, ø63, ø80, ø100, ø125

Air Cylinder: Single Rod Series MB 32, 40, 50, 63, 80, 100, 125 How to Order 50 L 32 MB With auto switch MDB M9BW L 32 50 Made to Order For details, refer to page 291.

Cylinder with Turntable ø63, ø80, ø100 Series MGT

L Ball bushing bearing 3 3 pcs. Nil Without auto switch (Built-in magnet) Bore size 4 4 pcs. 63 63 mm For the applicable auto switch model, refer to the table below.

CJ2X

Mounting style B L F D Basic style Axial foot style Rod side flange style Double clevis style L 16 60 CJ2X Without auto switch CDJ2X L 16 60 H7BW With auto switch Number of auto switches Low speed cylinder Auto switch 2 pcs. 1 pc. n pcs. Built-in magnet Nil S n For the applicable auto switch model, refer to the table below.

MRHQ

Rotary Gripper Series MRHQ How to Order Lead wire length 0.5 m 3 m 5 m Nil L Z MRH 10 90 M9NV Q S M9N D Number of auto switches Rotary gripper Type of auto switch for detecting rotation Nil Without auto switch(Built-in magnet) 2 pcs. 1 pc.

RLQ

When mounting D-A9(V)/M9(V)/M9W(V)/M9A(V)L types on a side other than the port side as for bore 32 to 50, order auto switch mounting brackets separately. Refer to page 860 for details.

Clean Air Filter SFD Series

Clean Air Filter SFD Series RoHS HAA HAW AT How to Order IDF IDU 1 0 SFD 0 C08 IDF FS Clean air filter IDFA Size Max. flow rate 100 L/min (ANR) 500 L/min (ANR) IDFB Option Option None Bracket (SFD100 only) Symbol 1 2 Symbol IDH Nil B The brackets are provided with the SFD200 series as a standard product.

3 Port 3 Position Valve Body Ported VEX3 Series

plug connector M plug connector DIN terminal G: Lead wire length 300 mm L: With lead wire (Length: 300 mm) M: With lead wire (Length: 300 mm) MN: Without lead wire D: With connector * Only with solenoid Manual override Grommet/ (L/M) plug connector DIN terminal H: Lead wire length 600 mm LN: Without lead wire LO: Without connector MO: Without connector DO: Without connector Nil Non-locking

Series ZB Compact Vacuum Unit

Latching Symbol 50.8 psi (0.35 MPa) 50.8 psi (0.35 MPa) 50.8 psi (0.35 MPa) 72.5 psi (0.5 MPa) 00 Note 1) 58 psi (0.4 MPa) 65.3 psi (0.45 MPa) Supply Valve/Release Valve Electrical Entry Note 4) 1 Single unit 03 04 05 06 0.3 mm PV, PD 0.4 mm PV, PD common port (PV = PD) L-type plug connector With lead wire 0.5 mm L 0.6 mm Note 1) Vacuum pump system only L-type plug connector Without

ZL112A

1 Multistage Ejector ZL112A Series 1 DC type only RoHS How to Order ZL112A Without valve M Z D A M L ZL112A K1 5 With valve q t o u i w e r y !0 !1 !

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ008-WWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RH?

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted

sPower supply voltageResponse timeHysteresisPF2D300/3010.25 to 4.5 l/min0.25 to 4.5 l/min0.05 l/min0.05 l/pulseReal-time flow rateAccumulated flow0 to 999999 l?2.5% F.S. or less?0.5% F.S. or less?1% F.S. or less (15 to 35C, based on 25C)?

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l