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Connection thread Nm Rc, NPT, G 1/8 0.4 to 0.5 Rc, NPT, G 3/8 2 to 2.5 3. Description and function of individual port Suction port (FLUID IN) To suck transported fluid. Connect suction piping. Discharge port (FLUID OUT) To discharge fluid sucked inside the pump. Connect discharge piping. Pilot air port (P1, P2) -To supply and exhaust the air at set pressure. Connect air piping. 4.

Specifications and how to order Specifications Model PAF5413 Main fluid suction / discharge port Rc, G, NPT 3/4, 3/4 tube piping, With nut Port size P1 / P2 Rc, G, NPT 1/4 Body New PFA Diaphragm / Packing PTFE Material of wetted part Check valve New PFA, PTFE Discharge rate 5 to 38L/min Average discharge pressure 0 to 0.4MPa Pilot air consumption Max. 300L/min (ANR)Note 2) Dry Max. 1m (Inside

Circulating Fluid: Ethylene glycol solution 60% Operating Temperature: 20 deg.C At maximum frequency operation by inverter HRZ***-W1S-F [PSIG] [MPa] 0.5 73 [Supply Port] 0.4 58 0.3 Pressure. 44 Flow Rate 0.2 29 0.1 15 [Return Port] 0.0 0 [L/min] 0 10 20 30 40 [G/min] 0 2.6 5.3 7.9 10.6 Flow Rate Figure 8-12 Pump Performance Curve (HRZ-W1S-F ) When circulating fluid flow rate lowers 6L/min

B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E 5.

Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP

Dimensions XMH series / Angled Valve C D L1 L2 A Fn Fc C (Fc) (CF Flange) (KF Flange) H J H B G A Unit:mm Table 5 Model A B C D Fn Fc G H J P.C.D L1 L2 XMH-16 40 100.5 38 1 30 34 17 35 18 P.C.D 27 6x4.4 XMH-25 50 114 48 1 40 26 41 21.5 XMH-40 65 162.5 66 2 55 70 41 57 30 P.C.D 58.7 6x6.6 XMH-50 70 179.5 79 2 75 52 70 35 XYH series / Straight Valve D G C C B H Fn J (KF Flange) 45 Unit: mm

g. ( ) h. i. 7. j. k. l. 2. 8. ,,, 9. 1. 10. 2. 11. 3. 1. 1. 0.11.0MPa 0.30.5MPa :060 2. 3 2. 1. 3. 5 2. 35% 1. ( 6 ) ()70% ()35% 2. 50% ( 6 ) 15% 3. 1. 4. () 0.5 3. 5. F.G. 4. 1. 1. 2. 2. 3. 1. 1. 2. 2 3. 2. 1.52 4. 5. 1. 1ISO VG32 1. 2. 1. 2. 3. 1. 2. 1. 2. 14.5mT CE2 3. 15,000 18cm 4. 3. 4. IP65 5.

for sensor unit Model D-M9K D-F7K D-Y7K Mounting Direct mount (round groove) Rail mounting Direct mount (square groove) Applicable amplifier unit D-RNK, D-RPK Impact resistance 980 m/s2 Insulation resistance 50 M or more under the test voltage 500 VDC (between case and cable) Withstand voltage 1000 VAC 1min (between case and cable) Ambient temperature -10 to 60 C Enclosure IP67 Weight 55 g

Table 6 Size Port size 10 M50.8 15 20 B Port A Port Rc 1/8 , G 1/8 NPT 1/8 , NPTF 1/8 30 40 Fig.6 Port location Rotary actuator ports have a fixed orifice. Do not make the diameter of this hole larger by additional processing. If the hole diameter is made larger, rotation speed and impact will increase, which may cause breakage of the product.

For finger part: MH-G01 (30 g) For cylinder part: GR-S-010 (10 g) 14 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

LES*-OMZ0039 PRODUCT NAME Electric Actuator Slide tableHigh Precision Type High performance Battery-less absolute encoder MODEL / Series / Product Number LESYH Series (,,)*G In-line motor Type Motor Parallel Type Controllers 1 Series #This manual describes the dedicated terms for LESY*G. Refer to the manual of LESY series about other details.

Locations where direct vibration or impact is applied to the product. g. Areas that are dusty, or are exposed to splashes of water and oil drops. h. Areas exposed to direct sunlight (ultraviolet ray). i. Environment at an altitude of 1000 meters or higher Heat radiation and withstand voltage will decrease.

Caution (1) Do not connect to equipment other than specified (LEC-W1, LEC-W2, LEC-T1, LEC-G).

HRX-OM-M005-G Operation Manual Original Instructions Thermo Chiller HRZD020-WS-WS, HRZD020-W1S-W1S HRZD020-W1S-WS, HRZD020-WS-W1S Keep this manual available whenever necessary 2021 SMC CORPORATION All Rights Reserved To the users Thank you for purchasing SMCs HRZ Thermo Chiller (hereinafter referred to as the Product).

The mounting position D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA Common Model A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 4.6 5.6 8.1 12.8 11 MHM-16D1 *1 *1 *1 32.6 20.6 16.1 MHM-16D2 9.1 9.1 4.6 2.1 MHM-25D 14.6 14.6 10.1 4.6 7.1 17.5 17 MHM-25D1 *1 *1 *1 43.6 31.6 27.1 MHM-25D2 14.6 14.6 10.1 9.5 4.6 2.6 2.8 14.3 6 4 MHM-32D 19 19 14.5 3.8 6.3 22.5 23 MHM-32D1 *1 *1 *1 51.8 39.8

Standard CE marking, UL (CSA), RoHS Weight 170 g 175 g 1: All unused connectors must have a seal cap fitted. Dimensions EX600-ED2-29No.EX-OMS0027 EX600-ED3-30No.EX-OMS0027 Maintenance Turn OFF the power supply, stop the supplied air, exhaust the residual pressure and verify the release of air before performing maintenance. Cleaning method Use a soft cloth to remove stains.

175 g 1: All unused connectors must have a seal cap fitted. 2: The UL agreement temperature is 0 to 50 oC.

temperature rating: 50 oC) 4 Environment Storage temperature range -20 to 60 oC Operating humidity range 35 to 85%RH (No condensation) Withstand voltage 500 VAC for 1 minute between external terminals and FE Insulation resistance 500 VDC, 10 M min. between external terminals and FE Pollution degree For use in Pollution Degree 3 Environment (UL508) Standard CE marking, UL(CSA), RoHS Weight 290 g

SS001(MAY.2014) AC230V 50/60Hz 1Ph 6.5A CAPACITY(AIC) 0.4kA R407C(HFC) 0.34kg (GWP:1774) The type and quantity of refrigerant (REFRIGERANT) REFRIGERANT WEIGHT 35kg (Net Weight) HRX-OM-R039 MANUAL 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, Japan G MADE IN JAPAN (It is an example of model "HRSE024-A-23".)