Electro-Pneumatic Valve NVEP/NVEF Series UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?
101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20 ( ): N.O. 17-3-60
21.5 4 20.8 18.7 14 13.7 3.2 28 29 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-10F-10F 30.5 20.8 16.1 VHKl-12F-10F 22 12 10 12 46 62 63 31.5 30.5 21.5 4 21.8 20.8 14 17 3.2 31 32 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-12F-12F 31.5 21.8 17.5 3 port valve 1(P): Male thread, 2(A): One-touch fitting Bracket mounting dimension Tube O.D.
21.5 4 20.8 18.7 14 13.7 3.2 28 29 VHK-B2A 49 17 1 30 25 21.5 31 30.5 20.8 16.1 22 12 10 12 46 62 63 31.5 30.5 21.5 4 21.8 20.8 14 17 3.2 31 32 VHK-B2A 49 17 1 30 25 21.5 31 1(P): Male Thread, 2 (A): One-touch Fitting Effective area (mm2) Bracket assembly no.
No.EX-OMN0035CN-A / Series EX600-DX## EX600-DY## EX600-DM## SMC 3 9 10 12 12 14 17 17 20 20 LED 25 28 28 31 34 34 36 36 LED 40 42 42 44 46 46 48 48 LED 52 54 54 56 -1No.EX-OMN0035CN-A 57 58 58 58 58 58 59 -2No.EX-OMN0035CN-A (ISO/IEC)(JIS) 1 2 *1 ISO 4414: Pneumatic fluid power -General rules relating to systems.
Example) IS10M-6LP 0.1 0.3 0.2 0.4 MPa C q V B Symbol Description Body size 30 40 20 50 60 Nil Set pressure 0.1 to 0.4 MPa 0.1 to 0.6 MPa V V V V V V V V V V a 6 Note 1) range Semi-standard + Lubricator Nil 0.5 m V V V V V V V V V V V V V V V Lead wire w V L Z b 3 m 5 m A D Regulator Air filter length + Applicable model A 11 13 15 17 22 B 74 85 93 97 91 C 61 67 72 75 64 D 28 30 36 44 53 Nil
Example) 24VDC Starting voltage Holding voltage Voltage 6VDC 0.15 to 0.2 Time s 28 High Vacuum Angle Valve Series XLS Specifications XLS-25-P G Model XLS-16 XLS-25 XLS-16-P G Normally closed (N.C.) Valve type Non-corrosive gas for aluminum alloy (A6063) and stainless steel (SUS405 equiv.)
50 128 124 200 200 300 300 52 72 54 62 156 188 80 100 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5 236 M14 x 2.0 M14 x 2.0 WB Bore size (mm) X YY YL Z st25 st50 50
50 128 124 200 200 300 300 52 72 54 62 156 188 80 100 M12 x 1.75 M12 x 1.75 10.5 12.5 20 17.5 236 M14 x 2.0 M14 x 2.0 WB Bore size (mm) X YY YL Z st25 st50 50
Grommet/Molded Lineup by Compact Design 28 2 Port 3 Port 28 P.243 P.254 17 20.5 28 20.5 17 20.5 28 20.5 VDW10 VDW20 VDW30 VDW200 VDW300 242 Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD For Water, Air, Vacuum VD W 2 1 1 G 2 01 VXZ VXE Made to Order (Refer to page 244.) Series VXP 1 2 3 10 N.C.
Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 2.5 to 40 mA Internal voltage drop 0.8 V or less at 10 mA (2 V or less at 40 mA) 4 V or less Leakage current 100 A or less at 24 VDC 0.8 mA or less Indicator light Red LED lights up when turned ON.
Common Precautions for wiring and cables (P.28) for instructions regarding wiring and handling of cables. Refer to the Card Motor Controller operation manual for parts which are not included. 7 - 3.
How to Replace the Components 28-37 11-1. Diaphragm Assembly Replacement 28 11-2. Bowl Assembly Replacement 29-30 11-3. Element Replacement 31-32 11-4. Valve Assembly Replacement 33-34 11-5. Square Embedded Type Pressure Gauge Replacement 35 11-6. Blanking Plate Assembly Replacement 36 11-7. Plug Assembly Replacement 37 12. Disassembly Drawing 38-39 13.
How to Replace the Components 28-37 11-1. Diaphragm Assembly Replacement 28 11-2. Bowl Assembly Replacement 29-30 11-3. Element Replacement 31-32 11-4. Valve Assembly Replacement 33-34 11-5. Square Embedded Type Pressure Gauge Replacement 35 11-6. Blanking Plate Assembly Replacement 36 11-7. Plug Assembly Replacement 37 12. Disassembly Drawing 38-39 13.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Description Material Part no. 5 Diaphragm assembly Aluminum die-casted/Brass/NBR P218010-1 6 Element Bronze 1301-5B 7 Seal NBR 1301510 DRAIN 8 Filter disk assembly Brass/NBR P218010-16 9 O-ring NBR AS568-228 10 O-ring NBR JISB2401 P4 156 Filter Regulator IW Series Dimensions 15 Panel mounting hole Max. 4 M14 x P1.5 Panel 3.2 BLEED 68 208 60 28 View A OUT SUP 54 46 140 10 Pressure gauge port
P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P=11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 4 L2 35 L1 38 42 M plug connector (M) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Stations 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) n: Stations Dimensions n L 11 12 13 14 15 16 17 18 19 20 28
Port size: 10A, 15A, 20A, 25A M G (Valve open) Q N R Pilot port 12(P1) Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28
D-X 12.5 20Data Symbol S Z Stroke Bore size (mm) 4 5 10 15 20 5 15 20 10 18 23 28 33 51 61 66 56 6-2-3 4 Air Cylinder Single Acting, Single Rod, Spring Return Series CJ1 2.5, 4 How to Order/Single Acting CJ1B S 4 10 U4 Applicable tubing Mounting style Basic style Size O.D. 4 mm 4 mm B Tubing material Symbol Bore size 2.5 mm 2.5 mm Bore size Polyurethane Soft nylon Courtesy of Steven Engineering
17.5 M8 x 1.25 M10 x 1.25 Standard Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 (mm) Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28