Electric Rotary Table

room compatible Clean room compatible CAT.ES100-87 Series LEFB Series LEFS Series LEFS Series LEFB Stroke (mm) Size Stroke (mm) Max. work load (kg) Size Stroke (mm) Max. work load (kg) Size Stroke (mm) Max. work load (kg) Max. work load (kg) Size 16 25 32 25 32 40 25 32 40 16 25 32 40 1 5 14 20 45 60 5 15 25 Up to 1000 Up to 2000 Up to 2000 Up to 600 Up to 800 Up to 1000 Up to 2000 Up to 2500

0.55

How to Order Connector Assembly DC : V200-30-4A100 VAC : V200-30-1A200 VAC : V200-30-2AAC other voltages: V200-30-3AWithout lead wire : V200-30-A (With connector and 2 pcs. of socket) Lead wire length Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm How to Order Include the connector assembly part number together with the part number for the plug connectors

2

C) Ambient temperature 32 (C) Outlet air pressure dew point 10 Power supply voltage (frequency) Note 5) Single-phase/Three-phase: 200 VAC (50 Hz) Note 5) Single-phase/Three-phase: 200/220 VAC (60 Hz) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Single-phase 200 V 810/940 810/940 Power consumption (W) 50/60 Hz Note 6) Three-phase 200 V 850/1070 850/1070 1300/1700 2000/2500

Magnetically Coupled Rodless Cylinder

Caution Theoretical Cylinder Thrust 6, 10 15, 20, 25, 32, 40 50, 63 63 63 1200 40 40 3000 Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) 100 90 80 70 60 50 40 30 20 10 1100 Bore size Bore size 10 2500 1000 900 800 700 10 50 50 32 32 2000 1500 600 25 25 500 400 300 200 100 1000 6 6 20 20 15 15 500 0 0.1 0.2 0.3 0.4 0.5 0.6

HRX-OM-T002

supply or keep the transient overvoltage of the power supply to 2500 V or less by using a varistor, etc.

HRX-OM-S004

supply or keep the transient overvoltage of the power supply to 2500 V or less by using a varistor, etc. 3.3 Installation HRS Series 3-12 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.3.3 Preparation and wiring of power supply cable The electrical facilities should be installed and wired in accordance with local laws and regulations of each country and by a person who has knowledge and

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Gray (2 pcs.) 1000 1500 2000 2500 3000 4 Red: + Black: For DC 1322 Series VFR2000/3000/4000/5000/6000 Specific Product Precautions 3 Be sure to read before handling. Refer to front matters 58 and 59 for Safety Instructions Instructions and pages 3 to 7 for 3/4/5 Port Solenoid Valve Precautions.

Refrigerated Air Dryers

temperature [C] 32 Outlet air pressure dew point[C] 10 Power supply voltage (Frequency) *5 Single-phase/Three-phase: 200 VAC (50 Hz) *5 Single-phase/Three-phase: 200/220 VAC (60 Hz) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) Single-phase 200 V 810/940 810/940 Power consumption [W] Electric specifications 50/60 Hz *6 Three-phase 200 V 850/1070 850/1070 1450/1890 2000/2500

ZX

ZH 600 3 Gray (2 pcs.) 1000 1500 2000 2500 3000 ZU ""30 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL Vacuum release D port ZY Valve Unit ZQ Air supply release A port 57.4 Pilot exhaust PE port Normally closed 7 38.1 9.3 2 1 11.5 ZF Air supply PV port 21.6 64.6

Vacuum Module Series ZX

ZMA 1000 1500 2000 2500 3000 30 ZQ Release pressure output port (D) ZH Valve Unit ZU Air pressure output port (A) Pilot pressure EXH port (PE) ZL Normally closed 57.4 Air pressure SUP port (PV) ZY 20 1 11.5 7 ZF A: Release flow rate adjusting needle with lock nut 8 8 ZP Manual override (Non-locking) Bracket C Standard accessory Pilot valve for supply (Needle fully open) 2 x 3.6 (Mounting

Table of Contents

D-F7NV/D-F7PV/D-F7BV Rail Mounting Style . D-J79C Rail Mounting Style. D-M9N(V)/D-M9P(V)/D-M9B(V) Direct Mounting Style . D-F8N/D-F8P/D-F8B Direct Mounting Style . D-Y59A, B /D-Y69A, B/D-Y7P(V) Direct Mounting Style . D-F9G/D-F9H Normally Closed Direct Mounting Style. D-Y7G/D-Y7H Normally Closed Direct Mounting Style. 2-color Indication Type . D-H7NW/D-H7PW/D-H7BW Band Mounting Style.

5

Type Mounting Model Electrical entry Features Band mounting D-H7A1/H7A2/H7B D-H7NW/H7PW/H7BW Diagnostic indication (2-color indicator) Grommet (In-line) D-F79/F7P/J79 D-F79W/F7PW/J79W Diagnostic indication (2-color indicator) D-F7NV/F7PV/F7BV Grommet (Perpendicular) D-F7NWV/F7BWV Diagnostic indication (2-color indicator) Sold state Rail mounting Band mounting D-C73/C76 D-C80 Without indicator

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Auto switch type Model Features Electrical entry (Fetching direction) D-A73 D-A80 D-A73H, A76H D-A80H D-F7NV, F7PV, F7BV D-F7NWV, F7BWV D-F7BAVL D-F79, F7P, J79 D-F79W, F7PW, J79W D-F7BAL D-F7NTL Without indicator light Without indicator light Grommet (Perpendicular) Reed Grommet (In-line) Grommet (Perpendicular) Diagnostic indication (2-color indication) Water resistant (2-color indication

Table of Contents

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

HRX-OM-Q026

When using a power supply in the overvoltage category 3, take measures such as mounting an isolation transformer between the product and the power supply or keep the transient overvoltage of the power supply to 2500 V or less by using a varistor, etc.

0.4

12 Station 18 Station 24 Port size Station 7 Station 13 Station 19 C3 C4 C6 M5 N1 N3 N7 One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 M5 thread One-touch fitting for 1/8" One-touch fitting for 5/32" One-touch fitting for 1/4" (For C kit) AXT661 1 AL 3 Construction Lead wire length Wiring Symbol Nil 6 10 15 20 25 30 50 L dimension (mm) 300 600 1000 1500 2000 2500

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Lead wire length Nil 300 mm 6 600 mm 10 15 20 25 30 50 1000 mm Ground nut 1500 mm Set screw Tightening torque 2000 mm Tightening torque 0.37 to 0.44 lbfft 1.84 to 2.77 lbfft (2.5 to 3.75 Nm) 2500 mm (0.5 to 0.6 Nm) 3000 mm Housing Washer 5000 mm How to Order Specify the connector assembly part number together with the part number for the plug connector type solenoid valve without connector

CATALOG

NRBC031-025 NCDBX2N15 D-A76H Reed 4 ~ 8 VDC 20mA NCDPX2N15 D-E76A NCX2N25 D-A73C Reed 24VDC 5 ~ 40mA NRB050-030/NRBC050-030 NCDBX2N25 D-A80C Reed 24VAC/DC or less 50mA NCDPX2N25 D-F79 3 Wire Solid State NPN 28VDC or less 150mA or less D-F7P 3 Wire Solid State PNP 100mA or less D-J79 2 Wire Solid State 24VDC (10~28V) 5 ~ 150mA D-F7NV 3 Wire Solid State NPN 28CVDC or less 150mA or less D-F7PV

SQ1000/2000

1 Fitting assemblies> (For cylinder port) VVQ1000 51A C8 (For C kit) Bore size AXT661 1 AL 3 6 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting C4 C6 C8 N3 N7 N9 Wiring Lead wire length 3 4 For double (3 wires) For single (2 wires) Dimension L (mm) 300 600 1000 1500 2000 2500 3000 5000 Symbol Nil 6 10 15 20

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm