•

. ~43b'F~N02-07S 114' '" " " ,. , , 18,5 15 18 jl~' 11/1~ 1 _ , 10.2 # 23 19.8 20.3 2 3.1 18.5 ASP530F-NOJ...09S 5/ 16" NPT3/8 NPT1/8 5 1.3 28.2 41.9 56.2 50 3 l B.7 107 I 46.9 14.4 54 .1 32.6 20.8 11 6 19 I 112 (}I .-2 ; :)2.6 . " . " ... t AS P6:1oF.,..ci4:'M' .. .. -31&" ; ~~T; 12 . .. . I AS~'Nl>?f3S ~ ~ fit ' ..

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

White 2 Body B Brass Electroless nickel plated 3 Needle Brass Electroless nickel plated 4 Seat ring Brass (1) 5 Lock nut Steel (2) 6 Handle Red painted Aluminum alloy 7 Push button Red POM 8 Cassette 9 U seal HNBR 10 Seal NBR 11 O-ring NBR 12 O-ring NBR 13 O-ring NBR 14 Valve core 15 Elbow body PBT 16 O-ring NBR AS21FE-01 only (3) 17 Accidental release prevention screw Stainless steel 18

SMC Pneumatic Clean Series

gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment M3 x 0.5 11 3.5 10: Relief port 11: Vacuum suction port 2-M3 x 0.5 (Port size) G 3.5 H screw effective depth I Width across flats M Width across flats L E D kh9 J F C N 2.5 2-3.3 through 2-3.3 through B 3 3 3 11.5 + Stroke 18

reduces flow setting time

Description Material Note 1 Body A PBT 2 Elbow body PBT 3 Body B Brass Electroless nickel plating 4 Knob POM 5 Needle PBT 6 Needle guide Brass Electroless nickel plating 7 U-seal HNBR 8 O-ring NBR 9 O-ring NBR 10 O-ring NBR 11 Cassette 12 Seal NBR 13 Spacer PBT 3.2 and 1/8" only 14 Bonnet A POM 15 Bonnet B POM 16 Gear POM 17 Indicator gear POM 18 Clip Stainless steel 19 Gasket NBR/Stainless

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Description Material Note 1 Body A PBT 2 Elbow body PBT 3 Body B Stainless steel 4 Knob POM 5 Needle PBT 6 Needle guide Stainless steel 7 U-seal HNBR 8 O-ring NBR 9 O-ring NBR 10 O-ring NBR 11 Cassette 12 Seal NBR 13 Spacer PBT 3.2 and 1/8" only 14 Bonnet A POM 15 Bonnet B POM 16 Gear POM 17 Indicator gear POM 18 Clip Stainless steel 19 Gasket NBR/Stainless steel 20 Seal NBR 691 AS-FSG Series

D-F6N/D-F6P/D-F6B

(Product with a lead wire length of 0.5 m is not available.) 18 Prior to Use Auto Switches Common Specifications 2 Refer to the Auto Switch Precautions on pages 8 to 11 before using auto switches. Meaning Term Hysteresis A deviation amount between the ON position and OFF position caused by auto switch characteristics (difference in sensitivity between ON and OFF).

AZ1000

(ASME B40.1 Grade A) psig/bar 4) (No code) Accuracy Cleanliness No oil ASME B40.1 level IV No oil Stainless steel Polycarbonate 316L SS 316L SS Case Window Socket Bourdon tube Material MPA MPa 1.14 (29) 2.28 (57.8) 2 (50.7) 2.13 (54.1) 3/4 HEX 9/16-18 UNF 0.73(18.5) inch (mm) For AK/BP series (Installed before shipment / Order separately) Stainless steel / Lower mount Model Specifications

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

X2798 Dimensions: With Manually Operated Handle CKZT S-X2798 R L Refer to the CKZT S-X2797 (page 3) for dimensions other than those shown below. 47 42 20 (Black) 4 130 F . ax M 55 Handle position: Right Unclamping position Handle position: Left Bore size Arm opening angle F 25 90 110 105 126 32 90 110 105 126 4 CKZT -X2797 -X2798 Dimensions: Clamp Arm CKZT25-A000 S-X2797 C R L L: Left 26 18

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0 M5 x 0.8 14 12.5 21.5 19 22 19 19 16 16 14 6 5 7.6 depth 6.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106 97.5 116 126 100 88.5 93.5 103.5 108.5 135 145 40 36.5 110 98.5 113.5 9.5 depth 8 105 115 120 125 83 88 93 98 103 108 118 128 106 111 116 121 126 131 141 151 5.5 9 4.5 20 25 15.5 18

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V Rotating angle Size Operating range ( ) Operating range ( ) Proper mounting position A (mm) Proper mounting position A (mm) 90 13 9 30 42 81 180 22 18 Operating range at proper mounting position /2 90 22.5 18.5 50 30 44 180 39 35 Most sensitive position Operating range of single auto switch Values which include hysteresis are for guideline purposes

Series 10-MGF ø40, ø63, ø100 Guide Table

Maximum tightening torque (Nm) L (mm) Model Bolt M8 x 1.25 MGF40 18 8 M10 x 1.5 MGF63 36 10 M12 x 1.75 MGF100 65 10 847

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16 8 22 8 15 80 18

20

8 O-ring O-ring Parallel pin 15 16 17 18 19 NBR NBR !3 Stainless steel Stainless steel Stainless steel Cross recessed round head screw Hexagon nut Note) Grease is used on rubber and sliding sections.

Process Valve

Flow rate characteristics Weight (kg) Orifice diameter (mm) Effective area (mm2) Air operated Model Measured by air Measured by water Port size Rc Kv Conversion Cv External pilot solenoid VNA4-25A VNA5-32A VNA6-40A VNA7-50A 1 220 320 500 770 0.9 1.4 2.2 3.2 2 25 32 40 50 10.4 15.6 24.2 37.2 12 18 28 43 0.8 1.3 2.1 3.1 1 4 1 2 1 1 Specifications Fluid (Main piping) Refer to Table (1) on page

3 Port Air Operated Valve VPA3145/3165/3185 Series

Port Solenoid Valve Precautions. 3 (EXH) 1 (IN) 3 (EXH) 1 (IN) Pilot Pressure Range Vacuum/Low Ordinary pressure Pilot pressure (MPa) Operating pressure (MPa) 1574 3 Port Air Operated Valve VPA315 Series Flow Rate Characteristics/Weight Flow rate characteristics Weight (kg) Port size 12(INOUT) 23(OUTEXH) Valve model C[dm3/(sbar)] C[dm3/(sbar)] 1(IN), 2(OUT) 3(EXH) b Cv b Cv 19 0.43 5.5 18

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

28 VA (50 Hz), 17 VA (60 Hz) 12 W Allowable voltage fluctuation DC AC Inrush Holding Apparent power Note) Power consumption Note) DC Semi-standard Note) At rated voltage Flow Rate Characteristics/Weight Weight (kg) 1 2 (IN OUT) 2 3 (OUT EXH) Flow rate characteristics Port size Valve model Grommet C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(IN), 2(OUT) 3(EXH) 3 8 1 2 3 4 19 0.43 5.5 18

VXA31/32

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

VXH

VXB Solenoid Specifications VXE Apparent power (VA) Inrush Holding Power consumption (W) (Holding) Temperature rise (C) (Rated voltage) 7.5 6 60 50 Frequency (Hz) 50 53 18 60 44 12 Power source VXP AC VXR VXH VXH How to Order VXF VXH2230 02 1 G Symbol 2 VX3 CE-compliant VXA 2 port valve for high pressure CE-compliant Nil Q 1 For DIN terminal only Bracket Valve/Body None With bracket Nil

1

XSA1 4.5 6 XSA2 7 8 XSA3 10.5 11.5 Reverse pressure potential 0.5 MPa(G)*1 Weight New New 18% *1 XSA1-12 (Refer to the Specifications on page 3.) 0.5 kg 0.41 kg lighter *1 Rated voltage *1 XSA2-2 32 AC 100 V, 200 V, 110 V, 220 V, 240 V, 48 V, 24 V, 230 V DC 24 V, 12 V Applications Photovoltaic cell manufacturing Semiconductor manufacturing LCD manufacturing New New Female thread type (Rc,

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 33 25 10 10.5 10.5 12 8.5 13.75 4 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 30 10 18 11.6 19.5 23 20 29 53.2 9.1 14.1 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 34 14 22 15.6 23.1 27