Dedicated Controller

(P-no.) label Condition jump General purpose input no., State OR input condition jump command J-OR (P-no.) label Program control commands T-bracket Parameter value Classification Function Instruction Jump Unconditional jump command (P-no.) label JMP Subroutine call command (P-no.) label CALL Sub-routine Subroutine end declaration RET Loop start command Loop frequency FOR Loop Loop end command

99

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Port size Element classification Note) 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

Oil Filter FH150 Series

View port G1/2 Refer to page 529 for Microswitch for differential pressure indication switch. 523 FH150 Series Dimensions Differential pressure indication switch 62 Differential pressure indicator 16 (65) 29 A E F (34) 29 2 x Rc (d) J H 29 G OUT IN IN OUT Differential pressure indicator Differential pressure indication switch D (Element removal dimension) B C (mm) d A B C D E F G H J Weight

ChemicalThermo-con

Heat generation amount Q : Unknown : 1.0C (1.0 K) : 20C (293.15 K) : 21C (294.15 K) : 7 L/min :Water : Density : 1 x 103 kg/m3 Circulating fluid temperature difference T (= T2 T1) Circulating fluid outlet temperature T1 Circulating fluid inlet temperature T2 Circulating fluid flow rate L Circulating fluid : Specific heat C: 4.2 x 103 J/(kgK) T1: Outlet temperature Q = T x L x x C 60 x 1000

Refrigerated Air Dryer For Use in North, Central and South America

Compressed air inlet Evaporation thermometer Compressed air outlet Cooler re-heater Ball valve Capillary tube Auto drain High pressure switch Condenser Volume control valve Fan motor Pressure switch Drain outlet Accumulator Compressor for refrigeration Dimensions IDFB60, 70, 80, 90 Compressed air outlet Port size Compressed air inlet Port size G A E B D J C F Drain tube outlet [Thread symbol

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

Fittings & Tubing Air Cylinders Rotary Actuators Clean series 11 12 Vacuum suction type Relief type (with specially treated sliding parts) CXSJM, CXSJL CXSJL CXS 6 50 J 11 L M9B S 21 CXS L J 6 50 M9B S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

100 239 247 296 320 339 345 44 46 48 51 59 63 3 4 1 3 4, 1 1 1 1 4 1 2 , 2 Dimensions: Auto Feed Tank Float switch Contact point capacity: AC: 15 VA, DC: 15 W Contact point construction: 1a, 1b M Width across flats 12 Float switch Lubrication plug Model A 174 174 234 234 B 70 70 108 108 C 16 16 30 30 D 7 7 7 7 E 91 91 121 121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382 422 422 J

Exhaust Cleaner Series AMC

B' B C Drain cock Drain guide R, NPT, G Operating Pressure: 0.5 (MPa) Operating pressure: 0.5 (MPa) Mounting bracket Port size Model E M3 x 0.5 Depth 8 Drain piping D C B A F G H J K B' 3 8 AMC310 75 140.5 138.5 150.5 24 50 15 55 2.3 141.5 AMC510 M4 x 0.7 Depth 8 102 193.5 196.5 203.5 40 70 20 70 3.2 199.5 3 4 Air consumption (l/min (ANR)) AMC610 M4 x 0.5 Depth 10 118 219.5 224.5 229.5

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

Rodless Cylinder for Vacuum Series CYV ø15, ø32

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F MX MTS QW PB MY CY N A E depth EK MG Q + Stroke G CX Z + Stroke Stroke adjustment screw LW (inner cover) DA A -X 20HP H HL HA HA HI Data TA TA R 4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

16 0.090 J Smooth Cylinders Low Speed Cylinders Minimum Operating Pressure Unit: MPa Bore size (mm) 10 16 Minimum operating pressure 0.03 Standard Strokes Made to Order (For details, refer to pages 174 to 191.)

Power Clamp Cylinder

(Clamp Cylinder Without Arm) CKZT50, 63, 80 Release point XA CK1 CLK2 C(L)KQ MK2T/MK2/MK CKZ2N CKZT CLKZ1R CK/M(D)UKA RA XB RR XC Nh9 R NA0.02 NC RW LB For Asia For North America For Europe For France Special NB0.05 PD0.05 VC0.1 VB0.1 VD0.05 PA0.02 PC0.05 GC +0.1 K 0 PB0.02 GA GB VF LA0.1 VA0.02 C VE L 2 x 2 x P H7 depth D 2 x V H7 depth I 4 x NN depth S N 2 x NPT 1/4 G 2 x 2 x MM depth J

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

R 14.2 (Stopper operating range) Note 2) HA 6 Note 2) (Max EB) Note 3) 5 9 2.4 25 (Max EA) 1.4 32 5.5 (mm) Size EA EB HA 6.6 CRJU05 CRJU1 5.6 33.8 6.5 3.1 5.6 35.8 7.5 (mm) Size Rotating angle 90 A BA BB BC BD BE BF BG BH BI CA CB D DD J JA JB JC JD H N Q S SD UU W 21.5 32.4 43 CRJB05 19.5 30 9.5 11 6.5 3.5 17.1 20 7 5.5 5g6 10h9 M4 x 0.7 5.8 3.5 M4 x 0.7 5 14.5 12.5 13.5 3.4 28 4.5 180

Compact Cylinder with Solenoid Valve/

F1 (KB) KA 2 x 2 x OB counterbore depth RB M Z X B + Stroke L EB A + Stroke EA E Axial piping Bore size (mm) F1 32 40 50 63 30 34.5 43.5 51 Bore size (mm) Stroke range (mm) A B E EA EB F HA HB J KA KB L M N OA 32 40 50 63 5 +0.2 0 5 +0.2 0 6 +0.2 0 6 +0.2 0 28 0.2 33 Note 1) 40 Note 1) 45 43 34.4 6.5 M5 x 0.8 22.5 19.8 7 34 5.4 M6 x 1 5 to 100 33 0.2 39.5 52 50 41.4 6.5 M5 x 0.8 26 23.3 7

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

During cylinder operation, be careful not to get your hand or fingers caught between the plate and housing. 88 Dual rod cylinder/Compact type 6, 10 Series CXSJ 11-/1221-/22How to Order Clean series 11 12 Vacuum suction type Relief type(with specially treated sliding parts) CXS 6 50 J 11 L M9B S 21 6 50 M9B S CXS L J Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

High Pressure Coolant Valve

(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2

3 Port Solenoid Valve/

Spacer with Bracket Piping Adapter: 3/8, 1/2 J K D A piping adapter allows installation/removal of the component without removing the piping and thus makes maintenance easier. F H Port size G E E Center of F.R.L. body Center of F.R.L. body B B C D A Part no.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

3 Ejector assembly ZK2 EJ A W 10 Nozzle nominal size 07 0.7 10 1.0 12 1.2 15 1.5 Bellows type with groove Flat type with groove 257 ZHP Series Dimensions 30 N 70 Silencer In the case of Flat type P 16.6 EXH. 24.7 P F E D C A PD port 3 6.2 K M Female thread mounting M Male thread mounting Unlocked: 32.2 PD port 2 Locked Unlocked J PD port 1 G H P port L E F 6.2 10 7.8 6.2 Lock screw 14.4 1.4

Ejector Valve Unit Series ZYY/ZYX

Y 3 X 3 ZZY 45 J 1 U Note 1) With ejector Number of ejectors 1 to 10 Enter the following together with the manifold number: 1. Part no. of solenoid for SY3000/SX3000 2. Part no. of ejector valve for ZYY3000/ZYX3000.