VQZ100/200/300

Note 3) Weight without sub-plate 2.10-6 VQZ100/200/300 Body Ported Construction VQZ100 Poppet e w q Component Parts SY Material No. q Description Notes N.C. Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C.

VR4151/4152

Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No. Material Note No.

IDX-OM-W020

: inch (mm) 10mm N 3/8 B Q E D A G C F 1 J 31.5 [820] P L K M N H (L=2800) IDFB4E/6E/8E/11E-11 1. : inch (mm) 10mm N 3/8 A B E D Q G C F 1 J 31.5[800] H N M 4-0.5 (L=2800) [4-13] 6-3 6 3 IDFB Series IDX-OM-W020 6 IDFB15E-11 1. : inch (mm) 10mm N 3/8 E D B A Q G C F (820) K L P N M H J 4-13 (L=2800) (inch [mm]) A B C D E F G H J K L M N P Q IDFB3E 3/8 8.9 16.1 18.6

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

(mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1

2-Color Display Digital Flow Switch Series PFM

Flow range Sensor 0.2 l/min 0.5 l/min 1 l/min 2 l/min 10 l/min 25 l/min 50 l/min 100 l/min 0.2 l/min 10 l/min (5 l/min) PFM710 PFM510 0.2 l/min 10.5 l/min (5.2 l/min) 10.5 l/min (5.2 l/min) 0 0.5 l/min 25 l/min (12.5 l/min) PFM725 PFM525 0.5 l/min 26.3 l/min (13.1 l/min) 26.3 l/min (13.1 l/min) 0 1 l/min 50 l/min (25 l/min) PFM750 PFM550 1 l/min 52.5 l/min (26.2 l/min) 52.5 l/min (26.2 l/

PFxx-OMX0002

to 6000 L/min 120 to 12000 L/min Instantaneous flow 30 to 3150 L/min 60 to 6300 L/min 120 to 12600 L/min Set point range Accumulated flow 0 to 999,999,999,990 L 0 to 999,999,999,900 L Flow specifications Instantaneous flow 2 L/min 5 L/min 10 L/min Minimum resolution Accumulated flow 10 L 100 L Accumulated volume per pulse (Pulse width = 50 msec.)

Lubricator Series AL10 to 60

Drip failure can cause damage to the components that need lubrication. 14-2-62 Lubricator Series AL10 to 60 Construction AL10 AL20 JIS Symbol w w e q q t IN OUT IN OUT F.R.L. y y AV r u u AU AF AR AL30/40 AL50/60 IR w w q t VEX q e e t AMR IN OUT OUT IN ITV y r IC i r u VBA VE VY1 y G u PPA AL Component Parts Description Material Note No.

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

Soft Start-up Valve AV2000/3000/4000/5000 1

How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) ) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are

Compact Cylinder Series NCQ8

Q J E D-rod Dia.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

Nw5z5-ar-(X)r ' NW5Z5-.2.L_rCr (D NVZ5000 Grommet/ 1,25120-OGOO-017 l{v:25120-oHoo41T DIN connctor (D)/ NVZsl2GODOO-017 flfi 6 .e .g With Bracket : NVZ512O-OG-O|T-F 0.18(4.5)Oia I .irri , l r q I r l l+l I _.1-_ r181(3OO) ruo wiii-unerrri , r , r ' . r r l , , . ' , . r . 1 . . ; , t 1 ' . . : r 1 . : , . . ' i a i ' L type plug connector/N\Zsl2GOLOO-olT . , . : , , r r . . t , 1 . , ' .

PFxx-OMX0007

(Displays 0 when the value is (Displays 0 when the value is below 10 L/min) below 20 L/min) 20 to 1050 L/min 40 to 2100 L/min 2.0 0 to 2%F.S. (Displays 0 when the value is (Displays 0 when the value is below 20 L/min) below 40 L/min) 30 to 1050 L/min 60 to 2100 L/min 3.0 0 to 3%F.S.

PFxx-OMY0005

(Displays 0 when the value is below 10 L/min) 40 to 2100 L/min 20 to 1050 L/min (Displays 0 when the value is below 40 L/min) 2.0 0 to 2%F.S. (Displays 0 when the value is below 20 L/min) 60 to 2100 L/min 30 to 1050 L/min (Displays 0 when the value is below 60 L/min) 3.0 0 to 3%F.S.

A

www.stevenengineering.com I 5.9 AIR PREPARATION MODULAR TYPE MIST SEPARATOR SERIES (N)AFM T E C H N I C A L SPECIFICATIONS Port Size 18 34Rc R e m o v e s m o re t h a n 9 9 . 9 % of oil mist 0.3m filter element Q u i c k r e l e a s e m e t a l b o w l guard on some sizes Automatic or manual drain Model NAFM2000 NAFM3000 NAFM4000 Port Size 18 14 14 38 38 12 34 Flow Rate ln/min* 200 450

Title not found

s NVZ3000 Symbol With Subplate Body porled Vpe Base mounted type with subplate NVZ3r20 NVZ340 Cv0.25 1 1 / l \ l h u d l / l \ L E l ff NVZ32?

IZx-OMX0087

IZTP43(-L) and IZTN43 (2pcs.), IZTP41(-L) and IZTB40 (2pcs.) Separate connection Example of connecting IZTC41(-L), IZTP43(-L) andIZTN43 Example of connecting IZTC41(-L), IZTP43(-L) and IZTN43 (4pcs.) Example of connecting IZTC41(-L), IZTP43(-L) and IZTN43 (2pcs.) , IZTP41(-L) and IZTB40 (2pcs.) 1-2.

Digital Flow Switch (Integrated display type)

8.0] 8.0 L/min (16 L type) [ 20.0] 20.0 L/min (40 L type) [ 50] 50 L/min (100 L type) [ 126] 126 L/min (250 L type) [ P_1] Set value (OUT1) [F 1]/[ oUt1] Page 33 5% of maximum rated flow [ 0.20] 0.20 L/min (4 L type) [ 0.8] 0.8 L/min (16 L type) [ 2.0] 2.0 L/min (40 L type) [ 5] 5 L/min (100 L type) [ 12] 12 L/min (250 L type) [ H_1] Hysteresis (OUT1) [ CoL] Display colour (OUT1) [ SoG] ON

Direct Solenoid

't;"iii:l:lr:'ir'i' .l l:r':].l:'.:ri:]"r''irr':''i ' r.i' 'r "i "" ' r' ,.it:.i:ur,,r':.,'l:.,t:i:rr'].i:,i::.!t'.:.,i,l.:a,,l'.::ra,'.i,," " . r' i l ,,,.:,:].::.i::.::rl::]rr:,;,:::t,:,,,t,.i:.i:t.:fi:l':,rill..ia,it,"l'-'.:l:...:', ,'l.it:la:::lt]i:ri:t,:i;:i.:i:.,'i:r':::l'.'rt:ail.:r'.,t'...':.':r:'ir . ,,,lri:,,j:li:.l'..i.,i',i.].'..i'1.'rt...i.i.1,.j,.: j..i riir',: .,,, I . .

I

A N D R E S I S TA N C E L O A D H O W T O O R D E R P R E S S U R E S W I T C H GS40 GS40-01 W I R I N G E X A M P L E S U S E D W I T H A S E Q U E N C E C O N T R O L L E R (COM T E R M I N A L I S V E) Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

58

f C B h + l A K N N H F F ZZ + l + 2 x strokes S + Stroke H + Stroke ZZ + 2 x strokes V W Cushion valve Port 4 x J G G 2 x P (Rc, NPT, G) M Width across flats KA Width across flats KA MM MM With rod boot (Both sides) E E D D e e C B l + Stroke l AL AL C B f f A K N N A K h + l h + l + Stroke S + Stroke ZZ + 2 x l + 2 x strokes (mm) Bore size (mm) Stroke range (mm) P S N MM M K KA W V J G