Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

side parallel 150 153 n x 6.6 6H9 ( +0.030 0 ) depth 66 7 60 64 76 7 6H9 (+0.030 0 ) depth 66 6H9 (+0.030 0 ) depth 66 11 Motor mounting position: Right side parallel 153 G 70 60 64 *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

MHT2

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) A 9 13 11 13.5 B 6 8.5 11.5 14.5 A 9.5 13.5 11.5 14 B 6.5 9 12 15 A 6.5 10.5 8.5 11 B 3.5 6 9 12 C 8 12 10 12.5 D 5 7.5 10.5 13.5 C 12 16 14 16.5 D 9 11.5 14.5 17.5 C 11 15 13 15.5 D 8 10.5 13.5 16.5 32

MHL2

Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.

MHT2

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) D 8 10.5 13.5 16.5 C 11 15 13 15.5 D 9 11.5 14.5 17.5 C 12 16 14 16.5 D 5 7.5 10.5 13.5 C 8 12 10 12.5 B 3.5 6 9 12 A 6.5 10.5 8.5 11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

4.5 (same on reverse side) 4 8 6 11 22.5 (13) (10 + 1/2ST) 4 Model ST 13 + ST 45 + ST 58.5 + ST 10 + 1/2ST CXS6-10-XB19 10 23 55 68.5 15 CXS6-20-XB19 20 33 65 78.5 20 CXS6-30-XB19 30 43 75 88.5 25 CXS6-40-XB19 40 53 85 98.5 30 CXS6-50-XB19 50 63 95 108.5 35 CXS10--XB19 17 S ZZ 15 1 10 7 SS 2-3.4 through 2-6.5 counter bore depth 3.3 2-2.5 x 14l AW (spring pin) 20 Z 9 5 1 35 0.2 35 0.2 33.6

Stopper Cylinder Adjustable Mounting Height Type Series RSG

B 35 40.5 QA 6 8 QB 13 16 QV 33 38.5 A 47 58 Bore size (mm) 40 50 21 Adjustable Mounting Height Type Series RSG Rod End Configuration Lever Type with Integrated Shock Absorber Variable energy absorbing type/Flange mounting These drawings (2 items) show the piston rod extended.

PSxx-OMR0001CN

13.6 19 ISA-14() -20No.PS-OMR0001CN-J 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5 C(4 ) C(6 ) F(G ) H 13 13.6 19 -21No.PS-OMR0001CN-J 2 ISA3--B-L () ISA3--B-L 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 C(4 ) C(6 ) F(G ) H 13 13.6 19 -22No.PS-OMR0001CN-J

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

CRB2-OM00001

Part Material Note 1 Body (A) Aluminum Alloy White 2 Body (B) Aluminum Alloy White 3 Vane Shaft Carbon Steel (NBR) 4 Stopper Aluminum Die Casting For 90 5 Stopper Resin For 90 6 Stopper Aluminum Die Casting For 100 7 Bearing Bearing Steel 8 Back-up Ring Stainless Steel 9 Hexagon Socket Head Cap Screw Stainless Steel Special bolt 10 O-ring NBR 11 O-ring NBR 12 Stopper Packing NBR 13 Parallel

Speed Controller with One-touch Fittings Series AS In-line Type 1

76 20.9 12 22 19.8 46 34.1 39.1 8.2 64.4 15.2 18 5/16" AS3001F-09 AS4001F-10 36 43.6 51.1 18.5 10 21 82 11.3 26.5 53 35.3 40.3 9.5 70.8 17.9 21 3/8" AS3001F-11 AS4001F-12 40 44.6 52.1 20.9 12 22 97 43.5 51 10.3 76.9 17.9 21 3/8" AS4001F-11 26.5 106 44.9 52.4 11.6 83.1 21.7 22 1/2" AS4001F-13 15-9-12

Table of Contents

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7

Series H, DL, L, LL Self-align Fittings

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

Series SYJA300 3 Port Air Operated Valve

holes) 17 3 (For solenoid valve) M3 X 0.5 2.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Bleed port) 13 5 8.6 10 (P, A, R port) 3-M5 X 0.8 23 3.3-2 3 Port Air Operated Valve Series SYJA500/700 Model Valve model Actuation Port size Weight (g) Pilot port size Effective area (mm2) (Cv) SYJA512-M5 N.C. 3.6 (0.2) 45 Body ported M5 X 0.8 SYJA522-M5 N.O.

EX500-GPR1A.eng

Display Wiring (continued ) EX9 Series General Purpose Output Block Part Names Settings for display Display Description 2 4 6 8 10 Input unit 12 14 1 3 5 7 9 11 13 15 0 1 0 1 0 1 0 1 0 1 0 Indicator LED Power LED 1 0 1 0 1 0 Note1: For wiring method, refer to subsection "Wiring" ( page 34 ) of section "EX9 Series General Purpose Output Block" in this manual.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

M8 ZHPmmmB-mmS 27.1 21.2 6 17 M10 ZHPmmmC-mmS 13 36.7 M8 depth 10 ZHPmmmD-mmS 17 39.1 M10 depth 10 ZHPmmmE-mmS 27.45 21.8 6.75 12.7 5/16-18UNC ZHPmmmF-mmS 29.43 26.82 8.33 14.28 3/8-16UNC ZHPmmmG-mmS 12.7 41.7 5/16-18UNC depth 11 ZHPmmmH-mmS 14.28 44.1 3/8-16UNC depth 11 EXH.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Process Data Diagnosis items Bit offset Item Note Internal product malfunction Outside of zero-clear range Outside of rated pressure range Upper temperature limit exceeded inside the product 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 2 Diagnosis 0: Normal 1: Abnormal 3 to 15 Measured pressure value Unsigned 13 bit Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Measured

Fieldbus system Ethernet POWERLINK compatible SI unit

Content of diagnosis 0 There is an error in unit 0. 1 There is an error in unit 1. 2 There is an error in unit 2. 3 There is an error in unit 3. 4 There is an error in unit 4. 5 There is an error in unit 5. 6 There is an error in unit 6. 7 There is an error in unit 7. 8 There is an error in unit 8. 9 There is an error in unit 9. 10 Reserved 11 Reserved 12 Reserved 13 Reserved 14 Reserved

AMF

AMF150 AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 Rated flow (l/min (ANR))(1) 200 500 1000 2000 3500 6000 12000 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 1, 11/2 11/2, 2 3/4, 1 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa.

PA300/500/700

Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions. 5-5-13 2 Series VPA300/500/700 Construction Standard Body ported Base mounted Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum (Option) Body ported Base mounted Component Parts