Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

set screw) 2 x 9.5 counterbore depth 5.3 23 1 500.2 500.2 28 62 53 64 6.3 5 M6 x 1.0 x 18.5 L and M6 x 1.0 11.5 2 x M4 x 0.7 thread depth 6 (Hexagon bolt) (Hexagon nut) 2 x M5 x 0.8 (Through-hole) M6 x 1 x 12 L (Hexagon socket head cap screw) (Z) 8 x M4 x 0.7 thread depth 5.5 (Opposite side: Same) 30 6.5 12.5 7.75 9.5 4 x M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 8 10 52

Support Guide/11-LEFG Series

244 157 230 11-LEFG16-S-200 294 207 280 6 2 200 11-LEFG16-S-250 344 257 330 11-LEFG16-S-300 394 307 380 8 3 300 11-LEFG16-S-350 444 357 430 11-LEFG16-S-400 494 407 480 10 4 400 11-LEFG16-S-450 544 457 530 11-LEFG16-S-500 594 507 580 12 5 500 40 11-LEFG25-S 45 64 (102) 3H9 (+0.025 0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52

Environment

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 1500 1500 1000 800 1000 1000 Lz 600 L3 [mm] L1 [mm] L2 [mm] 400 500 500 200 Ly Lx 0 10 20 30 40 50 60 0 0 10 20 30 40 50 60 0 0 10 20 30 40 50 60 0 Work load [kg] Work load [kg] Work load [kg] 52 Model Selection LEFS Series AC Servo Motor Clean Room Specification

Vacuum Filter AFJ Series

AFJ40 N T J D M U Bracket (Option) S R C V Q IN OUT 2 x P (Port size) B Clearance for maintenance G A E Model Standard specifications Optional specifications Bracket mount P A B C D E G J M N Q R S T U V AFJ20 1/8, 1/4 40 79.2 9.8 20 25 20 30 27 22 5.4 8.4 40 2.3 28 AFJ30 1/4, 3/8 53 104.1 14 26.7 30 35 26.7 41 35 23 6.5 13 53 2.3 30 AFJ40 1/4, 3/8, 1/2 70 136.1 18 35.4 38.4 40 35.4 50 52

Series AK1000

Wetted Parts Material B Brass S 316 SS 316 SS Hastelloy C-22 PCTFE (Option: PTFE) Wetted Parts Body Poppet Diaphragm Seat 52 Series AK1300 Single Stage Regulator for General Applications High flow AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Dimensions inch (mm) AK1300 2.12 (53.8) Max

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

The set pressure can be adjusted by turning adjustment screw r , which adjusts the spring force. (23) 44 (500) eSwitch assembly rAdjusting screw wRegulating spring qPiston O-ring Adapter 52 Hexagon socket head cap screw Port R1/8 15 23 689

Compact Manifold Regulator

IN Fitting Type Inch size Metric size ARP Common supply block (S) Common supply block with pressure switch (P) Fitting type Fitting type Straight 6 8 10 8 6 10 Elbow Straight 1/4 5/16 3/8 5/16 1/4 3/8 Elbow Symbol Symbol IR-A 01 02 03 13 14 15 51 52 53 63 64 65 5 56 56 5 IR 0.4 0.2 0.6 0.5 SMC 20 MPa 24 20 17 24 56 IRV 0.3 0.1 VEX 32.5 SRH 4.

Manifold Regulator ARM1000/2000 Series

Manifold Regulator ARM1000/2000 Series Dimensions 14.5 (With pressure gauge) (Mounting hole) ARJ AR425 to 935 ARX (With pressure gauge) Pressure gauge (Option) AMR ARM ARM Pressure gauge (Option) ARP IR-A IN (Common IN, with plug) IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52

Compact manifold regulator ARM5 Series

IN Fitting Type 15 IR-A Inch size Metric size Straight IN side IN side Symbol Symbol IR Elbow Elbow Straight 1/4 5/16 5/16 1/4 6 8 8 6 IRV 51 52 63 64 01 02 13 14 VEX SRH 3. Tie-rod for Centralized Supply Block Note) SRP Symbol Description Without tie-rod Nil T O-ring SRF With tie-rod Note) The O-ring is attached to the manifold connection. Note) For details, refer to page 705.

With Factory Installed

AW2001 AW3001 AW4001 6) Valve ass'y Brass NBR 1349160 131521 6A 13 16212A e Filter element Bronze 11 294-5B 11 1511-5B 11 104-5B Baffle ABS resin 11295 111522 111622 0 Diaphragm ass'y NBR 131445A 131 52 15A 1316211A Deflector ABS resin 112961 11158 11167 Ci) Bowl ass'y 1'<0'., Polycarbonate C200F C300F C400F 0 Valve spring Stainless steel 13491 58 131525 131625 C!!)

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

Speed Controller with

AS1002F-23A 3.2 8.4 6.7 9.5 3.3 5.5 9.4 10 36.6 5.1 11.8 24.1 23 11 15.4 8.8 10.1 13.5 3.7 AS1002F-04A 4 9.3 7.7 10 37.6 4 AS1002F-06A 6 11.6 9.7 12 40.1 6.1 12.8 25.1 24 12.3 5 AS2002F-04A 4 9.3 7.7 10 3.3 5.5 12 12 41.3 6.3 13.4 31.4 30 12.6 17 10.5 12.3 13.5 6.1 AS2002F-06A 6 11.6 9.7 12 43.1 6.9 AS2052F-06A 6 12.8 11.5 4.3 7.8 13 16 52 7.6 17.2 36.2 34.6 17 22.5 12 16.1 17 11.8 AS2052F

Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 3 Port Base Mounted Solenoid Valve, 3 PORT SOLENOID VALVE, 52

Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 3 Port Base Mounted Solenoid Valve, 3 PORT SOLENOID VALVE, 52

Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 3 Port Base Mounted Solenoid Valve, 3 PORT SOLENOID VALVE, 52

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Model: 40 (Standard), Bar Length: 52 (520mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 7H (ø1/4" Straight), Plug Position: w/o Plug, Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 3 (3m), Bar Bracket: B (w/Bracket 1), DIN Rail Bracket for Controller &
High-voltage