High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

AC Servo Motor Driver (Pulse input type/Positioning type ）

A A/D RS-485 I/F CN1 CN5 CN3 CN6 DI/O control Servo-on Input command pulse.

REA/REB

Auto switch model Bore size (mm) D-A9 A dimension D-M9 B dimension C dimension D dimension D-A9 D-M9 D-A9 D-M9 D-A9 D-M9 21.5 76.5 72.5 56.5 60.5 17.5 15 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7

REA/REB

B B A REC A dimension B dimension Auto switch model CX D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/F7WV D-F7BA D-F79F D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/FWV D-F7BA D-F79F CY D-F7NTL D-A73/A80 D-F7NTL D-A73/A80 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

Cylinder with Lock

D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NTL D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW A B A B A B A B A B A B A B A B A B A B 32 13.5 10.5 9.5 6.5 10 7 15 12 3.5 0.5 7.5 4.5 3.5 0.5 7 4 9 6 6.5 3.5 40 10.5 14 6.5 10 7 10.5 12 15.5 0.5 4 4.5 8 0.5 4 4 7.5 6 9.5 3.5 7 50 13 14.5 9 10.5 9.5 11 14.5 16 3 4.5 7 8.5 3 4.5 6.5 8 8.5 10 6 7.5 63 13 15.5 9 11.5 9.5 12 14.5 17 3 5.5 7

Cylinder with Lock

D-M9WV D-M9AL D-M9AVL D-F5 D-J5 D-F59F D-F5W D-J59W D-F5BAL D-A9 D-A9V D-B5 D-B64 D-P3DW D-P4DWL D-A59W D-F5NTL Bore size (mm) A B A B A B A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 10 8 4 1 6 3 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 6 4 10 8 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 8.5 7.5 12.5 11.5 6 5 3 1.5 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 12 10 16

Sine Rodless Cylinder Series REA/REB

RHC RZQ D-X Individual -X 961 Series REAS Auto Switch Proper Mounting Position (Detection at Stroke End) B A (mm) A dimension B dimension Auto switch model D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/F7WV D-F7BA D-F79F D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/FWV D-F7BA D-F79F D-F7NTL D-A73/A80 D-F7NTL D-A73/A80 Bore size (mm) 10 35 35.5 45 44.5 40.5

ZP

B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105 13-11-95 Series ZPT/ZPX How to Distinguish

Air Cylinder

AV D-Z7D-Y59D-Y7D-Y7BA D-B5A zHs Auto switch 24.5 24.5 zHt zHt B A 33 B 20 D-A3< D-G39/K39 D-A5D-A59W G1/2 (Applicable cable O.D.) 6.8 to 9.6 zHs Auto switch A 49 36 zHs B zHt zHt 56 34 B A 33 D-A3D-G39C/K39C D-G5D-G5D-G5BAL D-G59F/G5NTL A 49 36 HW B zHs Auto switch zHs

NCQ8

NCDQ8A(B)-(C)(M) (in) NCDQ8A(B)-100T(M) (025st to 100st) (in) D-A9, D-A9V Bore size D-M9(V), D-F9W(V) D-A9, D-A9V D-M9(V), D-F9W(V) D-F9BAL D-F9BAL Bore size A B HS A B HS A B HS A B HS A B HS A B HS 056 075 106 150 200 250 056 075 106 150 200 250 0.61 0.55 0.85 0.83 0.81 0.98 0.04 0.08 0.12 0.12 0.2 0.28 0.71 0.81 0.96 1.18 1.45 1.6 0.77 0.71 1 0.98 0.96 1.14 0.2 0.24 0.28 0.28 0.35 0.43

CG1

, C8 D-C73C, C80C D-C7, C8 D-H7 D-H7W D-H7F D-H7BAL D-B5, B6 D-B59W D-G5, K5 D-G5W D-K59W D-G5NTL D-G59F D-G5BAL D-B5, B6 D-G5W, K59W D-G59F D-G5BAL D-H7W D-H7F D-H7BAL D-G5 D-K5 D-G5NTL D-C73C D-C80C D-H7 D-H7C D-B59W Bore size A B A B A B A B A B A B HS HS HS 20 9 3 6 8 6.5 4.5 24.5 27 27.5 20.5 14.5 17.5 19.5 18 16 25 9 3 6 8 6.5 4.5 27 29.5 30 20.5 14.5 17.5 19.5 18 16 32 10 4 7 9 7.5

Basic type / Direct mount type Series CY3B/CY3R

Bore size (mm) D-A73/A80 D-F7NTL Electrical entry (Fetching direction) D-F7NTL Solid state auto switch Type Model Features With timer Grommet (In-line) A B A B A B With pre-wired connector is available for D-F7NTL type, too.

2 Phase Stepper Motor/Without Motor Brake Series LXS

(A contact) F9N F9P F9G F9H F9GL F9HL F9B F9NL F9PL F9BL D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL Slide screw Lead screw type N.O. (A contact) N.C. (B contact) S N.C. (B contact) Lead screw lead N.C. (B contact) A B 6mm 12mm N.C. (B contact) N.O. (A contact) N.O. (A contact) Stroke N.O.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

D-G5NT D-G5lW D-K59W D-G5BA D-G59F D-F5l D-J59 D-F59F D-F5lW D-J59W D-F5BA D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-B5l D-B64 D-A9l D-A9lV D-A59W D-F5NT D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5

NCQ8

for Stroke End Detection In-line D-A9 D-M9 D-M9W Perpendicular D-A9V D-M9V D-M9WV 056 B A B A HS HS B A B A 075, 106 HS B A B A 150, 200, 250, 300, 400 Note) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

0.4

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 one-touch fitting R R G 1/2 61.5 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

SX

. (20 stations maximum) When a longer DIN rail is desired than the specified stations, specify the station number to be required. (20 stations maximum) Terminal block mounting position Symbol Mounting position Symbol Mounting position U U side U U side A, B port size (Metric size) A, B port size (Metric size) D D side D D side Valve stations Valve stations Symbol Port size Applicable series

4/5 Port Solenoid Valve

A A A A 20.9 (DIN 22.1) (DIN 6.7) 1/8 (P, R port) 3.5 5.5 (Pitch) P = 16 18 Built-in speed controller (Station 1) (Station n) Max. 13.5 47.5 (Light/surge voltage suppressor) 52.6 [59.6] + + + 37.2 A A 18.5 5.5 24 B B (Pitch) P = 16 23 M5 x 0.8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) 85.4 77.9 52.6 [59.6] 66.6 M8 x 1 57.1 127 0.6 0.6 37.2 39.6

A

1 Drain Port 3/4 3/4, 1 D I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT

CM2

D-H7NF Auto switch D-A3A D-G39A D-K39A D-A44A D-C7 D-C80 D-C73C D-C80C D-A3A D-G39A D-K39A D-A44A model Data D-C73C D-C80C D-B5 D-B6 D-B59W D-G5NTL Bore size A 1() 1() 2(0) 7 B 0() 0() 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B B 0() 0() 1(0) 6 B 5(3) 5(3) 6(4) 11 Hs 22.5 25 28.5 32.5 A 7(5) 7(5) 8(6) 13 A Hs 25 27.5 31 35 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5