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Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket Note) The bracket is not attached.

How to Order 2 AW X2622 30 03 Option/Semi-standard: Select one each for a to d. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

(The SI unit type is provided for use in Japan.) (1) (3) (2) (1) (2) Note 1) Wall mount is not available for size 20 regulator with downward facing handle in B combination. Contact SMC when wall mount is needed. Note 2) The number inside ( ) indicates the combination order counted from the inlet side.

75 100 With fitting for purge air discharge 300 Nil H L S Select from Series IDG Flow direction (Right m Left) 500 15 300 Note) In the case of two or more options, indicate them alphabetically. 170 240 300 110 75 40 50 100 150 60 Accessory Thread type Symbol Type Symbol Type None (Standard) Nil B Rc Nil N F With bracket NPT Note) When symbol B is indicated, a bracket assembly with a part

(Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Mounting Port 1(P), 2(A) Port 3(R) Applicable pilot valve (4) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted Symbol 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 (3) (3) A M5 3(R)

supply blocking disc, LVM CHEMICAL VALVE, 2 PORT*** $8.16 Add to Quote Add To Cart Add to Cart SMC SS0700-B-R exhaust relocation block, LVM CHEMICAL VALVE, 2 PORT $6.40 +

supply blocking disc, LVM CHEMICAL VALVE, 2 PORT*** $8.16 Add to Quote Add To Cart Add to Cart SMC SS0700-B-R exhaust relocation block, LVM CHEMICAL VALVE, 2 PORT $6.40 +

(b) When the differential pressure between the IN and OUT sides is smaller than the minimum operating pressure. (c) When the effective area of the IN side piping of AQ, or the solenoid valve, is smaller than AQ. Component Parts Material/Model No.

(Maximum10 stations) Example) IITV00-05-07 2 stations 3 stations 02 03 Indicate part numbers in order starting from the first station on the D side. Note: Due to the common supply/exhaust feature, different pressure range combinations are not available. 10 stations 10 The asterisk () specifies mounting.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: S (w/Flow Adj.

Stations: 8 Stations, A, B Port: 03 (Side 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 3 Stations, A, B Port: 03 (Side 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 9 Stations, A, B Port: 03 (Side 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 7 Stations, A, B Port: 03 (Side 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 5 Stations, A, B Port: 03 (Side 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 6 Stations, A, B Port: 03 (Side 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 2 Stations, A, B Port: 03 (Side 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 3 Stations, A, B Port: 03 (Side 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: Rc

Stations: 4 Stations, A, B Port: 03 (Side 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)