Electric Slide Tables

1 !5 #1 q C B C B !4 !2 !0 !8 @1 !6 t o @3 @6 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

0.55

(A) 2 1/8 1/4 4.2 12 1 (P) 3 (R) VPA500 N.O. Base mounted Body ported (A) 2 1/4 3/8 12 P. 25 8.9 1 (P) 3 (R) VPA700 For vacuum N.C./N.O. (A) 2 3/8 1/2 15.3 12 Air operated valve 1 (P) 3 (R) VPA300 N.C. (A) 2 12 1/8 1/4 3.8 1 (P) 3 (R) N.O. (A) 2 12 VPA500 1 (P) 3 (R) 1/4 3/8 P. 30 8.8 For vacuum N.C.

10

65.5) 61 1 2 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 3 ( ): Denotes the Normally Open (N.O.) dimensions. 33 Series VX21/22/23 For Steam Can be used with heated water.

Electric Actuator

2 (ISO14644-1)!

JXCx-OMT0061CN

. . (07F0)h (07FF)h (No.63) 16 * ()No.0 (0400)h 1 0=1=ABS2=INC (0401)h 1 *1 1mm/s (0402)h 2 "(-)(+) 0.01mm 2 (0404)h 1 1 1mm/s 2 (0405)h 1 1 1mm/s (0406)h 1 *1 1% (0407)h 1 *1 1% (0408)h 1 *1 1mm/s (0409)h 1 *1 1% (040A)h 1 2 "(-)(+) 0.01mm 040Ch 2 2 "(-)(+) 0.01mm 040Eh 2 *1 0.01mm *1 31 - 10. 10.1 10.1.1 IO (Rx Ry) IO Rx00Ry00 IO [IN]() PLC Rx00Rx0F Rx10Rx1F CC-Link

Electric Actuator

1 !2 !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

1 !2 !3 !

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

4 1/4 44 16 32 10 85 15 26 54 10 10 8 M8 x 1.25 50 Up to 600 20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

JXCx-OMY0004

Caution 1.

JXCx-OMT0005CN

1. 2. 3. 4. 4 - JXCD1/ 1. / [][] 1 1.5 *3) *3)1 1 5 - 2 2.1.

JXCx-OMY0008

Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.

JXCx-OMY0006

Alarm was generated in order of (1) (5) 0-7 Alarm 1 8 8-15 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) Alarm 2 0 (1) (2) (3) (4) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) 9 (1) to (5) in the table indicates the alarm codes which are generated. Refer to "15.2. Alarm and countermeasures (P.64)" for detailed alarm information. 8-15 Alarm 4 5 Please refer to 20.

5 Port Air Operated Valve

0.76 (A)4 2(B) 1 (P) (EA)5 3(EB) 2 position double VFA1000 VFA3000 (B)2 4(A) 5(EA) 1 (P) (EB)3 Body ported Base mounted VFA3000 VFA5000 1/8 1/4 4.0 P.1498 2(B) (A)4 (EA)5 1 (P) 3(EB) Upward 3 position closed center 2(B) (A)4 VFA5000 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 1/4 3/8 8.8 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 Lateral (EA)5 1 (P) 3(EB) VFA3000 2

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA7-41-03-01. 1 set SYJA714 . 2 sets SYJ700-10-2A . 1 set (Example) SS3YJA5-40-03-01. 1 set SYJA514 . 2 sets SYJ500-10-3A . 1 set The asterisk denotes the symbol for assembly.

Cylinder with Lock

to 750 45 to 750 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 50 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 6 7 7 10 10 14 18 18 22 26 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22

New

29-1 (For Class B) VCW20-1-29-1-F (For Class H) Lead Wire Assembly for Faston Terminal (Set of 2 pcs.)

CNA

18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 25 to 500 25 to 600 32 to 600 41 to 750 45 to 750 M18 x 1.5 M8 x 1.25 56.5 M18 x 1.5 M10

CNA

1 o q $8 y $1 r #5 B A CL CL1 MLGC @3 !4 %0 !3 #9 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !

SFOD-OMT0005CN

0 () 1 2 () 3 () 4 5 6 1 7 8 9 ON 10 11 12 13 1 14 2 15 Word2/ Word Bit 0 OFF ON*1 1-7 () 2 8-9 1:ABS() 2:INC() *2 10-15 () Word3 Word Bit 3 0-15 1 1 mm/s Word4,5 Word Bit 4 0-15 () (-)(+)*3 0.01 mm 5 0-15 () Word6 Word Bit 6 0-15 1 *1 1 mm/s 2 *1 ON ONOFF PLC *2 1(ABS)2(INC) *3 20(P.83) -39- Word7 Word Bit 7 0-15 1 *1 1 mm/s 2 Word8 Word Bit 8 0-15 *1 1% Word9