Digital Flow Switch (Integrated display type)

to 92.7 4 to 186 8 to 371 Instantaneous CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Setting/Display flow range flow CO2 0.8 to 18.5 1.8 to 46.3 4 to 93 8 to 185 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Min. setting/display unit 0.1 CFM x 10-2 0.1 CFM x 10-2 1 CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x

Thermo-dryer

SV 2 (Default: 77F (25C)) Lights up or flashes when the temperature adjustment heater is operating. C1 3 AL1 4 Flashes when a control temperature error is generated.

3-Position Rotary Table

2 #2 !6 !4 @4 #3 !8 #7 #8 o #6 q #9 y i $2 @3 @2 #1 @6 #4 #5 Component Parts Note Anodized Nickel plated Chromated Note No.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(B) 2 (A) 4 (B) 2 (A) 4 Effective area (mm2) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) (B) 2 (A) 4 JIS Symbol 1 3 position pressure center 3 position pressure center (B) 2 (A) 4 (B) 2 (A) 4 3 (R) 1 (P) (Single) 0 (Fully open) (Fully closed) 1 2 3 4 5 6 7 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) How to order valve with built-in speed controller SYJ5 5 When using SYJ553 model the speed controller must be opend

MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

Slide Unit Series CX2/CXWM/CXWL

ZZ 2 x 2 x 5.2 through 2 x 2 x 9.5 counterbore depth 5 (6H7 hole pitch) depth 4 4 positions for set screws for fixing shock absorbers (M5) 2 x 2 x Rc 1/8 Plug (R 1/8) 4 x M6 x 1.0 thread depth 12 6H7 depth 8 +0.012 0 2 x Rc 1/8 Cylinder port Max. 6 2 x 2 x M6 x 1.0 thread depth 12 2 x 2 x 6H7 depth 8 +0.012 0 4 x 5.5 through 4 x 9.5 counterbore depth 5.5 2 x M10 x 1.0 Adjusting bolt 50 CX2

Slide Unit Series CX2/CXWM/CXWL

ZZ 2 x 2 x 5.2 through 2 x 2 x 9.5 counterbore depth 5 (6H7 hole pitch) depth 4 4 positions for set screws for fixing shock absorbers (M5) 2 x 2 x Rc 1/8 Plug (R 1/8) 4 x M6 x 1.0 thread depth 12 6H7 depth 8 +0.012 0 2 x Rc 1/8 Cylinder port Max. 6 2 x 2 x M6 x 1.0 thread depth 12 2 x 2 x 6H7 depth 8 +0.012 0 4 x 5.5 through 4 x 9.5 counterbore depth 5.5 2 x M10 x 1.0 Adjusting bolt 50 CX2

OMS0020

Function White Shield Black (2) Communication cable (between the branch connector and controller) i. How to order L E C C G 1 L Cable length K 0.3m L 0.5m 1 1m ii. Dimensions 39 (3) Cable between branches (between the branch connectors) i. How to order L E C C G 2 L Cable length K 0.3m L 0.5m 1 1m ii. Dimensions (4) Branch connector i. How to order L E C C G D Branch connector ii.

DOC1003626

Data display 2 displays data of the type instructed in data instruction 2 (data instruction high 4-7 bits).

CJP

Bore size H4 H6 Nil 4/For 2.5 tubing 6/For 4 tubing Without hose nipple 6 10 15 6 mm 10 mm 15 mm Refer to caution on piping on page 6-2-15.

CJP

Bore size H4 H6 Nil 4/For 2.5 tubing 6/For 4 tubing Without hose nipple 6 10 15 6 mm 10 mm 15 mm Refer to caution on piping on page 6-2-15.

Auto Switch Guide

PC Connector model M83 pin M84 pin M124 pin 1 2 1 4 Pin arrangement 1 2 Solid state switch Standard part no. 3 4 4 3 3 For the applicable auto switch model, refer to the table below.

JXCx-OMT0028CN

LEC-CGD LEC-CGD N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 LEC CN4 LEC CN4 No. No.

Brake mechanism added

(n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 65 + 30 (n 4) 2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 95 100 D-M9A 85 15 80 (n 2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 95 + 40 (n 4) 2 100 +

RQ

Basic style (Through-hole): RQB/RDQB Both ends tapped style: RQA/RDQA Double end tapped mm RA RA OA threads Bore size (mm) OA RA 32 40 50 M6 x 1.0 10 M6 x 1.0 10 M8 x 1.25 14 H thread effective depth C 2-P (Port size) 4-N through 2 x 4-OB depth of counter bore RB Approx.

Lock unit

Lock unit specifications 1-2. Stop accuracy 1-3. Precautions on model selection 2. Installation and Handing P. 8 2-1. Air supply 2-2. Design 2-3. Mounting 2-4. Operating environment 2-5. Pneumatic circuit 2-6. Adjustment and Operation 3. How to use P. 15 3-1. Usage 3-2. Lock release mechanism 4. Maintenance P. 18 4-1. Checks 4-1-1. Inspection points 4-1-2. Inspection interval 5.

ASR

4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

PSxx-OMG0001CN

(mm 0.81.0 ZS-28-C 24-26 0.14-0.2 1.01.2 ZS-28-C-1 1.21.6 ZS-28-C-2 23 0.1-0.5 1.151.35 ZS-28-CA-4 1.01.2 ZS-28-C-3 20-22 0.3-0.5 1.21.6 ZS-28-C-4 1.62.0 ZS-28-C-5 SMC 3M ZS-28-C 37104-3101-000FL 1-1473562-4 ZS-28-C-1 37104-3122-000FL ZS-28-C-2 37104-3163-000FL ZS-28-CA-4 2-1473562-4 ZS-28-C-3 37104-3124-000FL ZS-28-C-4 37104-3165-000FL ZS-28-C-5 37104-2206-000FL -12No.PS-OMG0001CN-H

Low Differential Pressure Sensor

Connector no. 1 2 3 4 Wire core color Air tubing For PSE300 (ZS-28-C) Brown (DC(+)) Not connected Blue (DC(-)) Black (OUT: 1 to 5 V) Resin pipe Part-A 1 2 3 4 Controller Handling Warning 1 2 3 4 1. Do not drop, bump, or apply excessive impact (100 m/s2) while handling.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Clean series 10 11 Relief type Vacuum suction type 10 C D B M 2 B 20 100 H N M9BW C 21 C D B M 2 B 20 100 H N M9BW C Nil Built-in magnet Number of auto switches Cylinder stroke (mm) No Nil S n 2 pcs. 1 pc. "n" pcs.