Quick Exhaust Valve Series AQ 1

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

Quick Exhaust Valve Series AQ

Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Mass (g) Model IN OUT OUT EXH AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 M5 x 0.8 2 2.8 25 1 8 4 5.8 45 1 8 25 25 110 1 4 35 40 105 1 4 40 42 215 8 3 60 70 205 1 2 105 115 690 3 4

2/3 Port Valve for Various

D 11 13 E 25 30 F 32 40 G 36 46 H 12 15 N 45 49 [ ]: Individual pressure type J 7 9 K 6.5 8.5 M 54 58 17-3-100 The VX series will be revised shortly.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

XMH-25 XMH-40 XMH-50 40 50 65 70 P.C.D 27 P.C.D 58.7 XYH/In-line type D C G C H B J E A Fn (KF flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 13 Technical Data 1 Seal Materials Available 4 Molecular flow conductance FKM (fluoro rubber) With low outgassing, low permanent-set and low

Pilot Operated

terminal: T J I Cable 6 to 12 J 19.5 H 32 19.5 (7.5) (1.6) (5.5) (A) 25 (7.5) (1.6) (5.5) 44 31.5 G 1/2 G H E OUT IN G (A) E OUT IN Bracket (67) (56) 50 C B (28) F 40 G 1/2 Bracket B C (28) 50 (56) (67) 40 F I 2 x Rc 1/4, 3/8, 1/2 2 x Rc 1/4, 3/8, 1/2 VXD2130-04 2-M5 x 8 18 (mm) Grommet Electrical entry (DC, AC/Class H coil) Model Port size P A B C D E F G H 32 34 62 64 Conduit H 54.5 56.5

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

If it is lubricated, it could lead to sticking or slipping. 0.59 M3 x 0.5 2 1.4 M4 x 0.7 2.8 M5 x 0.8 3 0.59 M3 x 0.5 545

ZSE3/ISE3

g (including 0.6 m-long lead wire) R 1/8, M5 x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Enclosure IP40 Note 1) Instant pressure supply of 0.5 MPa has no influence on the switch.

VEX1

Caution Caution When the VEX3420 air operated power valve is delivered from our factory, the M5 threaded pilot ports P1 and P2 in the cover are open and the Rc1/8 pilot port in the subplate is plugged. Before connecting pipes to P1 and P2 ports in the subplate, remove the 1/8 plug from the subplate and put M5 plugs into P1 and P2 ports in the cover.

Digital Flow Switch (Integrated display type) ( compatible)

Option Part number Remarks ZS-40-K Taptite screw for PF3W704/720 (3 x 8), 4 pcs. Bracket ZS-40-L Taptite screw for PF3W740 (3 x 8), 4 pcs. ZS-40-M Taptite screw for PF3W711 (4 x 10), 4 pcs.

2/3 Port Valve

-40F VND70D-50A VND70D-50F 7 0.7 1 1.3 3.8 5 8 12 13 0.3 1 8 1 4 18 23 70 90 140 220 3 8 0.6 15 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 1 4 1 32 18 320 32 1 2 1 28 40 500 40 2 50 43 770 50 Note 1) The companion flange is JIS B 2210 10K (Standard) or its equivalent.

FILTER REGULATOR

Panel mount dimensions Model Q S T U AW20-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AW30-B 41 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 AW40-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AW40-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AW60-B 70 66 65.8 11 13 90 3.2 Dimension:B of auto-drain and optional bowl assembly Optional D C Standard 8 6 2 6 8 C 6C J 2J 6J 8J CJ 6CJ W 6W 2 6 C 6C 2 8

KB

KBV1-M6 KBV2-M5 M5 x 0.8 M6 x 1 M5 x 0.8 M6 x 1 6 KBV2-08 KBV3-08 8 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 1 8 Branch Elbow Module: KBZ Rc Applicable tubing KBV3-10 10 Applicable tubing O.D. 4 6 KBZ2-08 8 KBZ3-10 10 KBZ3-12 12 KBZ4-12 KBV3-12 12 KBV4-12 KBV4-16 Rc 1 4 Model KBZ1-04 KBZ1-06 16 Rc 3 8 Applicable tubing Bulkhead Female Connector: KBE Female Connector Union: KBH T Connection

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

0 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 0.2 +0.5 0.2 +0.5 0.2 +0.5 0.3 +2.2 0 +2.2 0 +2.2 0 +2.5 0 MHZ2-10D 5.7 3 M3 x 0.5 M3 x 0.5 M3 x 0.5 11.2 15.2 5.7 9.7 2.5 4 +2.2 0.2 +2.2 0.2 +2.5 0.2 MHZ2-16D 7 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 14.9 20.9 6.6 12.6 11.6 2.1 4 MHZ2-20D 9 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 16.3 26.3 7.2 17.2 14 2.1 4 MHZ2-25D 6 12 M5 x 0.8 M5 x 0.8 M5 x 0.8 19.3 33.3

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Direct Operated 2 Port for

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

50 63 80 100 up to 500 30 27 60 22 44 16 13 32 10 15 51 8 42.3 56 M8 x 1.25 6 14 11 M14 x 1.5 19 27 17 84 2.5 25 146 1/4 up to 600 35 32 70 27 52 20 13 40 12 17 58 11 47.3 61 M8 x 1.25 7 18 11 M18 x 1.5 19 30 17 90 2.5 25 159 3/8 up to 600 35 32 85 27 64 20 15.5 40 10 17 58 11 54.8 68.5 M10 x 1.25 7 18 14 M18 x 1.5 19 31 17 98 4 25 170 3/8 up to 750 40 37 32 78 25 52 14 21 71 13 65.8 M12

ASD

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230F-M5-04 9.3 12.9 17.5 29.4 12 25.5 28.6 25.8 28.3 9.6 10 7.8 11.7 M5 X 0.8 8 25 22.2 6 ASD230F-M5-06 11.6 13.7 20.6 32.5 13 34.6 39.6 6 14 ASD330F-01-06S 11.6 13.7 22.9 29 38.5 36.1 31.1 14.2 11.8 10.6 R(PT)1/8 12 32.1 27.1 15.8 33.9 38.9 8 ASD330F-01-08S 15.2 18.5 28.2 31 44.8 6 ASD430F-02-06S 12.8 17 25.2 53 43.5 18 8 36.7 ASD430F-02-08S

Rotary Table

Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 Parts included 13 Gasket 1 13 Gasket 1 13 Gasket 1 13 Gasket 1 in seal kit 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 17 Wear ring 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 18 Piston seal 4 26 Seal washer 2 26 Seal washer 2 26 Seal washer 2 26 Seal washer 2 Description Size 70

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 777

Dual Speed Controller with One-touch Fitting Series ASD 1

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230F-M5-04 9.3 29.4 12 17.5 12.9 25.5 28.6 25.8 10 9.6 7.8 11.7 M5 x 0.8 28.3 8 25 22.2 6 ASD230F-M5-06 11.6 32.5 13 13.7 20.6 6 34.6 ASD330F-01-06S 14 39.6 11.6 29 13.7 38.5 22.9 36.1 31.1 11.8 14.2 10.6 R 1/8 12 32.1 27.1 15.8 8 33.9 ASD330F-01-08S 38.9 15.2 31 18.5 44.8 28.2 6 ASD430F-02-06S 12.8 53 17 43.5 25.2 18 8 ASD430F-02-08S 36.7 41.7

Ｍ agnet Gripper Unit for Collaborative Robots

at 40 mA) Current leakage 100 A or less at 24 VDC Indicator LED Red LED illuminates when turned ON.