Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B Series MY2C Series MY2H Series MY2HT (mm) D-M9, D-M9V (mm) D-M9, D-M9V (mm) D-M9, D-M9V A A A B B B Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 58 102 3.0 58 102 3.5 58 102 3.5 58 152 8.0

PFxx-OMP0001CN

L/min *7 202 202000 L/min R Rc *7 N NPT F G*1 *1IS0228 5 M SI6 *5: 501 102 202 (SI) 04 1/2 *6:L/min 06 3/4 L 1 *4 (2m) OUT1 OUT2 A NPN NPN B PNP PNP C NPN (15 V) D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD

PFxx-OMS0001CN

10~1000L/min 202 20~2000L/min *7 Rc N NPT R F G*1 1ISO228 501 102 202 04 1/2 *7 06 3/4 OUT1 OU2 *5 A NPN NPN M SI*6 B PNP PNP 5 C NPN (1~5V) SI D NPN (4~20mA) 6:L/min:L E*2 PNP (1~5V) F*2 PNP (4~20mA) 1 G*2 NPN *3 M8(3m)*4 H*2 PNP *3 2 3 N M8 *4 / ZS-40-A M8 3 m ZS-42-A PFMC7501/7102 (M352 ) ZS-42-B PFMC7202 (M352 ) -10No.PF-OMS0001CN-A M8 1 DC(+) (OUT) 2 OUT2// 3 DC(-) 4 OUT1

XLA Series

Step 6 3 Bolt b Tightening torque of bolt a Nm Tightening torque of bolt b Nm 1 2 Valve size Tightening torque Valve Tightening All sizes 0.3 size torque 4 XLA-16 0.7 -25 1.5 -40 2.5 -50 6 Bonnet assembly -63 6 -80 15 -100 20 Heater -160 102 Pilot port Bolt a Cover Body Apply 0.4MPa of air pressure to the pilot port.

XLA- ∗ -F7NJ ∗ - ∗ Series

Step 6 3 Bolt b Tightening torque of bolt a Nm 1 Tightening torque of bolt b Nm Valve size Tightening torque 2 Valve size Tightening torque 4 All sizes 0.3 XLA-16 0.7 -25 1.5 -40 2.5 -50 6 Bonnet assembly -63 6 -80 15 -100 20 Bolt a Heater Pilot port -160 102 Cover Body Apply 0.4MPa of air pressure to the pilot port.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

LEY-OM007

2AREA AREA1 2 [mm] k [mm] c [mm/s] b [mm/s] h 100 30 0 g [%] 80 INP 40 0 [%] f 170[mm] 2100[mm] AREAON 40[%] INPON 2[mm] j 1[mm] j AREA ON OFF ON INP OFF 0 10 20 30 40 50 60 70 80 90 100 [mm] 102 -26- 3 INC a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 INC 100 10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 1 INC 100 -10.00 3000 3000 0 0 0 100 10.00 20.00 0.50

JXCx-OMT0001CN

. / . 100 16.2 . 101 16.3 . 102 16.4 . 102 16.5 . 103 16.6 . 103 16.7. . 103 17. . 104 17.1 . 104 17.2 . 107 1. . 108 1.1 LEY/LEYG . 108 1.2 LEFS . 108 1.3 LES(H) . 109 1.4 LEP . 109 1.5 LEFB . 110 1.6 LER . 110 1.7 LEH . 110 -4No.JXC-OMT0001CN-C JXC93 Series 1. 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

LECP6_C

CN5I/O .23 6.1 /.23 6.2 /(NPNPNP ).23 (1) I/O (NPNPNP ).23 (2) I/O .23 63 /.24 64 I/O .27 7 .28 71 .28 72 .31 73 .33 8 .34 81 .34 82 .34 83 .35 1 .35 2 (.35 3 .35 84 .36 85 .36 9 .37 91 .37 92 .38 10 .39 101 .39 102 I/O .39 1 .39 2 .40 3 .41 4 HOLD.42 5 .42 2 - 6 .42 7 .43 11 .44 111 [5m ].44 112 [820m].44 113 [5m ].45 114 [820m] .45 115 I/O .46 116 .46 117 .47 12. .48 12.1 .48 12.2 .49 13

Step Motor Driver （ Pulse input type ）

Default setting value per actuator . 86 Appendix 1.1 LEY/LEYG series setting value . 86 Appendix 1.2 LEF series setting value . 88 Appendix 1.3 LES series setting value . 92 Appendix 1.4 LEHZ series setting value . 96 Appendix 1.5 LER series setting value . 102 Appendix 1.6 LEP series setting value . 104 4 - LECPA Series / Driver 1.Safety Instructions These safety instructions are intended

JXCx-OMT0030CN

. 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23 62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101 LED . 31 102

JXCx-OMT0002

Controller and Peripheral Devices / Specific Product Precautions . 100 16.1 Design and selection . 100 16.2 Handling Precautions . 101 16.3 Mounting . 102 16.4 Wiring . 102 16.5 Power supply . 103 16.6 Grounding . 103 16.7 Maintenance . 103 17. Troubleshooting . 104 17.1 Operation Errors . 104 17.2 Position / Speed problems . 107 Supplement 1.

XLF Series

Step 6 3 Bolt b 1 Tightening torque of bolt b Nm Valve size Tightening torque Tightening torque of bolt a Nm Tightening torque of bolt a Nm 2 4 Valve size Tightening torque Valve size Tightening torque All sizes 0.3 All sizes 0.3 XLF-16 0.7 -25 1.5 -40 2.5 -50 6 Bonnet assembly -63 6 -80 15 -100 20 Bolt a Heater Pilot port -160 102 Cover Body Apply 0.4MPa of air pressure to the pilot port

High Vacuum L Type Valve

Step 8 3 Bolt b Tightening torque of bolt b Nm Tightening torque of bolt a Nm 1 2 Valve Tightening Valve Tightening 4 Size Torque Size Torque XLD-25 1.5 All size 0.3 -40 2.5 -50 6 -63 6 Bonnet assembly -80 15 -100 20 Heater -160 102 Pilot port M Bolt a Cover Body Apply 0.2MPa of air pressure to the pilot port M (for main pumping).

XSA Series

G Face seal fitting / compression fitting Terminal part Flat terminal connector 250 Series Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Fast on: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-2S 22 55 24 63 30 8.5 20 3 8 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5 52.5 99.5 47.5 68.5 -2V 50 1/4 XSA2-2S 63 31.5 73.5 63 32.5 49.5 50 57 25.5 63 67 55 55 102

ML2B

G 2-PA (Hexagon socket head taper plug) I F B + Stroke 2-PA (Port for operating cylinder) J J J J D D 2-PB 2-PB 2-MB, Depth LB II II (Hexagon socket head taper plug) (Hexagon socket head taper plug) J J 28 32 36 G 30 37 45 J 40 46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69 84 102

Transfer

(Hexagon socket head taper plug) F I B + Stroke 2 x PA (Port for operating cylinder) J J J J D D II 2 x MB, Depth LB II 2 x PB (Hexagon socket head taper plug) 2 x PB (Hexagon socket head taper plug) JJ 28 32 36 A 110 140 170 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 G 30 37 45 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 L 45.5 54 64 M 30.9 32.4 41.5 N 16 15 19 O 69 84 102

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA Mounting base side B D +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2-M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6-M3 x 0.5 depth 4 2-M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-10 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 11-/22-MXP10-20 102

Series CQ2

(D) Q2B20075DC M18 x 215 l M18 x 225 l 215 225 C (D) Q2B180-100DC C (D) Q2B200-100DC 3 Series CQ2 Compact Cylinder Double Acting: Single Rod Dimensions (mm) Dimensions are the same with and without auto switches. 1in = 25.4mm 180 2 x 4-31.5 depth of counter bore 26 29 29 2-Rc 1/2 (port size) 40 52 52 4-19 through 162 204 4.5 3 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 102

LJ1H

The center of the stroke is aligned with the center of the clean bench. 250 730 300 620 102 103 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order Specifications Series LJ1 Dust Seal Specification (-X70) The dust seal (dust cover) prevents the entry of