SMC Corporation of America
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Search Results "VV5FS3-10-101-03"

Allowable voltage fluctuation is 10% of the rated voltage.

Air suction filter with One-touch fittings Applicable model Size Symbol Tubing size 04 ZFB100 ZFB100 ZFB200 ZFB200 ZFB300 ZFB300 10 4 Basic type Metric size Inch size 06 6 Flow (l/min (ANR)) MAX.20 MAX.50 MAX.75 Symbol 100 200 300 Tubing size Metric size JIS Symbol 08 8 Release button: Blue 10 3 16 05 101 201 301 401 ZFB101 ZFB101 ZFB201 ZFB301 ZFB401 " MAX.20 MAX.30 MAX.60 MAX.100 Metric

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMR0001CN-J 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 10 N 6 10 3 0 G1/8 F G1/8 3 0.4MPaMPa 1 11 0.4MPaMPa 2 0.2MPaMPa C Rc1/4 3 F 12 G1/4 0.2MPaMPa 4

SY SY100-77-1A 10 stations 10 P R P port SYJ M5 X 0.8 Note 1) Piping to exhaust port not possible. VK 31 Type How to Order Applicable solenoid valve (1) VZ SS3Y1 31 05 SY113-l-M3 SY113A-l-M3 SY123-l-M3 SY123A-l-M3 VT Stations 02 VT 2 stations ... ...

N1: 1/8" N3: 5/32" N7: 1/4" N5T: 10-32UNF NM: Mixed Top ported elbows are LN and bottom ported elbows are BN. 2.

Cylinder component Apply grease to the individual component, shown in the table 10. The following amount is needed per one 100 stroke cylinder. STROKE or 100mm and more Table 10. Grease apply amount 2 125 140 160 Portion to apply 100st 1517 2022 2426 50st Up 3 3 3 For grease, use lithium soap group grease JIS #2 3. Mounting seal 21 - .

.** .101 (9) TB .102 (9-1) TB . 102 (9-2) TB . 103 (9-3) TB . 103 (10) .104 3 - (10-1) . 104 6.4 .105 1.105 11. 105 2.106 21. 106 3.107 31. 107 7. /.109 8. /.110 8.1 .110 8.2 .111 8.3 .112 8.4 .113 8.5 .114 8.6 .114 9. .115 9.1 /.115 9.2 .115 9.3 .117 9.4 .117 9.5 .118 9.6 .118 9.7 .118 10. .119 .121 .121 1TB Ver1.**.121 2TB Ver2.**.123 4 - LEC-T1 Series/ (ISO/IEC)(JIS) *1) *2) *1) ISO

-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-233V B2401-V85V Valve seal 1 (2) Special AS568-233 B2401-V85 Valve seal 2 Standard B2401-P8V B2401-P10V (3) Special B2401-P8 B2401-P10 Standard AS568-043V AS568-045V External seal (4) Special AS568-043 AS568-045 Nut assembly (9) SUS304 XL1A50-10-1 XL1A80-10-1 Note 1)

Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range 100 kPa 100 kPa For vacuum/ low pressure ZSE30 101 kPa 101 kPa 1 MPa 0 For positive pressure ISE30 100 kPa (0.1 MPa) 1 MPa Rated pressure range of switch Regulating pressure range of switch 16-2-14

C.O. 1 2 1 4.1 4.2 Normally closed Normally open Double acting VNB0 VNB02 VNB03 VN 1 4 7.7 7.8 40 12 (P1) 12 (P1) 10 (P2) LVC 6.3 6.4 2 Air operated LVA 2 (B) 1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 11.4 11.5 50 10 (P2) Note) The flange should be JIS B 2210 10K (ordinary style) or its equivalent.

DC12~24V DC12~24V DC(+) DC(-) 8 / / 9 () 10 / 5m / 11 20~30 20 "-M" (kPaMPa) SI kPa,MPa ( ) "-M" 12 13 -33No.PS-OMH0005CN-D No. 14 15 () () ( ) ( ) / 16 ON ON OFF PSE530 PSE530 OFF -34No.PS-OMH0005CN-D OUT1 OUT2 80mA 5 F.S.(2.5F.S.) 2 -35No.PS-OMH0005CN-D PSE20 1 01 MPa 0-101 kPa 0101 kPa -101101 kPa -0.11 MPa 10-101 kPa -10101 kPa -101101 kPa 0.1 kPa 0.1 kPa 0.1 kPa

Static allowable moment [Nm] Note5) 10 27 46 110 Mep (Pitching) 110 10 27 46 Mey (Yawing) 207 20 52 101 Mer (Rolling) Operating temperature range [] 5 to 40 Operating humidity range [%RH] 90 or less(No condensation) Motor size 42 56.4 56.4 28 specifications Motor type Battery-less Absolute(Step motor 24VDC) Electric Encoder Battery-less Absolute encoder Rated voltage [V] 24 VDC10% Power

Electrical wiring 10 8. Maintenance 11 9. Mounting accessories (option) 12 10.

2 outputs F Digital pressure switch for vacuum SI unit only Note 10) 0 to 101 Digital pressure switch for Vacuum Unit selection function Note 9) PNP 2 outputs SI unit only Note 10) Note 1) PS port size of pump system: mm: 4 inch: 5/32" Port size of exhaust port: mm: 8 inch: 5/16" Unit selection function Note 9) NPN 2 outputs SI unit only Note 10) Digital pressure switch for vacuum with energy

-X 389 MK Series Specifications 12 16 20 25 32 40 50 63 Bore size (mm) Double acting 90 10 Clockwise, Counterclockwise Action Rotary angle Note 1) Rotary direction Note 2) Rotary stroke (mm) Clamp stroke (mm) Theoretical clamp force (N) Note 3) 7.5 9.5 15 19 10, 20, 30 10, 20, 30, 50 40 75 100 185 300 525 825 1400 Air 1.5 MPa Fluid Proof pressure Note 4) 0.1 to 0.6 MPa Operating pressure

2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121 161 241 322 402 482 536 32 12.2 IN 675 101 135 202 270 337

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82