XSA Series

G Face seal fitting / compression fitting Terminal part Flat terminal connector 250 Series Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Fast on: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-2S 22 55 24 63 30 8.5 20 3 8 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5 52.5 99.5 47.5 68.5 -2V 50 1/4 XSA2-2S 63 31.5 73.5 63 32.5 49.5 50 57 25.5 63 67 55 55 102

ML2B

G 2-PA (Hexagon socket head taper plug) I F B + Stroke 2-PA (Port for operating cylinder) J J J J D D 2-PB 2-PB 2-MB, Depth LB II II (Hexagon socket head taper plug) (Hexagon socket head taper plug) J J 28 32 36 G 30 37 45 J 40 46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69 84 102

Transfer

(Hexagon socket head taper plug) F I B + Stroke 2 x PA (Port for operating cylinder) J J J J D D II 2 x MB, Depth LB II 2 x PB (Hexagon socket head taper plug) 2 x PB (Hexagon socket head taper plug) JJ 28 32 36 A 110 140 170 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 G 30 37 45 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 L 45.5 54 64 M 30.9 32.4 41.5 N 16 15 19 O 69 84 102

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA Mounting base side B D +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2-M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6-M3 x 0.5 depth 4 2-M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-10 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 11-/22-MXP10-20 102

Series CQ2

(D) Q2B20075DC M18 x 215 l M18 x 225 l 215 225 C (D) Q2B180-100DC C (D) Q2B200-100DC 3 Series CQ2 Compact Cylinder Double Acting: Single Rod Dimensions (mm) Dimensions are the same with and without auto switches. 1in = 25.4mm 180 2 x 4-31.5 depth of counter bore 26 29 29 2-Rc 1/2 (port size) 40 52 52 4-19 through 162 204 4.5 3 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 102

LJ1H

The center of the stroke is aligned with the center of the clean bench. 250 730 300 620 102 103 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order Specifications Series LJ1 Dust Seal Specification (-X70) The dust seal (dust cover) prevents the entry of

194 mm, Width: 4 in / 102 mm, Height: 6.14 in / 156 mm, Net Weight: 5.1 lbs. / 2.3 Kg Series Configured Datasheet.

/ 189 mm, Width: 4 in / 102 mm, Height: 6.14 in / 156 mm, Net Weight: 5.1 lbs. / 2.3 Kg Series Configured Datasheet.

/ 189 mm, Width: 4 in / 102 mm, Height: 6.14 in / 156 mm, Net Weight: 5.1 lbs. / 2.3 Kg Series Configured Datasheet.

Air Slide Table Series MXP

x 1 Pilot hole diameter 5.1 320.05 30 D B 2 x M5 x 0.8 Piping port 80.05 W 13 47 4H9 0 +0.030, depth 2 J 8 5 16.5 14.5 Section AA Mounting datum level D B 4H9 0 +0.030, depth 2 QL Q Without magnet and switch rail MXP16-30B 8 2 x M2 x 0.4, depth 3 10.7 8.5 L 2 x M3 x 0.5, depth 3.5 6 x M5 x 0.8, depth 7 20 20 (mm) H J K L M MA Q QL S V W Z Model MXP16-20B 58 93 40 36 40 30 58 22 20 82 65 102

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.03 to 0.1 MPa 0.05 MPa 102 /min (ANR) Operating pressure differential range IR Recommended press. differential (3) Press. differential setting min. flow VEX 2000 5000 2000 5000 Bowl capacity between levels (cm 3) Turbine oil Class 1(With no additives

ZP

P I: M5 x 0.8 I: M6 x 1 Model A B C D E F K L Y G H G H I: M6 x 1 I: M8 x 1 Model A B C D E F K L Y G H G H ZPR40B 40 50 43 34 47.5 58.3 76.1 102 92 24.4 53 38 51.5 62.3 80.1 106 25 15 96 32.4 57 48 19 16 ZPR50B ZPR10B 10 13 12 16 25 33.9 50 71 76 5.5 15 18.5 27.5 36.4 52.5 73.5 20 25 78.5 8.7 19 13.8 7.5 5.5 ZPR13B 16 18 20 29 37.9 54 75 80 9.9 21 8.5 ZPR16B Applicable Tubing Applicable

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Female thread One-touch fitting One-touch fitting One-touch fitting Vacuum Entry Port Female thread Common Page 13-11-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible

ZR

Filter case Filter element (ZR1-FZ) Vacuum switch Gasket slot Filter gasket Filter block 13-3-18 18 Series ZR Large Size Vacuum Module: Ejector System Dimensions: ZR1-F Circuit diagram ZR1-FE Spacer A 24.5 2Slitted hole (Mounting hole)1 43 10 23 102 232 102 Indicator light (Red) ZX Vacuum pressure setting trimmer 8 28 Vacuum switch Thickness 1.2 ZR 671 571 31 Spacer A is used to leave space

Title not found

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1 6

W2M/4M

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

3

10 to 1000 L/min 202 20 to 2000 L/min Nil None A Note 8) Yes Note 8) Made to Order: Certificate in both English and Japanese Thread type Option 2 Nil Rc N NPT F G Note 1) Nil No bracket With bracket Note 7) Note 1) ISO228 compliant Port size R Symbol Port size Rated flow range 501 102 202 04 1/2 V V 06 3/4 V Note 7) Each option is not assembled with the product, but shipped together.

80

Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump

VDW30/40-XF

Note 2) For low vacuum specifications, the operating pressure range is 1 Torr (1.33 x 102 Pa) to 0.6 MPa. Please consult with SMC if using below 1 Torr (1.33 x 102 Pa). Some leakage is permitted, so avoid use in situations where a vacuum must be maintained, such as in leak testing. Note 3) The surge pressure must be under the maximum operating pressure.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Particle generation has been reduced to 1/20 compared to series 12-CY1B (previous SMC product) even without vacuum suction. 105 Particle concentration (particles/m3) 104 Class M3.5 [Class 100] 103 Class M2.5 [Class 10] Stainless steel linear guide (specially treated) 102 The specially treated linear guide achieves low particulate generation, high linearity and high precision.