SMC Corporation of America
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Note 1 Valve Rc1/2 2 Valve Rc1 Y-strainer Rc1 #40 Accessory Install either the strainer or filter. If foreign matter with a size of 20 m or more are likely to enter, install the particle filter. Filter Rc1 3 20m HRS-PF005 4 Flow meter Prepare a flow meter with an appropriate flow range. 5 Valve(Part of thermo-chiller) Rc3/4 Y-strainer Rc1/2 #40 Install either the strainer or filter.

Description Size 1 Valve Rc1/2 2 Valve Rc1 3 Y-strainer (#40) Rc1 4 Flow metter Prepare a flow metter with an appropriate flow range. 5 Valve (Part of thermo-chiller) Rc3/4 6 Y-strainer (#40) Rc1/2 3.4 Piping HRS Series 3-28 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.5 Circulating Fluid Supply 3.5.1 Automatic water fill function When clear water is used, refer to 7.1 Quality Control

ZK2-OM01301 (9) DIN rail AXT100-DR 5 Length symbols 1 to 40 L = 12.5 x # + 10.5 (#: Length symbols 1 to 40) L Dimension (When selecting the number, refer to L6 in dimension table in the Best Pneumatics No.4 catalog.)

/8, 1/2 70 156.2 25.5 35.5 38.4 40 35.5 HF2-BFD40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 16 Document No.AMX-OMZ0106 Revision history Rev.

DC (+) 1 NC 2 DC () 3 4 OUT 4 43 2-3.4 Flow direction PFA511/521/551 62 116 23 1.6 76.2 54 44 34 44.5 2-Port size 30 40 50 (43.5) 42 6 Flow direction 9 Series PFA Dimensions/Remote Type Display Unit for Air PFA3-A Panel mount type Internal circuit and wiring examples to are terminal numbers. 41.8 40.3 Sensor 4.3 40 Blue Brown Black N.C. 1 2 3 4 SMC FLOW SWITCH 5 6 7 8 OUT1 OUT2 35.8 A 40

Comparison of potential amplitude between AC type and dual AC type (Installation height of sensor: 300 mm) 40 AC type Surface potential of workpiece (V) 20 25 V or less Dual AC type IZS42 0 20 40 Time Independent Dual AC type is implemented.

Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400

PORT SIZE APPLICABLE ISO SIZE 02 1/4" 1 CODE A, B, PORT SIZE / LOCATION APPLICABLE ISO SIZE NOTES 03 3/8" 1, 2 02 1/4" SIDE ONLY 1 NO PORTS ON BOTTOM OF MANIFOLD 04 1/2" 1, 2, 3 03 3/8" SIDE ONLY 1, 2 06 3/4" 2, 3 10 1" 3 04 1/2" SIDE ONLY 1, 2, 3 02B 1/4" BOTTOM 2, 3 SIDE PORTS PLUGGED 03B 3/8" BOTTOM 1, 2 02S 1/4" SIDE 1 03S 3/8 SIDE 1, 2 BOTTOM PORTS PLUGGED HOW TO ORDER LATERAL PLUG-IN

E 3 Auto drain Additional symbol Port size 1 None With auto drain 0 Flow direction: left to right MR unit Flow direction: right to left 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR300-02 to 03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.) 8 3 standard standard standard Pressure switch 1 2 E2 E3 E4 E6 E10 None With pressure

VVQ1000 51A C8 One-touch fitting size C8 8 One-touch fitting N9 5/16 One-touch fitting (7) Sound absorbing material (2 pcs. per set) ZK2 SE2 1 A (8) DIN rail AXT100 DR 5 Length symbols 1 to 40 L = 12.5 x # + 10.5 (#: Length symbols 1 to 40) L Dimension (When selecting the number, refer to L6 in dimension table in the Best Pneumatics No.4 catalog on pages 88 to 90.)

(For details, refer to "Specific Product Precautions 1" on Page 11.) 26.5 Bushing assembly 2.7 Note) For dimensions of the cable connector, refer to single unit on page 6. 7 Compact Electro-pneumatic Regulator Series ITV0 Dimensions Manifolds 20 40 20 40 4-M3 x 0.5 thread depth 3 Mounting hole 11 11 L2 Port position L1 25 No. 9.5 9.5 z x c 1 3 5 ITV00 EXH SUP OUT ITV009 PWR PWR PWR PWR ATM

ERR ERR ERR ERR Note) Stations are counted starting from the D side. 50 56 D side U side 1 2 . stations 50 9 3 (8) 6.5 6.5 Dimensions in inch are noted in parentheses. 1 1 82 89.5 SUP, VAC port 3 3 (6, 1/4") 40 40 EXH, ATM port 25 25 (6, 1/4") 2 2 2 5 5 OUT port (4, 5/32") Breathing hole Note) 3.7 (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page 6.

(Page 11) 7 1000 fR[N] 100 Lateral load applied to rod 100 80 63 10 50 40 1 0 500 1000 1500 Cylinder stroke [mm] Fig 1. Allowable lateral load applied to rod end C a u t i o n Be certain to align the rod axis with the load and direction of movement when connecting.

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -38No.PF-OMO0004CN-E [F 2] OUT2 OUT2 (31 )(32 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] [oU2][] [2ot][] 40 41 42 43 -39No.PF-OMO0004CN-E a.

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

Applicable tubing M01 3.18/2 Barb fittings (6/4) Barb fittings 4/2.5 M02 Stations Note) The outside and inside diameters of the applicable tubing are indicated for the barb fitting. 02 03 2 stations 3 stations D side U side Station 3 2 1 20 20 stations Note) Maximum of 20 stations Electrical entry Grommet/Plug lead C How to Order Valves S070 M 5 B G 32 Port size Symbol 32 40 Connection

136.5 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 24 36.5 66.5 57 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32 40 14 Pilot EXH. 2-5.5 Mounting hole 2-1/4 3 1 Manual override (Non-locking) 9 23 VFN212N--02-D 213 19 23 Applicable heavy-duty cord O.D.6 to

Example) G36-P4-01-X30 Regulator 2 Port Solenoid Valve AR 20 E 02 1 VCA27A S 5 DL 02 4 Q Port size Thread type Voltage CE marked 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Rc NPT G Nil N F 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Throttle Option (The shape of pressure gauge) Note 2) Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock

List part numbers of the installed valve and option in required station location separately under manifold part number. 2.1-10 Series SY100 Common SUP/Common EXH 30 Type How to Order Applicable solenoid valve (1) SS3Y1 30 05 F SY113-l-M3 SY113A-l-M3 Stations 02 Applicable blank plate assembly 2 stations ... ...