3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VQZ 285.5 21 273 No.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

18 18 18 18 15 18 16 18 19 Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal Single 2 position Double Closed center 1/2 Exhaust center 3 position Pressure center 3-11-4 5 Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7Standard Specifications JIS Symbol 2 position single Valve type Fluid Metal seal

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Flat ribbon cable connector SOL.A () (+) 20 1 station SOL.B () 18 (+) SOL.A 20 19 () 16 (+) 2 stations SOL.B 18 17 () 14 (+) 16 15 SOL.A 12 () (+) 3 stations 14 13 SOL.B () (+) 10 12 11 SOL.A 8 () (+) 10 9 4 stations SOL.B () 6 (+) 8 7 Connector terminal no.

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 Size 25 32 40 50 Size 25 32 40 50 E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 L1 27 31 36 46 A1 10.5 12 14 18 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 Applicable pin no. CD-MU02 CD-MU03 CD-MU04 CD-MU05 Part no.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

Cotter pin size C type, 9 for shaft C type, 9 for shaft 3 x 18l 3 x 18l Size Tolerance -0.013 -0.035 -0.013 -0.035 -0.016 -0.043 -0.016 -0.043 AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 3.2 3.2 4 4 10 10 12 12 +0.058 0 +0.2 +0.1 Y-02 14 5 20 18 M8 x 1.25 36 16 9 3.2 x 16l 20 CDP-1 9 +0.058 0 +0.2 +0.1 Y-03 14 5 20 18 M10 x 1.25 38 18 9 25 CDP-1 9 4 x 20l

Compact Cylinder with Air Cushion and Lock Series RLQ

Normally closed type (NC = b contact) solid state auto switches are also available (D-F9G, F9H). 18

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

B A B A 0.6 P R R P R R Pilot pressure MPa Pilot pressure range SS5YJ3-41-03-M5T SYJA3140 SYJA3240 SYJ3000-21-2A 0.5 3 Position pressure center 3 Position pressure center 1pc. 1pc. 1pc. 1pc. 0.4 B A B A 0.3 P R R P R 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure MPa 18 18 18 18 18 18 Air Pilot Drawings Series SYJ3000 (mm) Body Ported Type / Dimensions Base Mounted Type / Dimensions

Series VQ Base Mounted Metal Seal/Rubber Seal

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Stroke Reading Cylinder and Counter

x 1 4 x M6 x 1.0 depth 6.5 (Bottom 5.3 through-hole) 9.5 counterbore depth 5.5 (500 or 3000) 25 70 1.5 5 Width across flats 13 7 5 10 22f8 10f7 6 53 35.6 23 36 23 SR6 40 18 3 23 M8 x 1.25 70 36 18 7 2 x M5 x 0.8 4 x M5 x 0.8 74 20 (Port size) Thread depth 10 114 + Stroke 31 145 + Stroke 2 D-X 653 CEP1 Series Dimensions: 20 4 x 5.5 Foot type: + 0.05 + 0.02 4 (Positioning pin hole) CEP1L20

•

NSR 18 Piston seal NBR 20 Tube gasket NSA ,-External dimensions are the same as the CS2 standard type. Refer to pages 7 to 10.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

MLU

I-MU02 I-MU03 I-MU04 I-MU05 CNS E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 A1 10.5 12 14 18 L1 27 31 36 46 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 Size 25 32 40 50 Size 25 32 40 50 +0.058 0 +0.058 0 +0.058 0 +0.070 0 CLS CLQ Applicable pin no.

RLQ

YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

Air Cylinder

1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11

Thermo-chiller/Rack Mount Type

For pipe thread type N, an NPT thread conversion fitting set is included. 18 Not included for Option Z (Removed parts) 19 Not included for Options Z and Z1 (Removed parts) 18 HRR Series Specifications: 200 to 230 VAC Water-cooled Refrigeration Model HRR050-W-20-(DM)U(YZ) Cooling method Water-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge [kg] 0.59 Control method PID control

HRX-OM-Y098

Alarms that allow continuous pump operation are shown in Table 5.4-18 Alarms that allow continuous pump operation (1/2) and Table 5.4-19 Alarms that allow continuous pump operation (2/2).

MGP

MGPS50 50 11 12 A 13 B 14 1 2 3 4 5 50 80 7 8 9 A 10 B 15 16 6 17 NBR 18 NBR 19 A NBR 20 B NBR / (mm) 50 MGP50-PS 19 18 17 80 MG80-PS 20 17 20 GR-S-010(10g 18 18. 18-1.

10

Bore size [mm] B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 Bore size [mm] Z MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 154 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 158 10+0.058 0 32 160 40 164 50 190 63 190 80 238 100 238 125 279 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 182 14+0.070 0 MB-B08 80 95 73 64

MHZ

Normally closed Normally open MHZL2-16S 16 12 27 145 MHW MHZL2-20S 20 18 33 290 Single MHZL2-25S 25 22 50 515 MRHQ 13 acting MHZL2-10C 10 8 70 38 MHZL2-16C 16 12 140 Single acting, Normally closed Misc. 57 MHZL2-20C 20 18 290 85 MHZL2-25C 25 22 515 DNote 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

Magnetically Coupled Rodless Cylinder

Refer to page 18 for auto switch circuit diagrams.