[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.

10

D-X 893

Self-seal Fittings Series KC

(mm) Nylon Urethane Effective orifice(mm 2) Weight (g) L A D M Part No. d KCH04-99 KCH06-99 KCH08-99 KCH10-99 KCH12-99 4 6 8 10 12 5 8 11 18 24 5.6 5.6 13.1 13.1 26.1 18.0 41.5 29.5 58.3 46.1 40.6 43.1 46.7 52.6 54.9 22.6 24.1 25.2 28.6 29.4 9.8 11.8 14 17 19 16 17 18.5 21 22 4 6 8 10 12 Note) D: max. diameter 77

Booster Regulator/Air Tank

Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Grade 2 Grade 2 Rubber stopper Grade 4 Grade 4 Metal stopper Auto switches / Proper mounting position for stroke end detection 11-/22MXP6 A A C D D B Reed switch D-A93 Solid state switch D-M9B, D-M9N Stroke (mm) Auto switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP 6

MXU

Minimum Stroke for Auto Switch Mounting (mm) Applicable auto switch model No. of auto switches mounted D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV 1 pc. 5 5 5 2 pcs. 10 10 5 Auto switch model Bore size (mm) Operating Range 6 5 10 6 16 9 D-A9/A9V 3 (2) 3.5 (2) 5.5 (3) D-M9/M9V D-F9W/F9WV Since this is a guideline including hysteresis, not meant to be guaranteed.

MXU

D-A9V D-M9V D-F9WV ( ): Denotes the values of D-M9V, D-F9WV.

Series KC Self-seal Fittings

Nylon Urethane D1 d M D2 L1 L2 A KCL04-99 KCL06-99 KCL08-99 KCL10-99 KCL12-99 4 6 8 10 12 7 8 12 25 30 4.2 4.2 11.4 11.4 21.6 14.9 35.2 25.0 50.2 39.7 4 6 8 10 12 16 17 18.5 21 22 22.6 24.1 25.2 28.6 29.4 10.4 12.8 15.2 18.5 20.9 10 10 12 17 17 18 20 23 26.5 28.5 34.3 36.5 40.3 44.3 46.8 Note) D1, D2: max. diameter 78 Series KB Piping Module plug: KBP Elbow module: KBV Female connector:

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

VNC

N.C. 12 (P2) 12 (P1) 12 (P1) 12 (P1) VX2 VX (1) (2) (1) (2) (1) (2) (1) (2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN LVC Wide selection of port size and variations LVA LVH Threaded type (6A to 50A) Flange type (32F to 80F) LVD LVQ LQ LVN Low water

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AMC520 12 16 55 Note 1) On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.

CEx-OMI0064

), NPN () CEU5 OUT (5m ) CEU5B COM (DC30V ) CEU5-D CEU5B-D PNP () CEU5P (5m ) OUT CEU5PB (DC30V ) COM CEU5P-D CEU5PB-D 6-5 RS-232C :EIA RS-232C RS-232C RS-232C S D R D S G LT1181 F G LT1181 R S C S D R E R 11 - 6-6 , (1)CEU5 ,CE1-R** (2),,,5m (3), (4), (5)CEU5 (6), (7)CEU5 ,10cm (8)EMC (2004/108/EC),DC24V (CEU5**-D)(CE1 ) (CEP1 ) 12 - 7 7-1 CEU5 3 ,8 7-1-1 ,,() (ON )

PSxx-OMU0002CN

12 2 -54No.PS-OMU0002CN-D [F96] FUNC <> [F96] 2 [F96] -55No.PS-OMU0002CN-D [F97] () 10 <> FUNC RSTV[F 5]FUNC(39) <> [F97] [on]() [onL]() [oFF]() -56No.PS-OMU0002CN-D () () 1 () 1 [F97] [Er13] 1 FUNCAout FUNCAout -57No.PS-OMU0002CN-D [F98] / <> [F98] () () [F]() OUT1 OUT1 [n]( ) OUT1 OFF ON OUT2 -58No.PS-OMU0002CN-D OUT2 OUT2 [n]( ) OFF ON []() 2 [F98] 2 -59No.PS-OMU0002CN-D

1

M2 20-CM2 Standard type 20-CM2A Standard with air cushion type 20-CM2W Double rod type 20-CM2K Non-rotating rod type 20-CM2R Direct mount type 20-CBM2 End lock type Air cylinder Series M(D)B 20-M(D)B Standard type 20-M(D)BW Double rod type End lock type 20-M(D)BB 6-18-2 3 Copper-free Air Cylinders Air Cylinders Bore size (mm) Series Application 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

side traveling parallelism to B side C side w LEKFS25 0.04 0.02 LEKFS32 0.04 0.02 LEKFS40 0.04 0.02 D side * Traveling parallelism does not include the mounting surface accuracy.

VK3000

(Values at the initial period) Dustproof VZS VFS VS4 VQ7 Solenoid Specifications EVS Base mounted Grommet (G), DIN terminal (D) 100, 110, 200, 220, 240 6, 12, 24, 48 10% of rated voltage 9.5 VA/50 Hz, 8 VA/60 Hz 7 VA/50 Hz, 5 VA/60 Hz Electrical entry VFN AC DC Rated voltage (V) Allowable voltage fluctuation Inrush Holding Apparent power (AC) Body ported Diode (12 VDC or less: Varistor) Varistor

Thermo-con/Rack Mount Type

Communication connector D-sub 9 pin (socket) Holding screw: M2.6 6 Contact a for output cutoff alarm (open when alarm occurs) 7 Common for output cutoff alarm 9 15 10 11 12 13 14 Pin no.

PC Wiring System Series PCW

16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 1 1 2 3 4 CN0 1

Rotary Table

Recommended tightening torque Auto switch model Recommended tightening torque [Nm] D-M9 0.05 to 0.15 D-M9A (Water resistant) 0.05 to 0.10 Fig. 8 D-F8 0.10 to 0.20 Set screw Auto switch 29 - Auto switch proper mounting position at rotation end Table 11 Auto Switch Rotation range / Actuation / most sensitive position A A A A B B B B D-M9 D-F8 Magnet Operation range at optimum set position (

80

D 200 VAC 1.0 1 Size 1 (VDW1) 4 One-touch fitting 1.6 E 230 VAC 1.0 Z Other voltages Brass M5 1.6 1.0 Stainless steel M5 For other special options, refer to page 462. 1.6 A B C D E F G H J 1.6 48 VAC M5 2.3 220 VAC Special voltage 3.2 240 VAC Resin (PPS) (With bracket) 1.6 24 VAC 4 One-touch fitting 2.3 12 VDC 3.2 Deionized water (Seal material: FKM) 1.6 Oil-free VCH 6 One-touch fitting 2.3