View A 1 2 3 4 5 6 7 8 Analog output 1 to 5VDC 8 7 6 5 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Max. measured flow rate value Real-time flow rate [l/min] Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Standard condition Standard condition Basic condition Basic condition Minimum measured Maximum measured
or higher +100 V to +400 V +30 V to +100 V Within 30 V 30 V to 100 V 100 V to 400 V 400 V or lower Light ON Positive Static neutralization completion Flash at 4 Hz Detects the electric potential difference and outputs in an analog voltage.
Volume of Release Air Tank: V2: 0.8 cm³ (See Catalog for Calculation), Stations: 4 Stations, Voltage: 5 (24 VDC), Electrical Entry: L Plug Connector, Blanking Plate: B2 (2 Sets)
Name plate and pressure gauge in imperial units: psi *6 *6 *6 *6 *6 Z*4 Name plate and pressure gauge in imperial units: psi *5 *5 *5 *5 *5 *5 *1 Options B, G, H are not assembled and supplied loose at the time of shipment. *2 Assembly of a bracket and set nuts (AR25-B to AR40-B) Including 2 mounting screws for the AR50-B and AR60-B *3 Mounting thread for pressure gauge: 1/8, Pressure gauge
Panel mount E Lead wire length 3m L Panel mount + Front protection cover Analog output Suitable model: ZSE50F/ISE50--22/62(L)-(M) F Series ISE50 Series ZSE50F Analog output value (V) Analog output value (V) 5 5 1 1 Unit specification 1.0MPa 0 100kPa 100kPa Note 1) With unit switching function Nil M Note 2) Fixed SI unit Pressure Pressure Note 1) Under the New Measurement Law, which has been
Panel mount E Lead wire length 3m L Panel mount + Front protection cover Analog output Suitable model: ZSE50F/ISE50--22/62(L)-(M) F Series ISE50 Series ZSE50F Analog output value (V) Analog output value (V) 5 5 1 1 Unit specification 1.0MPa 0 100kPa 100kPa Note 1) Nil M With unit switching function Note 2) Fixed SI unit Pressure Pressure Note 1) Under the New Measurement Law, which has been
Electrical entry Nil L Grommet (0.6 m) (5) Digital vacuum switch unit Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector L L plug connector Voltage 21 C 0X ZSE3 D 1 3 100 VAC 50/60 Hz 110 VAC 50/60 Hz 5 24 VDC 6 12 VDC V 6 VDC S 5 VDC R 3 VDC Applicable to plug connector. (Connector assembly with rectifier is attached.)
D-Y7NW(V)/Y7PW(V)/Y7BW(V) D-Y7BAL BU-1 BU-1 BU-1 BU-1 A B A B
center (A) 4 (B) 2 5 5 (EA) 3 (EB) 1 (P) Rated voltage DC specifications 24VDC 12VDC 6VDC 5VDC 3VDC 5 6 V S R Light/Surge voltage suppressor Electrical entry G, H, L or M Electrical entry D (SY5000/7000 only) Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor Without light/surge voltage suppressor Nil S Z R U Nil S Z AC specifications
Relay, PLC 12 V Yes Yes 24 V (B54) B54 100 V, 200 V 2-wire C73C 12 V Diagnostic indication (2-color indication) PLC (B59W) B59W Grommet G79 K79 K79C 3-wire (NPN) H7A1 H7A2 H7B H7C H7NW H7PW H7BW G59 G5P K59 5 V, 12 V IC circuit Grommet 3-wire (PNP) 12 V 2-wire Connector 3-wire (NPN) G59W G5PW K59W 5 V, 12 V Relay, PLC IC circuit Diagnostic indication (2-color indication) 24 V 3-wire
Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with
(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21
(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21
All Bases: 02= 1/4" NPTF| 03 = 3/8'NP'F. lExternal pilol type order SPF02 i'R-" 5 Port Pilot Type/Rubber Seal Series NVFR4000 Plug-in Type, Non Plug'in Type Symbol 3 position (Additional func{ons achieved by using extemal pilot option).
All Bases: 02= 1/4" NPTF| 03 = 3/8'NP'F. lExternal pilol type order SPF02 i'R-" 5 Port Pilot Type/Rubber Seal Series NVFR4000 Plug-in Type, Non Plug'in Type Symbol 3 position (Additional func{ons achieved by using extemal pilot option).
dE, Lr MM R, v, dND NX NZ 0 4 7 + 0 0 0 3 1 0 6 M 1 8 x 1 5 2 3 6 1 0 6 1 1 0 1 5 0 v v v + 0 m 3 q (16j3i) 50mfr Y-O5A (38) (27) ( 1 2 + 0 0 7 0 ) (1 5) (27] (60) (28) 0 6 3 o 0 1 2 o @39 3ir ( 1 6 1 5 0 0 4 7 + 0 0 0 3 1 0 6 1 1 0 M 1 8 x 1 5 0.59 1 0 6 236 63mr Y-O5A (27\ (28) (1 5) (27\ ( 1 2 + 0 0 7 0 ) (38) (60) 0 6 3 a o 1 2 0 @39 M22x1 5 o75 1 1 0 0 7 1 + 0 0 0 3 2 1 7 1 4 6 1 4 2
Note 5) Do not use the V-band type for gases. FGES/FGEL type (V-band type) FGET type (Bolt tightening type) Suitable for medium flow rate, low pressure filtration. Element replacement is easy with the V-band type.
ARP30-02BG-3 1.4 L/min (ANR) or less (at P2 = 0.6 MPa) Pressure port size Note 3) 1/8 1/4 1/8 5 to 60C (No freezing) Ambient and fluid temperature With digital pressure switch 5 to 50C (No freezing) Ex.)
ARP30-02BG-3 1.4 L/min (ANR) or less (at P2 = 0.6 MPa) Pressure port size Note 3) 1/8 1/4 1/8 5 to 60C (No freezing) Ambient and fluid temperature With digital pressure switch 5 to 50C (No freezing) Ex.)