1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

Series VCL

Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note) Note) For the special voltages, please consult with SMC. 4-14-33 Base Mounted 34 Series VQZ100/200/300 How to Order Manifold: VQZ200/300 VV3QZ 2 5 08 C6 C D Series Option 2 3 VQZ200 VQZ300 Nil None DIN rail mounting style (With DIN rail in standard length) DIN rail mounting style (Without DIN rail ) External pilot specifications D DO R Note) Manifold Note) Order DIN rail separately.

EXxx-OMN0037CN

DC24 V D/A DC24 V 3 34 0 V 0 V 4 5 FE FE 5 FE FE 100 k 250 1 k 600 IP67 -34No.EX-OMN0037CN-A 0V 2 EX600 4 (-)2 (+) 4 3 4 -35No.EX-OMN0037CN-A LED LED OFF OFF 0 1 () () (SI ) -36No.EX-OMN0037CN-A EX600-AMB M12 (5 ) 1 2 (1 /) () DC24 V Class22 A 0.5 A/ 12 bit 010 V15 V05 V 020 mA420 mA 15 V 40 mA 100 k 250 (25 ) 0.05 F.S. (25 ) 0.15 F.S. (25 ) 0.5F.S. 0.6F.S.

53

Circuit diagram Contact input signal 2 4 1 k 11 Run/stop signal input Contact input signal 1 4.7 k 3 1 k Internal circuit 10 Alarm status signal output Contact output signal 3 2 9 Remote status signal output Contact output signal 2 1 8 Operation status signal output Contact output signal 1 0 * The pin numbers and output signals can be set by user.

Electric Actuators

24 66 to 400 104 110 LJ1H102NH-K 28 70 to 400 LJ1H202PA-K 34 76 to 500 106 112 LJ1H202NA-K 38 80 to 500 LJ1H102PB-K 26 68 to 600 145 104 110 LJ1H102NB-K 30 72 to 600 LJ1H202PF-K 32 74 to 250 106 112 LJ1H202NF-K 36 78 to 250 LJ1H303PA-K 40 82 to 500 108 114 LJ1H303NA-K 42 84 to 500 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Deflection 100 200 300

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Flat finger [3] 4 x MM thread depth L Thread for mounting attachment K J A A D G B D B K J F C S W O (mm) Weight (g) F G Open Closed 2 2.5 3 4 L MM J K D C B Model A W MHZ2-10D3 1), 2) 11221122112211220 -0.05 0 -0.05 0 -0.05 0 -0.05 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.5 +0.3 +0.025 0 +0.025 0 +0.025 0 +0.030 0 +2.2 0 +2.2 0 +2.3 0 +2.5 0 60 125 250 450 5 6 8 10 M2.5 x 0.45 M3 x 0.5 M4 x 0.7

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Instantaneous flow: L/min cfm Accumulated flow: L ft3 L3 IO-Link/ NPN/PNP Analog 1 to 5 V Analog 0 to 10 V*3 ZS-33-D ZS-33-F L4 IO-Link/ NPN/PNP Analog 4 to 20 mA + ZS-33-D *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Note) Note) For the special voltages, please consult with SMC. 4-14-11 Body Ported 12 Series VQZ100/200/300 How to Order Manifold: VQZ200/300 VV3QZ 2 2 08 C D Series Option 2 3 VQZ200 VQZ300 Nil None DIN rail mounting style (With DIN rail in standard length) DIN rail mounting style (Without DIN rail ) D DO Note) Note) Order DIN rail separately.

70pvvna

170 28.3 33.3 LVH Port size 32A, 40A, 50A LVD LVQ Applicable cable O.D. 6 to 8 (D, DL) LQ LVN K (Terminal with indicator light: DL) TI/ TIL Manual override (Non-locking) Pilot port L (Conduit terminal: T) PA J (DIN terminal: D) I (Conduit: C) H (Grommet: G) PAX G (Air operated) PB Main port Main port Rc Pilot port Rc A B C D E F G H I J K L M Model VNA5-32A VNA6-40A VNA7-50A 1 8 1 4 1 4 1

LEF-OM006xx

AREA ON 12 INC ABS() No.1 10 22 AREA k INP(IN )ON INP INP ON :LEFS: 0.50,LEFB: 1 No.1 0+0.5 = 0.5 INP -22- IN INPAREA a b c d e f g h i j k No.0 0[mm] 100[mm] )AREA )AREA AREA1 2) No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 100 100.00 3000 3000 0 0 0 100 80.00 90.00 0.50 100[mm]-0.5[mm]=99.5[mm] INPON [mm] c 100 0 [mm/s] b ON OFF INP INP [mm] k 100.5 99.5 0 10 20 30

NCM-A

W 0.50 2-ZD NE ZC MM E N KK UNF-2A N B -0.003 0.000 PILOT YC WA WB D ACROSS FLATS Y NN MOUNTING NUT Bore MM KK A B D E K N 075 (3/4") 0.250 1/4-28 0.50 0.624 0.86 0.75 106 (1 1/16") 0.312 5/16-24 0.50 0.624 0.25 1.12 0.12 0.88 150 (1 1/2") 0.437 7/16-20 0.75 0.749 0.38 1.56 0.25 1.25 200 (2") 0.625 1/2-20 0.88 1.374 0.50 2.06 0.38 1.75 WC CUSHION NEEDLE (HEX 1.5MM) NE NN W WA WB WC Y YC ZB

PSE550/300

Range Rated differential pressure range 1 4 For low differential pressure 0 to 2 kPa 2 kPa 0 A C B D Pressure Differential pressure Pressure Differential pressure A C B D 16-3-37 6 Series PSE300 Internal Circuit PSE300 NPN open collector output (2 outputs), Max. 30 V or 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k PSE303 PNP open collector output

Brake mechanism added

Auto Switch Mounting Height (mm) D-B5 D-B64 D-B59W D-G5 D-K59 D-G5NT D-G5W D-K59W D-G5BA D-G59F Auto switch model D-F5 D-J59 D-F5W D-J59W D-F5BA D-F59F D-F5NT D-Z7 D-Z80 D-Y59 D-Y7P D-Y7BA D-Y7W D-A9 D-M9 D-M9W D-M9A D-A3C D-G39C D-K39C D-A44C D-A9V D-M9V D-M9WV D-M9AV D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-Y69 D-Y7PV D-Y7WV Bore size (mm) Ht Hs 40 50 63 80 100 Hw Hs Ht Hs Ht Hs Ht Hs

Air Cylinder Series MB

Auto Switch Mounting Height (mm) D-Z7, Z-80 D-Y59 D-Y7P D-Y7W D-F5, D-J5 D-F5F D-F5W, D-J59W D-F5BAL, D-F5NTL D-A5 D-A6 D-A59W D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV Bore size D-Y7BAL D-A44 D-P5DWL (mm) Ht Hs Ht Hs Hs Hs Hs Hs Hs Hs Ht Ht Ht Ht Ht Ht 32 24.5 35 25 32.5 25.5 77 38 67 26.5 30 23 27.5 31 27.5 23 23 40 27.5 38.5 27.5 36.5 29.5 81.5 42 71.5 30 34 26 27.5 33 27.5 26 26 50 34.5 43.5

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Minimum Strokes for Auto Switch Mounting Hydraulic Fluid Compatibility (mm) D-A7 D-A80 D-A73C D-A80C D-A7H D-A80H D-A9 D-A9V Hydraulic fluid Compatibility D-F9W D-F9WV D-F7W D-F7WV D-J79W D-F9BAL D-F7BAVL D-F7V D-J79C D-F9 D-F9V Standard mineral hydraulic fluid Compatible No. of auto switches W/O hydraulic fluid Compatible D-F7BAL D-F7NTL D-F79F D-F7 D-J79 D-F7LF D-A79W O/W hydraulic fluid

CU

(V), D-A93(V), D-A96(V) Specifications D-A96 D-A90 In-line D-A90V D-A93 In-line D-A93V In-line D-A96V Auto switch part no.

I

R E D L E A D W I R E Connect with blue (+) side of the direct current to actuate the switch. W H I T E L E A D W I R E Connect with the inout terminal of the sequence controller or the DC relay or other load since this is the switch output. B L A C K L E A D W I R E Connects with minus (-) side of the direct current to actuate the switch.