MY1

Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Stability of suction position,

ZP3EA-P2 [Weight: 7.6 g] 10.3 27.4 10.3 20.3 R R 20 20 2.9 4.9 2.9 4.9 R R R R R R 23.5 19.5 31.6 26.5 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-P3 [Weight: 17.7 g] Part no. ZP3EA-P4 [Weight: 31.1 g] 16.3 34.5 16.3 43.6 R R 4.9 7.9 4.9 7.9 15 15 R R R R R R R 50.5 41 39.8 32 Applicable pad part no.

Electric Actuator

Left Right Nil S R Without cable Standard cable 2 Robotic cable (Flexible cable) R: Right 1 The standard cable should be used on fixed parts.

Electric Slide Tables

R L R L R L R L LE-D-1-1 LE-D-1-2 LE-D-1-3 LE-D-1-4 Lead screw pulley Motor pulley Spacer Origin stopper Bearing Belt Guide unit GR-S-010 (10 g) GR-S-020 (20 g) 13 Electric Slide Table/Compact Type Series LES Model Selection Specific Product Precautions Construction: In-line Motor Type/D Type @1 @3 @2 e u o !8 !1 r y !

Aluminum High Vacuum Angle Valve

steel 304) Body y (Material: A6063) w Valve seal (Maintenance part) r S Valve seat assembly (Maintenance parts) S Valve i (Material: Stainless steel 304) (Material: Stainless steel 304 + Sealant) Plate Valve side exhaust Port 3(R) (Exhaust port) Refer to the back of page 465 for Maintenance Parts.

Magnetically Coupled Rodless Cylinder

Reduced outgassing o u Resin materials eliminated Laser marking is employed for the model designation. d t g e a c 2 s u s d i e Reduction of outgassing due to surface treatment n o u d t R g g e a c 1 s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

KJ

How to Order KKH 4 S 02 M S Body size With seal (male thread) 3 4 1/8 1/4 Connection type Type Male thread Female thread With nut fitting Symbol M F N Socket S Socket/Plug designation Piping port size variations Male/Female thread type Nut fitting type Connection port size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 Hose I.D.

Title not found

.O (r) aol O Gl ,9 .rO ";p:* Stroke Variations Long strokes up to 400mm standardized. a.l)compact guide cytinder QlBore size @pon typ. l t t t l t t t l l 7 5 _ _ t t t t t t t t t l l t t t l t t t l l t t r t t t t t t l r t t t t t t t t l 1't5 l t t t t r r r r l r t t t r r t t l l z a n * For bore s zes 12 & 16 onyM5x0SisavailaHe Befer to lable al eft for delats Ocylinder stroke (mm

PFxx-OMX0002

Security code 1 R/W 2410 0x096A PinCode (Security code setting) Setting range 0x0 to 0x03E7 (0 to 999) 2 R/W U16 0 Y Line name 1st letter U8 0 Y 11 seg 1 R/W 2 R/W Line name 2nd letter U8 0 Y 7seg 3 R/W Line name 3rd letter U8 0 Y 7seg Lower level screen 4 R/W Line name 4th letter U8 0 Y 7seg Refer to "Line name: communication data".

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

1.28(32 s) 1/8NPTF 3n ports ' ~r ~o ~ ED., ~ (9.,0 t B P A Ie. ' ..

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6

Rotary Actuator/Vane Type

E 20 180 S Z CRB2 u CDRB2 B W 20 180 S Z L M9B With auto switch q r e !

SX

S 5 VDC R 3 VDC 1-6-55 56 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x

5 Port Solenoid Valve

Side P: 1/2 R: 1/2 (Rc, G, NPT/NPTF) ( T kit 1 to 10 stations) VQC5m00-51 T kit: Terminal block box VQC5000 VV5QC51-mmm U side S kit: Serial transmission VQC5m01-51 ( 1 to 12 stations: EX500, EX600) S kit P: 3/8 R: 3/8 (Rc, G, NPT/NPTF) L kit: Lead wire 1 to 12 stations: EX250, EX260 Bottom 1/2 (Rc, G, NPT/NPTF) M kit: Circular connector Note 1) One-touch fittings in inch sizes are also available

CJ2

Example Rail mounting style CDJ2B16-60S-A CJ2 L S 16 45 R Without auto switch Band mounting style CDJ2B10-45S-B For rail mounting style, screws and nuts for 2 pcs. switches come with the rail. CDJ2 L S 16 45 J79W R With auto switch Number of auto switches Built-in magnet Nil S n 2 pcs. 1 pc. n pcs. Auto switch For the applicable auto switch model, refer to the table below.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f

o

-17-1 U#r q49 S and Z notavailable tor grommel. 11oVAC includes S oplion {do not specily).

o

-17-1 U#r q49 S and Z notavailable tor grommel. 11oVAC includes S oplion {do not specily).

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

-17-1 U#r q49 S and Z notavailable tor grommel. 11oVAC includes S oplion {do not specily).

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet 8 N S U F GN GS 3 6 10 15 20 8 U2 6.5 0.9 M-5AU-2 ZP3 Y 04 06 08 B J JB K Vacuum inlet: One-touch fitting U4 8.5 1.8 M-5AU-4 Applicable tubing O.D.