IDX-OM-W014 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP
x T Mounting hole for hexagon socket head cap screw Air port size Rc CC CC Oil draining hole Rc 1/4 Oil port size Rc (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL H NL P QB QL S T W CCT639.5 11 0 30 86 3 28 45 53 88 86 64 88 104 3/4 3/8 CCT1007 13 2 32 120 5 33 65 61 123 116 92 125 139 1 1/2 CCT1607 20 2 46 185 0 29 93 60 183 180 144 185 202.5 1 1/4 3/4 L Dimension (mm) 700
Description AMP320 AMP420 AMP220 AMP-EL420 AMP-EL320 AMP-EL220 Element assembly With O-ring 4 Note) The first and second elements are integrated, and cannot be replaced separately. 2 Exhaust Cleaner for Clean Rooms Series AMP Dimensions N Optional specifications O T: With element service indicator P R Q S SMC M D IN C Bracket (accessory) G L J I H K B A IN Bracket mounting hole F Applicable
Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.
4-OB counter bore depth OL B-NN depth NL XX section Z WA Q 45 RA X0.02 RB RC T VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J G (Plug) 30 S PA + Stroke C + Stroke FA FB SB SA FC B + Stroke A + Stroke AA + Stroke 60 Turntable angle detection switch 2-P E (mm) Bore size (mm) FB FC G GA GB GC H HA HB J K L MM ML NN NL OA B C DA FA Standard
L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-
Description AMP320 AMP220 AMP420 AMP-EL220 AMP-EL320 AMP-EL420 Element assembly With O-ring 4 Note) The first and second elements are integrated, and cannot be replaced separately. 4 Exhaust Cleaner for Clean Rooms Series AMP Dimensions (mm) 1in = 25.4mm N Optional specifications O T: With element service indicator P R Q S SMC M D IN C Bracket (accessory) G L J I H K B A IN Bracket mounting
1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8 1/2 3/4 1 4 Note) Does not conform to ISO1179-1. 886 Series VEF/VEP Electro-Pneumatic
ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.
dimensions Port size Rc VS A Model B C D E F G H J K L M N P U T S R VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16
4 SYJ514 With valve Supply valve (N.C.) !5 SYJ514 With valve Release valve (N.C.) !
A B c D E F H K lil N P O (Ihpth) Tol{ances Tolerances NCDBBlBWlO 1 . 1 4 0.750.98 !.
ltil q{ry 30 (1 3/16) RailTyps DA7 o NCDBA!8363C.A5 & @l w Gommd DA8 ,n e), s63 121t2) 00 {3 1/8), 0100 (a) HailTyp DA5 O D-46 o : Available, X: Nol avilad NCDRAIBW3o-O-A7 Re e d Sw ilc h Spe c ific atio ns [od6l I}472 D{72H tra?t. BATTI D Tdl sr80 , &ttdr &r51 tr56 trt6,w D-lft Rday, Seqlericer lC CircLiil Applc.ton Rlay, Sequenc6r tc Cir!
Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm
118 G1/2 42.9 38 109 18 74 36.5 31.6 [mm] Bore size Stroke range H KC KK L3 L8 L9 L12 PL R RT SW V VA WA1 WA2 WB1 WB2 WH ZZ 32 Up to 2000 48 3 M10 x 1.25 13 152 4 6 13 32.5 M6 x 1 10 3.5 4 4 4 7 7 26 204 40 Up to 2000 54 3 M12 x 1.25 13 171 4 6.5 14 38 M6 x 1 13 4.5 4 5 7 8.9 1.8 30 229 50 Up to 2000 69 4 M16 x 1.5 14 181 5 8 14 46.5 M8 x 1.25 17 4.5 4 6 6 5.1 2 37 254 63 Up to 2000 69
Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: -, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -