Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

332 332 344 356 69 81 93 77 89 101 83 95 107 VVX21 VVX22 VVX23 Manifold composition 2 stns. x 1 3 stns. x 1 2 stns. x 2 2 stns. + 3 stns. 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 (mm) V DIN terminal Electrical entry A B C D E F H J N R Grommet T Conduit W Conduit terminal Model Q 49 62 66.5 S 41.5 54 59 U 58 62 64.5 X 63 66 68 Y 94.5 97.5

CNS

VA BN AL A K F C B TX TZ N N TT M H S + Stroke ZZ + Stroke (For NPT port) With rod boot Z1 + l + 1/2 stroke 75 15 40 l h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) C EA A AL B BN BP BQ CL D E F FA G GA GB GL GR J K KA 125 140 160 16 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 155 23 25 30 M14 x 1.5 15 31 25 to 1000 16 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 180 28 30 30

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

B L Basic style Foot style Flange style 50 63 80 100 MSQ F Auto switch For the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled). For part numbers of foot bracket, refer to page 11-7-2.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

B L Basic style Foot style Flange style 50 63 80 100 MSQ F Auto switch For the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled). For part numbers of foot bracket, refer to page 11-7-2.

SMC Pneumatic Clean Series

L 40 150 A H7B 21 C D M 2 L 40 150 A H7B Number of auto switches Mounting style Basic style Axial foot style Rod side flange style Head side flange style Boss-cut basic style Boss-cut rod side flange style B L F G BZ FZ 2 pcs. 1 pc.

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

LV50-OMQ0002

min 2.5 to 100 L/min 5 to 200 L/min Display range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Set point range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Zero-cut flow *2 0.4 L/min 2.0 L/min 4 L/min Min. setting unit 0.1 L/min 0.5 L/min 1 L/min Accumulated volume perpulse (Pulse width=50ms) 0.1 L/pulse 0.5 L/pulse 1 L/pulse Fluid temperature *3 0 to 85oC (No condensation or freezing

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

x EE PL KK SW KK WB WA B D D B 8 x RT L9 VD BG L2 L12 A WH G H ZY + 2 x Stroke L12 VD L2 Cushion valve G WH + Stroke A H + Stroke L8 + Stroke With rod boot at one end d e f l h h + L8 + H + 2 x Stroke With rod boot at both ends d d e e L8 + Stroke h f l l + Stroke f 2 x h + L8 + 2 x Stroke h + Stroke A B d11 D EE PL RT L12 KK SW G BG L8 VD WA WB WH ZY Bore size (mm) Stroke range (mm) L2 L9

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

Thermo-chiller/Rack Mount Type

min)/0.18 (at 7 L/min) For Option T: 0.42 (at 10 L/min)/0.4 (at 14 L/min) For Option MT: 0.32 (at 10 L/min)/0.32 (at 14 L/min) Circulating fluid system Rated flow (50/60 Hz)7 [L/min] 7/7 For Options T, MT: 10/14 Flow display range20 [L/min] 2 to 16 Electric conductivity display range [S/cm] 0.1 to 48 (Only for Option DM) Electric conductivity setting range [S/cm] 0.5 to 45 (Only for Option

LEC-OM07605CN

(3) (a) EMC HF3010A-UN [:mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN (41) 258 4 65 4 273 2 288 4 300 5 HF3030A-UNHF3040A-UN [:mm] 6-K 3-L 3-L G 1 D 2 E 1 F 2 M J 2 C 1 C 1 H 2 B 2 A 5 [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 8 M5 M4 HF3040A-UN 11 30 11.

Cylinder with Lock Series CNS

F VA BN S + Stroke CX CT N N U L RR H ZZ + Stroke Z + Stroke CL T 2-MA Effective thread depth R GR GL With rod boot Q V 75 15 40 l C B 4-J h + l ZZ1 + l + Stroke Z1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CDH10 CL CT CX D E EA F FA G GA GB GL 125 140 160 50 47 145 205 1/2 3/8 115 25 120 17 32 36 90 63 35 14 16 155 23 25 to 1000 + 0.084 0 0.1 0.3 50 47 161 245

VS 8-2/VS 8-4

1 F kit P kit T kit L kit M kit !2 !4 !3 !5 !6 !7 The exploded view indicates VV801. 31 Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Manifold Assembly Part No. Housing Assembly, SI Unit, etc. Part no.

JXCx-OMU0004

P.65 * ALARM 10 2 e M7 LED f h 3 h 15 7 LED f F g 7 LED f ON(LED a ON 8.1 P.40 10.P.50 25 No.JXC-OMU0004-A (4) 5 AB 2 3 7 LED f (A [1] h ( 3) 7 LED f h h *0F(15) 7 LED f LED a [2]LED a g LED b 7 LED f g 7 LED f g h g g [2]7 LED f C LED b ) g h F15 g 2 (B 26 No.JXC-OMU0004-A [3] i j * i j i j * i j 8.4 P.43 [4] g 1 g [5]7 LED f i 7 LED f j

LG1H

Refer to pages starting with 181 for mounting. 30 100 95 95 B 8(4)-6.2 (160) () () 110 95 20 95 A () () (140) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H202SC-100-F LG1H202SC-200-F LG1H202SC-300-F LG1H202SC-400-F LG1H202SC-500-F LG1H202SC-600-F LG1H202SC-700-F LG1H202SC-800-F LG1H202SC-900-F LG1H202SC-1000-F LG1H202SC-1200-F 50 150 250 350 450 550 650 750 850 1050

modular-press-e

-260S AR20P-260S AR30P-260S y AF10P-260S AF20P-260S AF30P-260S AF40P-260S Round type Note 2) Standard G27-10-R1 G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L G27-10-R1 Note 3) G27-10-R1 Note 3) 0.02 to 0.2 MPa setting Standard G27-10-R1 y IN OUT Round type Note 2) Pressure gauge u r t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P

Modular F.R.L. Pressure Control Equipment

-260S AR20P-260S AR30P-260S y AF10P-260S AF20P-260S AF30P-260S AF40P-260S Round type Note 2) Standard G27-10-R1 G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L G27-10-R1 Note 3) G27-10-R1 Note 3) 0.02 to 0.2 MPa setting Standard G27-10-R1 y IN OUT Round type Note 2) Pressure gauge u r t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P

LEC-OM02904

5 6 6 7 7 () 8 8 EC 9 9 UL/cUL -12 4 - 1 1 . 2 1.1 . 2 1.2 . 3 1.3 . 4 1.4 . 5 1.5 . 6 1.6 . 9 1.7 . 10 1.7.1 . 10 1.8 . 11 1 1 1 1 1.1 LECSSLECSS-SSCNET SSCNET50m TM USBMR Configurator2 LECS-262144pulse/rev 1 2 1 1.2 (1) LECSSDC D C P 1 P 2 P ( ) N ( ) ( 1 ) MCCB MC U U L 1 ( 2 ) 2 V V L 2 M W W L 3 CHARGE TR ( 3 ) B1 RA L 11 B DC24V L 21 B2 CN2 LEC-MR-J3BAT

CLK1

Pin Dd9 2-3 L 4 4 D L Part no.

VQ4000

2(B) F, T kit 12 stations C8 (For 8) C10 (For 10) C12 (For 12) Rc 1/4 Rc 3/8 Rc 1/2 Option 2.24 F kitD-sub connector T kitTerminal block box L kitLead wire S kitSerial transmission VV5Q41VQ400 VQ401 Side L kit Except solenoid valve weight L kit 16 stations VQ4000 Direct exhaust with silencer box S kit 10 stations VQC Rc 1/4 Bottom Note) For details about inch-size One-touch fittings