1 40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal
depth 12 (N 1) x H G Bottom through-hole 5.1 GG HH H 7 NN-M6 x 1 thread depth 12 depth 5.5 6H9 +0.030 0 Bottom through-hole 5.1 F E 6H9 +0.030 depth 5.5 0 (mm) H HH Z NN N L K J GG G F E Model MXW20-150 48 412 1 6 66 41 169 29 101 216 113 MXW20-175 52 462 1 6 91 66 194 50.5 128.5 237 140 MXW20-200 48 512 1 7 116 91 219 56 152 264 164 MXW20-225 52 562 1 7 141 116 244 73.5 177.5 288 189
) 5, 10, 20, 40 74, 105 EM100 All types of gases/liquids, High-temperature fluids P.42 5, 10, 20, 40 74, 105 EM500 Stainless steel 316 21 Filter Selection by Main Application FGD/FGE/FGG type FGD type FGE type FGG type Applications and Applicable Element : Recommended : Can be used : Cannot be used Applicable filter model F G D C F G D E F G D T F G D F F G E S F G E L F G E T F G G S F G
port Rc(PT) A B C D E F G H J 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36
Output voltage (Rated pressure range) Linearity Output impedance Note 2) Voltage output 1% F .S. Approx. 1 k Analog output 2.4 to 20 mA 2.5% F.S. 4 to 20 mA 2.5% F.S. Output current (Rated pressure range) Linearity Note 3) 1% F .S.
: : ' : ' r : : 1 1 ' . ' , ' , ' . ' , ' , , : , . ' , , ' , ' , , 1 1 1 ' , I , ' , ' ' ' ' @-g'.ttr' SMC Pneumatics. Inc" Air PiSot tlperated Series HV$A ,3f .,'5.
Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)
CKZ-50A009 ACA213M 150.0 1.0 50 mm offset: Machined 25 mm offset: Machined A A B B C C 8F7 through +0.028 +0.013 D 8F7 through +0.028 +0.013 D E E 200.03 F G F 10 200.03 10 G 300.025 300.025 11 through H 300.025 300.025 I 11 through H 250.05 J 250.05 I M6 x 1.0 45 R45 500.05 6.5 18 M6 x 1.0 10 750.05 3 R25 10 R6 1 1 6.5 R25 19 18 19 R25 19 [mm] R6 19 [mm] Model NAAMS code A B C D E F G H
hole BC element FA T GL GR Rc(PT) BP Unlocking port G G Width across flats KA MM R1 Q V TD e8 D EA E TY VA BN AL A K F C B TX TZ N N TT M H S + Stroke ZZ + Stroke With rod boot Z1 + l + 1/2 stroke 75 15 40 l h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA GB GL GR J K KA 125 140 160 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 16 155 23
1 AS-F AS-F !1 !2 TMH !2 !3 w ASD t y q i o e u t y q i o e u AS w AS-FE !0 KE !0 AS-FG !9 AS-FP Meter-in type Meter-out type Meter-out type Meter-in type AS-FM Seal method: Face seal For G thread AS-D AS-T r !8 !4 !6 !7 !5 !1 ASP ASN !2 AQ w t y q i o e ASV AK !0 VCHC ASR ASQ u @0 Meter-in type Meter-out type Component Parts No.
300 mm 6 600 mm 10 1000 mm 15 1500 mm 20 2000 mm 25 2500 mm 30 3000 mm 50 5000 mm 51 Series SYJ7000 2 Position Single [ ]: AC G H G H Grommet (G), (H): SYJ7120-01 With bracket: SYJ7120-01-F 44 36 2-4.5 (For mounting) 4 26 34 + G: Approx. 300 H: Approx. 600 (Lead wire length) 82 [84.2] 59.8 24.1 28.3 39.5 [46.5] 13 B A 3 Manual override 2-3.2 (For manifold mounting) 35 17 1/8 (A, B port)
Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Lock keys ( ref er t o P11) 9 Rel at i on bet w een set t i ng of gai n and response t i m e Response t i m e Q ui ck Sl ow Set t i ng of gai n G L. 9 G L. 8 G L. 7 G L. 6 G L. 5 G L. 4 G L. 3 G L. 2 G L. 1 G L. 0 Rel at i on bet w een set t i ng and sensi t
Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Lock keys ( ref er t o P11) 9 Rel at i on bet w een set t i ng of gai n and response t i m e Response t i m e Q ui ck Sl ow Set t i ng of gai n G L. 9 G L. 8 G L. 7 G L. 6 G L. 5 G L. 4 G L. 3 G L. 2 G L. 1 G L. 0 Rel at i on bet w een set t i ng and sensi t
Press key f or 3 seconds or m ore. i s di spl ayed f or approx. 2 seconds and ( current ) pressure i s di spl ayed af t erw ards Lock keys ( ref er t o P11) 9 Rel at i on bet w een set t i ng of gai n and response t i m e Response t i m e Q ui ck Sl ow Set t i ng of gai n G L. 9 G L. 8 G L. 7 G L. 6 G L. 5 G L. 4 G L. 3 G L. 2 G L. 1 G L. 0 Rel at i on bet w een set t i ng and sensi t
M8 connector Cable length For connector cable of M8 connector, refer to page 1-5-78. 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm 1-5-7 Series SYJ3000 2 Position Single [ ]: AC G H G H Grommet (G), (H): SYJ3120-M3 With bracket: SYJ3120-M3-F G: Approx. 300 H: Approx. 600 (Lead wire length) 54.4 [56.6] 28.4 32.2 22 2-3.5 (For mounting) 3.2 7.1 13.2 16.4 10 + 8.2 A B 4 19.3 7 11.5 Manual
port (21) (21) 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port 31 31 ( ): Rc 3/8 3 position double check: VQ465 0 1 2 position double: VQ425 3 position closed center: VQ435 3 position exhaust center: VQ445 3 position pressure center: VQ455 0 1 0 1 0 10 1 G H G H G H G H 178.5 105.5 73 42.5 50 Indicator light 164.5 178.5 11 (12.5) 4(A) port 11 (12.5) 2(B) port 59 73 42.5 105.5 Indicator
Number of solenoids S D Single Double How to Order Sub-plate VS7 1 A02 Specifications Thread type Port size Side ported RC 1/4 Side ported Rc 3/8 Bottom ported Rc 1/4 Bottom ported Rc 3/8 Rc Nil Porting specifications A02 A03 B02 B03 Model Weight (kg) NPTF T G F Piping location 1(P), 2(B), 4(A) port size 3(R2), 5(R1) port size VS7-1-A02 VS7-1-A03 VS7-1-B02 VS7-1-B03 1/4 3/8 Side 3/8 3/8
Width across hexagon socket hole 3 J 14 Scale: 30% 8 Width across flats 10 6-M5 x 0.8 thread depth 9 (Helisert) 6H9 +0.03 depth 5.5 0 7 74 36 59 34 33 125 33 Y Y 6H9 +0.03depth 5.5 0 L 10 20 20 K A 43 31 23 A Z N-M6 x 1 thread depth 12 (N-1) x H G NN-M6 x 1 thread depth 12 Bottom through hole 5.1 HH Bottom through hole 5.1 GG H 7 depth 5.5 6H9 +0.03 0 F E 6H9 +0.03depth 5.5 0 Model F E G
[F96] 57 [F97] 58 OFF [F98] 60 () [F99] 62 OFF XY "---" -31No.PS-OMU0008CN-D [F 0] (kPa/MPa) <> [F 0] [F 0] ZSE20CF ZSE20C ISE20C ISE20CH MPa 0.001 0.001 0.001 0.001 kPa 0.1 0.1 1 1 kgf/cm 2 0.001 0.001 0.01 0.01 bar 0.001 0.001 0.01 0.01 psi 0.02 0.01 0.1 0.2 InHg 0.1 0.1 mmHg 1 1 -32No.PS-OMU0008CN-D [F 1] OUT1 OUT1 ONON OUT1ONOFF 35 <> [F 1] [OFF] 26 [Err] [P_1] [P1L][P1H]