AR20-B to AR60-B C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1 28.5 2 Note 2) 28 29.5 27.8 40 37.5 65 37.5 66 AR25(K)-B 1/4, 3/8 1/8 53 71.9 28 27.5 M32 x 1.5 27.5 0 28 28.5 27.8 39 37.5 64 37.5 65 AR30(K)-B 1/4, 3/8 1/8 53 85.6 30.7 29.4 M38 x 1.5 29.4 3.5 28 30.4 27.8 40.9 37.5 65.9 37.5 66.9 AR40(K)-B 1/4, 3/8, 1/2
VY1 G Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .
D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056
FKM (Standard seal material) Principle materials Pilot pressure (MPa)(G) 0.3 to 0.6 0.4 to 0.6 Pilot port size M5 Rc 1/8 XMC 6.30 0.62 1.40 (1.76) 2.10 3.80 (5.16) 0.36 (0.40) Weight (kg) Note 2) XYC 7.80 0.67 1.42 2.50 4.50 Note 1) Conductance is the value for the molecular flow of an elbow having the same dimensions.
VER2000 Repeatability 3% F .S. Sensitivity 0.5% F .S. 1.5% F .S. Linearity 3% F .S. Lubrication Not required (Use turbine oil Class 1, ISO VG32 if lubricated.)
Symbol Plate PEEK PEEK PEEK PFA PFA PFA Diaphragm EPDM FKM Kalrez (Symbol 1) IN (Symbol 3) OUT A B C E F G EPDM FKM Kalrez 115 3 Universal 3 1 2 1 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Specifications Body ported type Body ported type (Tubing type) Base mounted type Model LVM115 LVM14R LVM16R LVM13R LVM112 LVM12R LVM11R LVM11 Diaphragm type direct
Symbol Plate PEEK PEEK PEEK PFA PFA PFA Diaphragm EPDM FKM Kalrez (Symbol 1) IN (Symbol 3) OUT A B C E F G EPDM FKM Kalrez 115 3 Universal 3 1 2 1 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Specifications Body ported type Body ported type (Tubing type) Base mounted type Model LVM115 LVM14R LVM16R LVM13R LVM112 LVM12R LVM11R LVM11 Diaphragm type direct
Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68
Series: 250 [3 Port COM (Single Unit)], Voltage: 210VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -
Series: 250 [3 Port COM (Single Unit)], Voltage: 200VAC 50/60Hz, Electrical Entry: Grommet / Molded, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -
Series: 250 [3 Port COM (Single Unit)], Voltage: 100VAC 50/60HZ, Electrical Entry: Grommet / Molded, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -
Series: 250 [3 Port COM (Single Unit)], Voltage: 110VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -
Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Faston terminal / Molded, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -
Series: 250 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Faston terminal / Molded, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -
Series: 250 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -
Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -
Series: 250 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Molded, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -
Series: 250 [3 Port COM (Single Unit)], Voltage: 100VAC 50/60HZ, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -
Series: 250 [3 Port COM (Single Unit)], Voltage: 4 (210VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread
Series: 250 [3 Port COM (Single Unit)], Voltage: 2 (200VAC 50/60Hz), Electrical Entry: W (Grommet / Molded), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread