CQ2

A A1 L1 MM RR1 U1 NZ L A1 MM U1 L1 E1 10 12 16 20 22 28 38 44 +0.048 0 5 6.4 8 10 18 22 28 32 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 +0.048 0 5 6.5 8 10 18 22 28 32 21.5 28 34 41 42 56 71 79 10 21.5 32 34 41 42 56 71 79 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 X 0.8 M6 X 1 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 6 11 8.5 16

Electric Actuator/Slider Type

20 30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

Compact Cylinder

25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 5 6.4 8 10 18 22 28 32 21.5 28 34 41 42 56 71 79 6 11 8.5 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 6.3 8.1 7 10 5 5 8 5 14.6 IY-G012 5 5 8 10 10 14 18 22 +0.048 0 +0.4 +0.2 l12 +0.048 0 12 6.5 8 10 18 22 28 32 IY-J015 16.6 +0.2 +0 +0.048 0 l16 +0.058 0 16 M8 x 1.25 M8 x 1.25 10.3 11.5 14 14 20 27 31

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

D-A5/A6 Same side 10 110 110 115 125 135 145 1 pc. 10 Different sides 20 2 pcs. D-A59W Same side 20 115 115 125 130 140 150 1 pc. 15 Different sides 10 2 pcs. D-F5/J5 Same side 10 115 115 120 130 140 150 1 pc. 10 Different sides 10 2 pcs. D-F5W/J5W D-F5BAL Same side 10 120 120 120 135 140 150 1 pc. 10 Different sides 10 2 pcs.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

85 15 26 54 10 10 8 M8 x 1.25 6 14 71 50 25 to 600 25 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 7 18 80 63 32 to 600 32 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 7 18 99 80 41 to 750 41 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 10 22 117 100 45 to 750 45 to 750 40 37 116 41 140 1/4 1/4 92

Cylinder with Lock

85 15 50 16 12 12 10 51 8 M8 x 1.25 6 14 M14 x 1.5 25 to 600 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56 20 13 15 12 58 11 M8 x 1.25 7 18 M18 x 1.5 32 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 65 20 18 12 15 58 11 M10 x 1.25 7 18 M18 x 1.5 41 to 750 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 79.5 20 23 18 17 71 13 M12 x 1.75 10 22 M22 x 1.5 45 to 750 40 37 116 41 160 1/4 1/4 92

Electric Actuator

Special cap bolt Double Clevis CD hole H10 axis d9 [mm] Stroke range (mm) A CL CD CT size 10 to 100 160.5 150.5 25 10 5 101 to 200 185.5 175.5 CU RR CW L CL + Stroke A + Stroke +0.4 +0.2 CX 10 to 100 180.5 170.5 32 10 6 0.1 0.3 CZ 101 to 200 210.5 200.5 Stroke range (mm) CW CX CZ L RR CU size 10 to 100 25 14 20 18 36 14.5 10 101 to 200 10 to 100 32 14 22 18 36 18.5 10 101 to 200 Material:

Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)

Free Mount Cylinder

size (mm) Q QA P R T S Z S Z 15st 81 92 101 110 118 129 5 st 38 41 45 41 45 47 10 st 43 46 50 46 50 52 15 st 48 56 60 56 60 62 5 st 61 67 76 75 83 94 10 st 71 77 86 85 93 104 15 st 81 92 101 100 108 119 5 st 38 41 45 51 55 57 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5 st 61 67 76 85 93 104 10 st 71 77 86 95 103 114 6 10 16 20 25 32 7 9 12 16 20 24 6 depth 4.8 6 depth 5 7.6 depth 6.5

Air Cylinder Series MB

15 15 + 10 (n 2) 15 + 15 (n 2) 15 + 20 (n 2) n 2 (Different surfaces, Same surface) 10 15 D-M9 D-M9V 1 10 15 15 + 5 (n 2) 10 + 10 (n 2) CJ1 n D-M9W D-M9WV D-M9AL D-M9AVL 2 (Different surfaces, Same surface) 15 10 CJP 1 15 10 10 + 10 (n 2) 10 + 15 (n 2) 15 + 10 (n 2) n CJ2 2 (Different surfaces, Same surface) 15 25 D-Z7 D-Z80 1 15 25 15 + 15 (n 2) 15 + 20 (n 2) 25 + 15 (n 2) CM2

Air Cylinder

(mm) Bore size Stroke range CDH10 CX (mm) A AL B B1 C CZ D E F G H1 J K KA L (mm) 40 50 63 80 +0.3 +0.1 10 12 16 20 25 +0.084 +0.058 0 15 18 25 Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 29.5 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 8 M8 x 1.25 M8 x 1.25 6 7 7 14 18 18 22 26 30 35 40 48 58 +0.3

Precautions 1

Part no. 13 5 26 8 10 26 28 SN-020B TN-020B M20 x 1.5 M20 x 1.5 15.0 12.5 M8 x 1.25 30 25.5 25.5 17 6 32 8 32 10 34 SN-032B TN-032B M26 x 1.5 M32 x 2 M26 x 1.5 19.6 16.5 37 31.5 31.5 M10 x 1.25 22 8 41 10 41 10 45 SN-040B TN-040B M32 x 2.0 M14 x 1.5 25.4 21.0 47.3 40.5 40.5 1578 Valve Mounted Cylinder Series CVM5 Auto Switch Proper Mounting Position (Detection at Stroke End) and Mounting

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

8 10 18 22 28 32 5 5 8 10 10 14 18 22 +0.048 0 5 IY-G012 +0.4 +0.2 0.2 0.4 12 28 11 8.1 10 16.6 12 6.5 IY-J015 +0.048 0 +0.2 0 0.1 0.3 +0.048 0 16 34 8.5 10.3 11.5 21 16 8 IY-G02 +0.058 0 +0.4 +0.2 0.2 0.4 +0.058 0 20 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 41 10.5 12.8 14 25.6 20 10 IY-G03 +0.058 0 +0.4 +0.2 0.2 0.4 +0.058 0 M10 x 1.25 M14 x 1.5 M18 x 1.5 42 16 22 12 14 41.6

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Cylinder with Lock

AB AH AO AT AU E R2 TG 0.2 TR Screw size R2 TG/2 32 L5032 7 32 10 4.5 24 48 15 32.5 32 M6 x 16L 40 L5040 10 36 11 4.5 28 55 17.5 38 36 M6 x 16L 50 L5050 10 45 12 5.5 32 68 20 46.5 45 M8 x 20L 63 L5063 10 50 12 5.5 32 80 22.5 56.5 50 M8 x 20L 80 L5080 12 63 14 6.5 41 100 22.5 72 63 M10 x 20L 100 L5100 14.5 71 16 6.5 41 120 27.5 89 75 M10 x 20L AH AT AB E TR AU AO * Supplied with 4 mounting

Rotary Actuator

Applicable shaft types: J, T X = Y = X = Y = Y = X = Y = Y = [mm] [mm] [mm] Size X Y 30 3 to 13 3 to 10 50 3.5 to 27 1 to 20 63 3.5 to 29 1 to 22 80 4 to 38 1 to 25 100 5 to 44 1 to 30 Size X Y 30 3 to 25 3 to 10 50 3.5 to 36 1 to 20 63 3.5 to 41 1 to 22 80 4 to 50 1 to 25 100 5 to 60 1 to 30 Size Y 50 1 to 36 63 1 to 41 80 1 to 50 100 1 to 60 Symbol: A59 Note) Except flange type The rotation

CNA

63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011 10 10 9 9 4.5 4 4.5 4 4 Data Since this is a guideline including hysteresis, not meant to be guaranteed.

CNA

63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011 10 10 9 9 4.5 4 4.5 4 4 Data Since this is a guideline including hysteresis, not meant to be guaranteed.

o

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

o

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.