Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 8 8 7 5.5 5.5 5 50 45 45 41 1/4 1/8 1/8 14 12 10 16 13 13 10 8 M14 x 1.5 M32 x 2 134 3.2 23 The bracket is shipped together.

Compact Guide Cylinder

V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 10 10 Load mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 50 50 Load mass m [kg] Load mass m [kg] 10 10 3 3 10 50 51 100 101 200 100 101 200 10 50 51 Stroke [mm] Stroke [mm] 21 Model Selection MGPK Series

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

37.5 32 32 39.5 42.5 5.4 5.4 7 10 6 8 10 12 25 29 36 40 5 5 5.5 5.5 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 6.5 6.5 9 9 7 7 10 10 4 4 7 7 0.5 0.5 1 1 3.5 3.5 5.4 5.4 5, 10 For the following bore/stroke sizes, through-hole is threaded over the entire length.

Thermo-chiller/Rack Mount Type

Applicable model HRR012/018--10-T/MT*1 HRR012/018/024/030--20-T HRR012/018/024/030--20-MT1 Pump Rated flow (50/60 Hz)2, 3 L/min 7 (0.36 MPa)/10 (0.42 MPa) 10 (0.42 MPa)/14 (0.40 MPa) 10 (0.32 MPa)/14 (0.32 MPa) Maximum pump head (50/60 Hz) m 50 50 50 Output W 350 550 Circuit protector A 15 15 (10 A for standard) Recommended earth leakage breaker capacity A 15 Cooling capacity4 W The cooling

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-14A-10 3 pcs.

Dual Speed Controller with One-touch Fitting Series ASD

12 10,11 10,11,12 08,09 1000 10 15 8 500 06,07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-101 Construction ASD230F ASD330F/430F ASD530F/630F ASD530F-02 !

Hygienic Design Cylinder Series HY

27 14 16.5 20 26 32 38 50 60 8 10 12 16 20 20 25 30 18 18 20 26 32 32 37 42 12 14 18 25 30 32 40 50 3 3 3 3 3 3 3 3 2 2 2 2 2 2 3 3 13 13 10 10 10 10 12 12 16 16 10 10 10 15 15 15 20 20 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 11 10 14 12 17 17 12 13 14 14 20

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(Piping port) (Opposite side: Same) -X 3 208 6 Data 22.5 11 Z (10 + 1/2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model CXS6-10 CXS6-20 CXS6-30 CXS6-40 CXS6-50 68.5 10 15 23 55 78.5 20 20 33 65 88.5 30 25 43 75 98.5 40 30 53 85 108.5 50 35 63 95 8-29-7 8 Series CXS Dimensions: 10, 15 ZZ Stroke SS 9 J D B M Y (Hexagon socket head set screw) L Z I 1 1 G0.2 (G) A P H 6.3 5 X (Hexagon socket head cap

Refrigerated Thermo-chiller

60% Ethylene Glycol Physical property value Temperature Density Specific heat C [kg/m 3] [g/l] ([kcal/kg C]) [J/(kgK)] 1.10 x 10 3 3.02 x 10 3 (0.72) 10C 1.08 x 10 3 3.15 x 10 3 (0.75) 20C 1.06 x 10 3 3.27 x 10 3 (0.78) 50C 1.04 x 10 3 3.40 x 10 3 (0.81) 80C Water Density : 1 x 10 3 [kg/m 3] [g/l] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kg C]) 79 Thermo-chiller Series HRZ Fluorinated

MLGP

m (kg) 25 20 20 0.1 10 50 50 100 200 1 10 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 23 50mm stroke or less V = 400mm/s 24 Over 50mm stroke V = 400mm/s 100 100 100 80 100 80 63 63 10 Load weight m (kg) 50 50 10 40 40 32 1 32 2 10 100 200 0.3 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 10 Series MLGP Horizontal Mounting Slide

MLGP

m (kg) 25 20 20 0.1 10 50 50 100 200 1 10 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 23 50mm stroke or less V = 400mm/s 24 Over 50mm stroke V = 400mm/s 100 100 100 80 100 80 63 63 10 Load weight m (kg) 50 50 10 40 40 32 1 32 2 10 100 200 0.3 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) Features 10 Series MLGP Horizontal Mounting Slide

Air Cylinder NCA1 Series

8 3 1/8 7 1/8 4 1/8 10 3/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 10 1/2 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 4 1/8 10 3/4 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 11 1/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7

NCA1

3 1/8 7 1/8 4 1/8 10 3/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 10 1/2 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 4 1/8 10 3/4 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 11 1/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/

Fieldbus system EtherNet/IP compatible SI Unit

Unit 1 Disable Does not generate an error. -10..10 V -5..5 V -10..10 V Selects the analogue input range. (AXB: Cannot select -10..10 V/-5..5 V/ -20..20 mA) -20..20 mA (AXA) Sets the analogue input device range. 0..10 V 2 Analogue input range Channel 0..5 V 1..5 V (AXB) 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary. Sign & Magnitude Signed binary.

Secondary Batteries

, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.

Series VQ Base Mounted Metal Seal/Rubber Seal

AXT661-14AN-10 3 pcs.

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

-15 -20 -30 -10 -15 -10 -15 -20 -30 -10 -15 -10 -15 -20 -30 -10 -15 1 9h9 M3 x 0.5 0.88 M3 x 0.5 0.88 M3 x 0.5 0.88 6 6 6 6 6 3 3 12h9 2 2 2 1.5 4 4 M4 x 0.7 2.1 M4 x 0.7 2.1 M4 x 0.7 2.1 8 8 8 8 8 14h9 5 5 M5 x 0.8 4.3 M5 x 0.8 4.3 M5 x 0.8 4.3 10 2 10 10 10 10 16h9 1 9h9 3 3 3 M3 x 0.5 0.88 1.5 6 M3 x 0.5 0.88 M3 x 0.5 0.88 6 6 6 6 3 3 12h9 How to Locate Finger and Attachment How to Mount

MLGP

50 50 Load weight m (kg) Load weight m (kg) 40 40 50 50 40 40 32 32 10 10 25 25 32 32 20 20 25 25 20 20 1 1 10 50 100 200 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) (16) Over 50 Stroke V = 400 mm/s (15) 50 Stroke or Less V = 400 mm/s 100 100 100 100 50 50 80 80 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 10 40 40 32 32 25 25 1 20 20 1 10 50 100 200 0.7 10

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

e

10 10 E-MY2HT16 E-MY2HT16 8 8 8 5 5 5 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Load Mass: E-MY2HT (Double Axis) E-MY2HT/m1 E-MY2HT/m2 E-MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) E-MY2HT25 E-MY2HT25 E-MY2HT25 10 10 10 5 5 5 4 4 4 E-MY2HT16