spacer 1. 13-2-46 46 Vacuum Module: Vacuum Pump System Series ZX Adsorption confirmation switch (ZSP1) ZX100-K1-P Vacuum switch (ZSE3) ZX100-K1-D Spacer 1: ZX1-S1 Adjustment needle ZX ZR Spacer 1 (For side mounting) DOWN button Manual override (Non-locking) UP button ZM 3.6 (Mounting hole) 51 41 1 ZH 3.6 RESET button SET button 2-R1.8 3.6 (Mounting hole) (Mounting hole) 1 10 19 22.6 (Mounting
type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05
DS STROKE Bore E B1 B2 B3 TG1 T L1 L3 I1 I2 FL H d1 d2 d3 CN XD 32 45 14 34 3.3 32.5 3 11.5 41 5 5.5 22 10 30 10.5 6.6 10 142 40 55 16 40 4.3 38 4 12 48 5 5.5 25 10 35 11 6.6 12 160 50 65 21 45 4.3 46.5 4 14 54 5 6.5 27 10 40 15 9 16 170 63 75 21 51 4.3 56.5 4 14 60 5 6.5 32 12 45 15 9 16 190 80 95 25 65 4.3 72 4 16 75 5 10 36 16 45 18 11 20 210 100 115 25 75 6.3 89 4 16 85 5 10 41 16 55
15 25 240 350 310 10 Series Series CY1F CY1F 28 34 46 46 63 198 225 205 294 260 CY1H CY1H MY2H 39.5 For 100mm stroke cylinder Overall length reduced by 22% compared to Series MY2H Magnetically coupled rodless cylinder: Low profile guide Series CY1F: 10, 15, 25 4 types of stroke adjustment are available.
Model Description AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 G36-10-01 GC3-10AS G36-2-01 GC3-2AS G36-10-01 GC3-10AS G36-2-01 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G-27-10-R1 Note 1) Pressure gauge
piping on right 28 34 46 46 63 198 225 205 294 260 DBuilt-in shock absorber 39.5 CY1F 15 750 Concentrated piping on left -X 25 1200 Overall length reduced by 22% compared to Series MY2H 20Magnetically coupled rodless cylinder: Low profile guide Series CY1F: 10, 15, 25 Data 4 types of stroke adjustment are available.
length mm mm 150 200 250 300 350 400 450 500 550 600 50 100 CX 10 15 25 15 10 25 240 350 310 For 100mm stroke cylinder Series Series 10 500 CY1F CY1H CY1F CY1H MY2H Concentrated piping on right 28 34 46 46 63 198 225 205 294 260 DBuilt-in shock absorber 39.5 CY1F 15 750 Concentrated piping on left -X 25 1200 Overall length reduced by 22% compared to Series MY2H 20Magnetically coupled rodless
ZS-10-5A-50 . 1 pc.
15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/
VP500-224-1 (M4 x 46) VP300-224-1 (M3 x 36) VP700-224-1 (M5 x 66) For valve mounting 10 Series VP300/500/700 How to Order Pilot Valve Assembly Caution When only the pilot valve assembly is replaced, it is not possible to change from V211 (Grommet or L/M-type) to V212 (DIN or Conduit type), or vice versa.
Confirm the internal stopper strength at extension and retraction ends in the graph on page 10-10-8.
to 50 56 36 +0.2 0 63 66 46 77 74 59.6 10.5 M6 x 1 6 103 100 7 50 0.2 35.4 8 60 75, 100 66 46 10 to 50 67.5 43.5 +0.2 0 80 77.5 53.5 98 95 79.5 12.5 M8 x 1.25 8 132 129 6 65 0.2 46 10 77 75, 100 77.5 53.5 10 to 50 79 53 +0.2 0 100 89 63 117 114 99 13 M10 x 1.5 10 156 153 6.5 80 0.2 56.6 10 94 75, 100 89 63 P Bore size (mm) 63 80 100 N OA OB Q RA RB V W Z Rc 1/4 TN NPT 1/4 TF G 1/4 M10
(Same side) A HS Number of switches 20 25 32 40 50 63 80 100 31.5 26 24 Mounting surface Port surface Port surface Port surface 31.5 28.5 24 32.5 33 25 37 36.5 28 45.5 42 36 45.5 48.5 36 Switch type 56 57.5 46 Minimum stroke (mm) 10 15 75 57 68 46 15
(mm) E1 R W MF ZF FB CD EB L XD UB CB EW MR TR AO AT XA SA AH AB TF UF E2 32 32 16 10 130 10 12 142 26 48 7 65 45 26 32 10 4.5 144 142 32 9.5 7 64 79 50 40 36 20 10 145 12 15 160 28 55 9 75 52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68 9 80 60 32 45 12 5.5 175 170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120
5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35
Overall length 15 25 10 15 10 25 240 350 310 Series CY1F CY1H CY1F CY1H MY2H 28 34 46 46 63 198 225 205 294 260 39.5 For 100 mm stroke cylinder Overall length reduced by 22% compared to the MY2H series 4 types of stroke adjustment are available.
D-G79/K79/K79C D-H7/H7W D-H7BAL/H7NF D-H7C 8 10 9 10 10 BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 8 10 9 10 10 13 13 14 14 14 8 10 9 10 10 D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G5BAL/G59F D-G5NTL D-G5NBL 4 4 4.5 5 6 7 8.5 9 10 9.5 BA-01 BA-02 BA-32 BA-04 BA-05 D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 D-G59F D-G5NBL D-B7/B80 D-B73C/B80C D-G79/K79 D-K79C 5 5 5.5 6 7 35 40 40 45 45
L/min), when the pressure reaches atmospheric pressure, with supply pressure 72.5 psi (0.5 MPa), vacuum piping size 0.16/0.098 x 2 inch (4/2.5 x 50 mm) (20) (80) Existing model Air consumption: 0.53 8.7 17% reduced (15) (60) 0.35 5.8 (10) (40) 0.101Ibs (46 0.101Ibs (46 g) 0.101Ibs (46 g) Air consumption at the peak vacuum pressure 0.35 SCFM (10 L/min) 0.42 SCFM (12 L/min) Nozzle size 0.5
I-020B I-032B I-040B Bore size 20 25, 32 40 +0.058 0 0.1 0.2 0.1 0.2 +0.058 0 9 9 36 10 20 16 14 46 9 9 18 41 M8 x 1.25 14 10 11 66 M8 x 1.25 +0.058 0 0.1 0.2 0.1 0.2 +0.058 0 9 38 9 20 18 10 14 48 9 9 22 45 14 10 14 69 M10 x 1.25 M10 x 1.25 +0.070 0 0.1 0.3 0.1 0.3 +0.070 0 12 55 16 24 22 20 69 16 12 24 50 20 14 13 92 M14 x 1.5 M14 x 1.5 15.5 Double Knuckle Joint Mounting (mm) Double Knuckle
0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)