Rotary Cylinder Series MRQ Size: 32, 40 1

Width across flats 12.2 2-M5 x 0.8 (Plug, Back side) Port size (Rotary motion) 113 (Rotating angle 180: 144.5) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Auto switch Linear motion Rotary motion 4-M5 x 0.8 depth 7 A port Port size (Linear motion) Port size (Rotary

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Non-standard Motor/Horizontal Mount Specification Series LJ1H10 Dimensions/LJ1H101PB(X10) Scale: 15% 10 6 Work piece mounting reference plane 80 5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 201 60 50 Z section 43 Stroke + 125 (table movement range) 192 3.3 30 A section 90 83 5.8 1.7 4.8 80 Stroke + 360 A section

VQZ100V-OMT0001

AN120-M5 KJS04-M5 VQZ200/2000 KQ2S06-01S INA-25-46 IN-457-32(6 ) VQZ300/3000 KQ2H08-02S AN101-01 KQ2H06-01S 3 3 3 3 VQZ VQZ VQZ VQZ 82 82 82 82 ,N.C.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod End Male Thread Bore size (mm) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style (mm) Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C D E F H I K L M N OA OB Q

Series AK1000

The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.

CU

x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth 11.5 53 51.5 56 72 74.5 83 30 38 48 5 6 7 5 6 8 M6 x 1.0 M8 x 1.25 M10 x 1.25 5.5 5.5 6.6 16 20 24 13 23.5 29 20, 30, 40, 50, 60, 70, 80, 90, 100 4 Series CU Auto Switch Proper Mounting Positions

3 Way Direct Acting NVKF 300 Series

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

PSxx-OMT0001CN

m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

NVKF

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

Air-hydro Unit

Model NB Effective oil level stroke W QL S QB NL P 50 100 200 300 400 600 700 800 500 CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 11 9.5 30 0 3 86 62.5 28 228.5 278.5 378.5 503.5 603.5 728.5 13 7 2 5 120 32 82.5 33 286 386 511 611 736 836 7 2 13 120 32 33 5 92 399 524 624 1049 949 749 849 Hexagon socket head cap screw is used for mounting hole. 7 0 185 46

Series 10-MGF ø40, ø63, ø100 Guide Table

46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C M6 M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.

CC

Model NB Effective oil level stroke W S QL QB P NL 800 700 600 500 400 300 200 100 50 -X CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 9.5 11 0 30 86 3 28 62.5 728.5 603.5 503.5 378.5 278.5 228.5 7 13 2 32 120 5 33 82.5 611 511 386 286 836 736 207 13 2 32 120 5 33 92 624 524 399 949 849 749 1049 Hexagon socket head cap screw is used for mounting hole. 7 20 2.5 46

HRX-OM-W060

Error [FLT] 5.4 Description of Screen HRL Series 5-46 HRX-OM-W060 Chapter 5 Display and Setting of Various Functions Table 5.4-18 Alarms that allow continuous pump operation (2/2) No. Alarm name Alarms that allow continuous Alarm pump operation Operation CH1 CH2 AL23 CH2 High Press. [OFF] / [WRN] [FLT] AL24 CH2 Low Press. [OFF] / [WRN] [FLT] AL25 CH2 Low Press.

HRX-OM-X084

Communication specification Set value Contents Initial value 485 RS-485 232C RS-232C 5.5 Advanced setting mode HRR Series 5-46 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions RS-485 terminal unit 4. Press the [] key. Displays screen for setting RS-485 terminal unit. Select RS-485 terminal unit.

HRX-OM-X071

Communication specification Set value Contents Initial value 485 RS-485 232C RS-232C 5.5 Advanced setting mode HRR Series 5-46 HRX-OM-X071 Chapter 5 Display and Setting of Various Functions RS-485 terminal unit 4. Press the [] key. Displays screen for setting RS-485 terminal unit. Select RS-485 terminal unit.

Series 10-MGF Guide table ø40, ø63, ø100

18.5 KA KB 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C 1/4 1/4 1/8 40 P 100 63 30, 50,75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 7.5 200 160 20 20 11.5 11.5 9.5 96 Guide table10-MGF Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control

CC

108 81 L dimension Mode NB Effective oil level stroke T * W S QL QB P NL 100 200 300 400 500 800 700 600 50 9.5 11 0 30 86 3 28 62.5 CC63-lSl1-lG 228.5 278.5 378.5 503.5 603.5 728.5 CC63-lSl1-lG s s s 7 13 2 32 120 5 33 82.5 CC100-lSl1-lG CC100-lll1-lG 286 386 511 611 836 736 s s s CC100-lLl1-lG 7 13 2 32 120 5 33 92 CC160-lLl1-lG 399 524 624 949 849 749 1049 s s CC160-lLl1-lG 7 20 2.5 46

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Bore size (mm) 32 40, 50, 63 80, 100 Thread size M2.5 X 0.45 X 25 l M3 X 0.5 X 30 l M5 X 0.8 X 40 l Pulling force 4.9N 10N 24.5N Stroke (mm) 2 3 3 e Release lock when mounting or adjusting the cylinder. If mounting is done with lock engaged, lock mechanism may be damaged. * Remove bolt under normal operations.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

|VFR2200-OF 3 posiiion cloed center:NVFR230O-oF 3 position exhaust center:NVFR24oGOF 3 pooition pressure center:NVFB250GOF < ):26NPTF < >:/aNPTF Series NVFRz000:Base Mounted Tlpe Non Plug-in type 2 position single/Dilnerwions Grommet:NVFR21 10-OG -o ; 3 ; 6 )o.t 10-32 No.n (M5) lfu I ES.!! 10-32l.