ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B 13-3-12 12 Series ZR Large Size Vacuum Module: Ejector System Vacuum Pressure Switch Unit/Pressure Switch for Vacuum: ZSE2-0R-15 Specifications Quick response: 10 mS Vacuum pressure switch part no.

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

PF-OMN0009_C

30 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W540 1/2 3/4 98 71 38 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 12 PF3W511 3/41 124 92 46 62.6 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0009CN-F PF3W521 2X A AA B DD E F G H J K L N P 11/4,11/2

AC Servo Motor Driver (Pulse input type)

Driver Servo amplifier 24VDC (Note 4, 12) Controller (Note 7) Positioning module CN1 QD75D (Note 7) 21 DICOM CN1 (Note 2) Trouble (Note 6) 20 46 DICOM 48 ALM RA1 14 13 Zero speed detection CLEARCOM DOCOM 23 ZSP CLEAR CR 41 RA2 (Note 12) Limiting torque RDYCOM 12 25 TLC RA3 READY 11 RD PP PG NP NG 49 10 11 35 In-position 24 INP 15 16 RA4 PULSE F PULSE F 10m max. 17 PULSE R PULSE R 18 36 4

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

Air Cylinder NCA1 Series

/8 8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 5 7/8 3 1/4 6 5/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 7 1/4 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 7 3/8 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 41/8 7 5/8 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 7 7/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 8 1/8 12 3 2 1/4-12 3 1/2 3.75 1/2

NCA1

8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 5 7/8 3 1/4 6 5/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 7 1/4 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 7 3/8 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 41/8 7 5/8 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 7 7/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 8 1/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1

5 Port Solenoid Valve

S0710-5 S0710-5 S0720-5 S0720-5 S0720-5 S07A0-5 S07A0-5 62 72 102.4 39 12 12 12 12 12 21.8 5 4 4 x M4 mounting hole SI unit Stations 1 2 3 4 5 6 7 8 n D side U side C8: 3(R) port C8: 8 one-touch fitting DIN rail clamping screw 76.7 76.7 33.6 33.6 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A Plug-in Manifold Stacking Base (12) (12) 17.5 6.5

SV

Rc 1/4 Rc 3/8 G 1/4 G 3/8 One-touch fitting for 8 (up to 18 solenoids possible.) 18 18 stations SV1000 Type 16: Series SV2000 One-touch fitting for 10 Note Symbol 02 Stations 2 stations SV2000 Double wiring specifications (1) One-touch fitting for 12 SV3000 12 02 12 stations 2 stations Specified layout (2) One-touch fitting for 12 (up to 24 solenoids possible.) 20 20 stations Note 1) Double

ZQ-OM01401

1 ZQA-Q25LO--VQ100 (ZQ ) Assy(DC24V ) VQZ1000V-85-1A 97mm 41 - No.ZQ-OM01401-B 13. (1),(2) (3),(4) (4),(5) (6) (14) (7) (8) (9) (6),(10) (11) (12) (13) (3),(4), (5),(6),(14) (15) (7) (8) (16) 42 - No.ZQ-OM01401-B No. (1) (2) (3) ON 10 (%) (4) (5) Assy (6) (7) (8) 0.72[V] (9) Ass'y (10) 43 - No.ZQ-OM01401-B No. (11) (12) (13) (14) Ass'y (15) ON/OFF (16) (ZQ-ZSV-A

0.4

2 Gasket Seal Clamp screw Clip HNBR HNBR Carbon steel Stainless steel 12 12 12 12 Pilot valve assembly V112 A Function Coil voltage Note) A set of parts containing 12 pcs. each is enclosed. 1 2 3 4 5 6 Symbol Specifications DC AC 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC (0.4 W) Note 1) Nil Standard (0.95 W) High-speed response type B (0.95

Table of Contents

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

Air Cylinder

V 3 wire (PNP) M9P IC circuit 2 Wire M9B 3 wire (NPN) M9NW 12 V Solid state switch 3 wire (PNP) M9PW IC circuit Diagnostic indication (2-color indication) 2 Wire M9BW 3 wire (NPN) M9NA 5 V 12 V Relay, PLC Yes 24 V 12 V Water Resistant (2-color indication) 5 V 12 V 3 wire (PNP) M9PA IC circuit 12 V 2 Wire M9BA 3 Wire (NPN equivalent) A96 IC circuit Yes 5 V Reed switch No 12 V 100 V A93 Relay

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Model 90 5 V,12 V 5 V,12 V, 24 V Parallel cord Reed switch Solid state switch Solid state switch Reed switch IC circuit CRB2FW10 P211070-2 Yes Yes Yes No No 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V 90A Heavy-duty cord CRB2FW15 P211090-2 97 Parallel cord CRB2FW20 P211060-2 2-wire 93A 100 V CRB2FW30 P211080-2 For 10 and 15 T99 Relay, 24 V 12 V Grommet T99V PLC Heavy-duty cord S99

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Model 90 5 V,12 V 5 V,12 V, 24 V Parallel cord Reed switch Solid state switch Solid state switch Reed switch IC circuit CRB2FW10 P211070-2 Yes Yes Yes No No 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V 90A Heavy-duty cord CRB2FW15 P211090-2 97 Parallel cord CRB2FW20 P211060-2 2-wire 93A 100 V CRB2FW30 P211080-2 For 10 and 15 T99 Relay, 24 V 12 V Grommet T99V PLC Heavy-duty cord S99

2–4

A B Hs A B Hs Symbol 32 40 50 34 37.5 43.5 3.5 6 8.5 6.5 10.5 12 38 41.5 47.5 The dimension inside ( ) is for D-A72. 35 38.5 44.5 6.5 9 12 6.5 9 12 9.5 13.5 11.5 9.5 13.5 11.5 31.5 35 41 38.5 42 48 6 (6.5) 8.5 (9) 11.5 (12) 6.5 9 12 9 (9.5) 13 (13.5) 11 (11.5) 9.5 13.5 11.5 Bore size (mm) 9 Compact Cylinder/Guide Rod Type Series CQM The number of surfaces and grooves where an auto switch

44

16 20 24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44 27.5 31 32.9 T 16 13 79 12

VCW

Port size VCW2 VCW20-12-01 1/8, 1/4 VCW30-12-02 1/4, 3/8 VCW3 VCW30-12-04 1/2 VCW40-12-02 Series 1/4, 3/8 VCW4 VCW30-12-04 1/2 2 3 4 Class 2 Class 3 Class 4 VCW40-12-06 3/4 Bracket material: Stainless steel Valve type Material and insulation type N.C.

CP95

38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13

CP95

46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52