o

N,,13 x 0-5 0.05 tM3 x o.5l lo.o5l M3 x 0.5 0.04(18) NVJA322.M3 N.O. NVJA3l+M5 1G32 Nom. (M5) [10-32Nom. (M5) I IB3T ] 0.086(39) /without subplate\ \0.04(18) t NVJA324.M5 Bas mounted typo with subdato N.C. N.O. 0.1 t0.081 Note) B3T : One touch fitting for %' tube.

o

N,,13 x 0-5 0.05 tM3 x o.5l lo.o5l M3 x 0.5 0.04(18) NVJA322.M3 N.O. NVJA3l+M5 1G32 Nom. (M5) [10-32Nom. (M5) I IB3T ] 0.086(39) /without subplate\ \0.04(18) t NVJA324.M5 Bas mounted typo with subdato N.C. N.O. 0.1 t0.081 Note) B3T : One touch fitting for %' tube.

energy saving effect

Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) Power supply 40 3-phase 380 to 415 VAC (50/60 Hz) Specifications Model HRSH100-Al-40-l HRSH150-Al-40-l HRSH200-Al-40-l HRSH250-Al-40-l HRSH300-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.27 2.1 2.1 2.8 2.8 Control method PID control Ambient temperature/Altitude

1

20 20 mm 25 25 mm 32 32 mm 40 40 mm For applicable auto switches, refer to the table below.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

4 x 4.5 6 30 30 20 20 60.5 2 15.7 1.5 30 ZSE20C(F)/ISE20C(H) Series Dimensions Panel mount adapter ZSE20C(F) ISE20C(H) Option 2 B Panel mount adapter (Rear ported) (Part no.: ZS-46-B) 43.6 (Piping specification: 02) 4.8 20.2 50.8 34.5 47.8 34.5 21 Panel thickness 0.5 to 7 6.3 E Panel mount adapter (Bottom ported) (Part no.: ZS-35-B) 40 42.1 4 60.5 (Piping specification: 02L) (46) 40 Panel

IDX-OM-Z004

18 K 75 64 K K16K JIS 65A 10K (17) 17) 40 (K16K) JIS 65A 10K 479 127 1276 51 (14~18) 1418) 1375 1,3 -W4 -W4 (-W4) (-W4) Y1/2 Y1/2 () R1/2 R1/2 36 129 20 7122 350 700 752 1,3 -W5 (-W5) -W5 (-W5) R1/2 R1/2 IDF100F150F-W 6 4 IDX-OM-Z004 6 IDF150F-30-W K16K (10, 0.7m) () (10, 2m) JIS 80A 10K (10,0.7m) ) (10 ( (K16K) JIS 80A 10K 2m) 20 18 t 268 217 t 20 18 t 8x23 8x19

Rotary Gripper Series MRHQ

0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal gripping Pressure 0.7MPa 60 100 Pressure 0.7MPa 0.6MPa Gripping force N Gripping force N 50 0.6MPa 80 0.5MPa 0.5MPa 40 60 0.4MPa 0.4MPa 0.3MPa 30 0.3MPa 40 20 0.2MPa 0.2MPa 20 10 0 20 40 60 80 0 20 40 60 80 100 Gripping point L mm Gripping point L

MRHQ

N 40 30 Gripping force N MHY 0.5MPa 0.5MPa 30 0.4MPa 20 0.4MPa MHW 20 0.3MPa 0.3MPa 10 MRHQ 10 0.25MPa 0.25MPa Misc. 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm DMRHQ20S MRHQ20C 2050 100 Pressure 0.7MPa Pressure 0.7MPa 40 80 0.6MPa 0.6MPa Gripping force N Gripping force N 0.5MPa 30 60 0.5MPa 0.4MPa 20 40 0.4MPa 0.3MPa 0.3MPa 10 20 0.25MPa 0.25MPa 0 20 40

MHL2

0.2MPa 40 40 0.2MPa 0.2MPa 0.2MPa 20 20 40 80 120 160 200 40 80 120 160 20 40 60 80 100 120 140 0 0 0 20 40 60 80 100 120 0 Holding point R (mm) Holding point R (mm) Holding point R (mm) Holding point R (mm) MHL2-40D MHL2-40D MHL2-32D MHL2-32D 2 1 2 1 500 500 0.6MPa 0.6MPa 300 300 0.6MPa 0.6MPa 400 400 Holding force (N) Holding force (N) Holding force (N) Holding force (N) 250 250 0.5MPa

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

Transfer

spacer Bore size Long spacer 6 7 Short spacer 25 32 40 25 mm 32 mm 40 mm Unit part no.

MGC

Arrange so that maximum load will be 40% for theoretical force of 20, 50% for 32, 55% for 40 and 60% or less for 50, respectively.

100

Vacuum port adapter surface to be held Other Tubing Brands (Width across flats 18) Caution 1.

MLGC

3 Oil impregnated sintered alloy Oil impregnated sintered alloy Bushing 40: Zinc bronze die casted !4 Bushing 40: Zinc bronze die casted !

Thermo-con/Rack Mount Type

35C 200 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] HECR008-A Circulating fluid: Tap water Circulating fluid: Ethylene glycol 20% 2500 2500 Ambient temperature 15C 2000 2000 Cooling capacity [W] Cooling capacity [W] 1500 1500 1000 1000 Ambient temperature 25C Ambient temperature 25C Ambient temperature 35C 500

Suction cups with flange

29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -6No.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

114 186 340 405 485 660 870 20 40 60 30 60 10 40 60 L1 16 40 L2 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D 146 98 158 178 116 226 138 238 278 166 1010 1175 1645 1840 1850 80 40 80 100 50 60 20 40 60 MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 25 198 216 150 198 242 298 336 220 318 402 2720 2935 3070 3985 4820 100 120 70 120 160 188 246 286 40 30 32 20

Title not found

8.86 (2251 1 . 1 8 (30) 2.05 \521 0.55 (14) 0.83 l21l M12x1.75 043 ( 1 1 ) [426x].5 1.57 (40) 4.96 (126) 4.57 (116) 0.53 13.5) 0.71 (18) 5.91 1150) 3.62 ls2) 1 5 7 (40) 524 (133) 016) 3.62 \92) 'Min.

VK3000

350 19 380 369 20 399 388 L1 L2 3-2-7 Series VK3000 Base mounted (Bottom ported) Type 40 Manifold Grommet: G DIN terminal: D VV5K3-40Station -M5 ( ) ( ) ~ = L Dimension n: Stations n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1