PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

AME

167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 1 2 1 2 1 2 1 Please refer to page 14-20-57 for Made to Order Specifications. 14-20-41

PSE200

ZS-26-E (4 pcs. per set) Connector 3 Multi-channel Controller Series PSE200 Specifications Model PSE200 NPN open collector PSE201 PNP open collector Output specification 12 to 24VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Power supply voltage 55mA or less (Current consumption for sensor is not included.)

0.01

A 72 27 B 41.8 15.8 SFD100-02 23 Hole shape for bracket mounting 26.2 SMC 23 14.7 90 1.5 3 51 17 Use a countersunk head screw (M3) for bracket mounting. 72 27 3.5 SFD200-C SFD200-C Dimensions Model A 125 B SFD200C08 C10 C12 8 10 126 12 126 SMC 42 24 Bracket mounting dimensions 96.5 36 4 x 3.5 114.5 4 x 7 Applicable tubing O.D.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs., whichever is smaller.

VN-OMP0002

0.5 ~0.6 Nm + G 1/2 M3 0.5 ~0.6 Nm M3 0.5 ~0.6 Nm A-A () 1) 2) 3) 30 1) 2) 1 0.1MPa 5 VN-OMP0002 Series Series Series Series 1 DC AC VT307 VNA ( ) (JIS B2301)(JIS B 2302) VNA (JIS B 6349) VNA 1 ISO VG32 VNA ( JIS K 6439) VNA VNA VNA VNA AS AS AS AS VNA AS 10A 111 420-03 3/8 B(9.5) 12 12 12 12(P1) (P1) (P1) (P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 15A 211 420-04 1/2 B

Safety Instructions

Also, in order to use it under the optimum state, conduct a regular inspection once a half year. 17-6-10

ALB900

A 3 4 , 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 1 1 3 4 ALBA90-10 ALBA90-20 14-13-19

EXxx-OMV0018_ENG

Ambient temperature for operation: -10 to 50 oC Ambient temperature for storage: -20 to 60 oC 3 3 3 7 7 7 M3 hexagon screw Tightening torque 0.6 Nm 8 8 8 2 2 2 9 9 9 1 1 1 OFF 1 2 0 0 0 If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation.

EX500-Sx03_eng

Check that the M3 hexagon socket head cap screws have been tightened to the specified torque. If these items are not adhered to, it may lead to damage to the unit or intrusion of liquid or dust into the units.

฀AS

Bodysize Metricsize Inchsize 100 200 205 300 400 M3,M5standard 1/8standard 1/4standard 3/8standard 1/2standard Grease-free(Sealant:Fluorocoated)+ Restrictor(WithoutCheckValve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)AS2002F-04-X21 Note)Notparticle-free 4 6 8 10 12 Withone-touchfittings Restrictor(WithoutCheckValve) -X214 Use1/8"tube.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

VN-OMP0001

0.5 ~0.6 Nm + G 1/2 M3 0.5 ~0.6 Nm M3 0.5 ~0.6 Nm A-A () 6 VN-OMP0001 VNC VNC VNC VNC VNH VNH VNH VNH / / / / 1 DC AC VT307 12(P1) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) Air operated Solenoid Port VNC02 12 (P1) External pilot Bleed port External pilot 10 (P2) Bleed port External pilot Pilot exhaust Ass Ass Ass Ass y y y y VNH VNH VNH VNH () 3 3 3 3

SS3YJ3 manifold. 302.00000 lb. VVD.

Part Number Description: MFLD BASE MT   Product Line: V   Product Line Description: VALVE   Family Code: 359   Family Description: SS3YJ3 MANIFOLD SYJ300 3/PORT   Class Code: 1J   Part Code: 2   Reference Code:  G   Click here to report information errorImage shown may not match exact part number

Part Number Description: MFLD BASE MT   Product Line: V   Product Line Description: VALVE   Family Code: 359   Family Description: SS3YJ3 MANIFOLD SYJ300 3/PORT   Class Code: 1J   Part Code: 2   Reference Code:  G   Click here to report information errorImage shown may not match exact part number

SS3YJ3 MANIFOLD SYJ300 3/PORT, 3 PORT SOLENOID VALVE

Part Number Description: MFLD, BOTTOM PORTED   Product Line: V   Product Line Description: VALVE   Family Code: 359   Family Description: SS3YJ3 MANIFOLD SYJ300 3/PORT   Class Code: 1J   Click here to report information errorImage shown may not match exact part number

SYJ300, base mount valve manifold, Maximum 20 stations available as standard, M5 ports (41Type); 5/32" NPT or ø4 one-touch fittings (42type), Manifold for internal pilot valves, A ports on manifold, SS3YJ3 manifold, 4/5 PORT SOLENOID VALVE, VVD, 320.00000 lb